Design Features

The ATS5000 was designed to meet the needs of the most demanding applications. A rigid base, fully sealed metal waycovers and high-performance brushless servomotor make the ATS5000 the stage of choice in industrial applications such as laser machining, ceramic scribing or any other application requiring high accuracy in a production environment.

Rugged Construction

The greatest attention to detail is evident in all aspects of the ATS5000\'s design. The tabletop utilizes stainless steel Helicoil™ inserts to protect mounting holes against thread wear. An integral metal waycover is provided to protect the stage from hot sparks or debris. Both the metal waycover and tabletop are treated with a hardcoat (Rockwell 62 hardness) that is scratch-resistant and provides outstanding protection in the harshest applications.

To further provide the stage with protection from a caustic environment, the ATS5000 utilizes Aerotech\'s unique tensioned side-strap system. The straps are in a vertical orientation that prevents debris from accumulating on top of them and are tensioned to create a tight seal. An optional air-purge fitting is available that allows air to be forced into the body of the stage. This creates a positive pressure that prevents any particulate, no matter how fine, from entering the stage.

To aid in system assembly, the base mounting holes are located outboard of the stage. Therefore, the stage can be mounted without removing the hardcover.

High Performance

The base of the ATS5000 is machined from special aluminum alloy tooling plate to provide high stiffness and long-term stability. Sealed linear motion guide bearings with integral wipers are incorporated to provide excellent payload capability and long-life, even with heavy offset loads.

Noncontact linear encoders with submicron repeatabilities are available on all ATS5000 series stages. Optional HALAR and HALSF factory calibrations are available that further increase the standard accuracy, straightness and flatness specifications to even finer precision.

Motor and Drives

Included with all ATS5000 series stages is Aerotech\'s high performance BM series brushless servomotor. Aerotech manufactures a wide range of matching drives and controls to provide a fully integrated and optimized solution. Optional brushless and slotless (BMS series), NEMA 34 DC brush and microstepping motors are also offered. For maximum performance, a linear motor version is available – please refer to the ALS5000.


ATS5000 Specifications

Model ATS50030 ATS50045 ATS50060 ATS50075 ATS50090 ATS50100
Travel 300 mm 450 mm 600 mm 750 mm 900 mm 1000 mm
Drive System Super-Precision Ground Ball Screw/Brushless Servomotor (BM250-MS-E1000H)
Bus Voltage Up to 320 VDC
Continuous Current Apk Up to 10.5 A
Arms Up to 7.4 A
Feedback Noncontact Rotary Encoder (1000 line)
Resolution 4 mm/rev Lead 1.0 µm @ 4000 steps/rev Motor Resolution
0.2 in/rev Lead 1.25 µm @ 4000 steps/rev Motor Resolution
LT Linear Encoder 0.005 µm - 1.0 µm
Maximum Travel Speed(1) 4 mm/rev Lead 250 mm/s 200 mm/s
0.2 in/rev Lead 300 mm/s 250 mm/s 200 mm/s
Maximum Load Horizontal 135.0 kg
Vertical 45.0 kg
Side 45.0 kg
Accuracy Ball Screw HALAR(3) ±1.0 µm ±1.5 µm ±2.0 µm ±2.0 µm ±3.0 µm ±3.0 µm
Standard +0.0, 
-12.0 µm 		+0.0, 
-18.0 µm 		+0.0, 
-24.0 µm 		+0.0, 
-30.0 µm 		+0.0, 
-36.0 µm 		+0.0, 
-36.0 µm
LT HALAR(3) ±1.0 µm
Standard ±12.0 µm ±18.0 µm ±24.0 µm ±30.0 µm ±36.0 µm ±40.0 µm
Bidirectional Repeatability Ball Screw HALAR(3) ±0.5 µm
Standard ±1.0 µm
LT ±0.5 µm
Straightness and Flatness HALSF ±1.5 µm ±2.5 µm ±3.0 µm ±3.5 µm ±4.5 µm ±5.0 µm
Standard ±3.0 µm ±4.0 µm ±6.0 µm ±7.0 µm ±8.0 µm ±9.0 µm
Pitch and Yaw 10 arc sec 14 arc sec 17 arc sec 20 arc sec 25 arc sec 25 arc sec
Nominal Stage Weight Less Motor 35.0 kg 42 kg 50 kg 62 kg 68 kg 72 kg
With Motor 39.0 kg 46 kg 54 kg 66 kg 71 kg 76 kg
Construction Aluminum Body/Stage; Hardcoated Table (62 Rockwell Hardness);
Textured Epoxy (Polane-T) Pebble Grey Paint

  1. Excessive duty cycle may impact stage accuracy.

  2. Payload specifications are for single-axis system and based on ball screw and bearing life of 2500 km (100 million inches) of travel.

  3. Available with Aerotech controllers.

  4. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.