Fig. 1 Optical configuration of 97436 500 W Oriel Flood Exposure Source 6 x 6 Beam Size.High intensity outputs
Highly uniform, large collimated beams
Efficient out of band rejection
Timed exposures
We offer 500 and 1000 W Flood Exposure Sources for the near UV (350 - 450 nm), mid UV (260 - 320 nm) and deep UV (220 - 260 nm). NUV is designed to expose most photoresists, MUV is used for polymer cross-linking and novel resists, and DUV for deep ultraviolet studies. Our illuminators irradiate samples from 2.13 x 2.13 inches up to 10 x 10 inches (54x54 to 254x254 mm).
The spectral output of the illuminator is determined by three factors:
The type of lamp
The dichroic mirror
The collimating lens
NUV sources run an Hg lamp, use a BK 7 glass lens (which does not transmit below 350 nm), and have the appropriate dichroic mirrors. MUV and DUV sources run an HgXe lamp, use a UV grade fused silica lens (which transmits down to 200 nm), and have the appropriate dichroics. If you need the flexibility to work in all regions, select a DUV source and purchase additional dichroic mirrors for the respective regions.
Fig. 1 Optical configuration of 97436 500 W Oriel Flood Exposure Source 6 x 6 Beam Size.
Fig. 1 shows the beam path of the housing. An efficient ellipsoidal reflector, coated with AlSiO for the NUV or enhanced Rhodium for MUV and DUV systems, collects up to 70% of the arc lamp output. A 45° primary dichroic mirror spectrally reflects the light after passing through a proprietary design beam homogenizer. The homogenizer, or optical integrator, is similar to a compound fly\'s eye. It scrambles the arc lamp\'s non-uniform irradiance to produce many diverging beams. These diverging beams overlap at the collimating lens to produce a highly uniform, collimated beam at the work plane.
A robust electronic split-blade shutter system is located after the homogenizer. It consists of a highly accurate and repeatable shutter, and a shutter power supply. It may be opened and closed manually with a switch on the housing side panel or via the 68955 Hand-Held Switch. For automated exposure control, we offer the 68951 Digital Exposure Controller or 68945 Digital Timer. Upon request, the housing may also be wired to operate the shutter via a computer logic level.
Our 500 W Hg NUV housings contain a built-in soft start ignitor. Designed exclusively for Hg lamps, this ignitor provides high voltage ramp for reliable and low stress ignition. The result is neglible EMI. 500 and 1000 W Hg(Xe) housings contain a high voltage ignitor, necessary to ignite this lamp type. These ignitors apply a high voltage (25 kV) pulsed discharge across the lamp electrodes. Close proximity to the lamp reduces the path length the pulse must travel, facilitating ignition and reducing EMI.
Each housing contains three interlock systems. Opening the housing door will trigger an electronic interlock switch to automatically interrupt power to the system. This prevents inadvertent operator exposure to the lamp. A thermal interlock shuts down the system if the temperature exceeds the level for safe operation. A third interlock shuts down the system if the lamp\'s cooling fan fails.
Fig. 2 Typical output of 6285 500 W Hg Lamp
The NUV sources run Hg short arc lamps; these contain a precise amount of mercury and either xenon or argon, which act as a starter gas. Strong mercury lines through the ultraviolet and visible wavelengths dominate their output spectrum. The 365 nm line makes it ideal for use in the NUV.
The MUV and DUV sources operate Hg(Xe) short arc lamps, which are similar to Hg lamps but contain more xenon gas than just the starter gas. The additional xenon enhances the short wave UV making it ideal for use below 350 nm. We supply ozone free Hg(Xe) lamps with the NUV and MUV sources, and UV enhanced models for the DUV models.
The 68951 is a light intensity controller and digital timer in one. It interfaces with the power supply to provide a constant level of output to within ±1%. Although our supplies are highly regulated to operate the lamp at constant power, the light output will change over time due to lamp electrode erosion, gas absorption or desorption, aging and lamp operating temperatures. The 68951 compensates for these factors.
The Digital Timer portion of the 68951 (which is also available as a stand alone device under model 68945 controls the split-blade shutter and is recommended for accurate and consistent timed exposures. It provides a TTL output to the shutter driver. The 68951 is capable of exposure times from 10 ms to 9999 hours, in increments as short as 10 ms. However, the mechanical response time of the shutter in our Exposure Sources limits the minimum exposure time to 100 ms, and the shortest interval between exposures, to 80 ms.
These sources produce a specific broadband spectral output. Optional narrowband filter assemblies enable you to isolate specific, narrowband outputs, such as 365 nm (i-line), and 436 nm (g-line). For 500 W Sources, purchase the 87032 Filter Mount; 1000 W sources include the filter mount.
You may wish to monitor the intensity and uniformity of your output beam, especially if you have chosen not to purchase a Digital Exposure Controller. Also, during installation of a new lamp, you should align your lamp for optimal irradiance. In order to do this, you need a power meter and probe for your specific wavelength region, to determine when you have the lamp in the correct position. The 84410 is a hand-held power meter with direct reading in any optical units and user-friendly alpha-numeric display.
A sampling of the simple operating buttons is:
“Zero“ allows the automatic subtraction of background light.
“Signal“ selects measurement mode, including automatically selected range and units. This is used for measuring the instantaneous intensity, with the reading updated every half second, auto ranging over a 7-decade dynamic range.
“Integrate“ alternately selects between two 5-decade dynamic range integration modes; these modes are auto ranging and auto units. It measures the dose or sum of all light reaching the detector.
| Model | For These Flood Exposure Sources | Spectral Region | Peak Wavelength | Sensitivity | Sensor Area (mm) |
|---|---|---|---|---|---|
| 84416 | NUV | 320 - 475 (nm) | 400 nm | 2,5 x 10-7to 8,75 x 10-1 | 33 x 33 |
| 84415 | NUV | 326 - 401 (nm) | 365 nm | 5,2 x 10-7to 1,8 x 10+0 | 33 x 33 |
| 84414 | MUV | 185 - 320 (nm) | 280 nm | 8,3 x 10-8to 8,3 x 10-4 | 60 x 43 |
| 84413 | DUV | 185 - 320 (nm) | 240 nm | 8,3 x 10-8to 8,3 x 10-4 | 60 x 43 |
These sources, particularly the DUV and MUV systems, emit dangerous levels of UV radiation. Always wear Ultraviolet Safety Equipment like protective clothing, gloves and a faceshield when working around these sources.
All Oriel Light Sources are shipped with a one-year warranty. Now, you can extend the warranty period by an additional year with our Extended Care Plan. Please contact a Sales Engineer for complete details.