Design Features

The ATS150 series motor-driven linear stages provide the high resolution and repeatability required for semiconductor wafer testing and fabrication, automated microscope inspection systems and precision micromachining applications.

Construction Features

ATS150 series stages are machined from a special cast aluminum alloy to provide a high strength-to-weight ratio and long-term stability. The base is a box design that provides exceptional stiffness and stability.

ATS150 series stages employ a precision-ground ball screw that is pre-loaded to eliminate backlash, and its nut has wipers to prevent contamination and maintain high accuracy throughout the life of the stage. High quality, pre-loaded duplex bearings are used to eliminate axial play.

All ATS150 series stages incorporate Linear Motion Guide (LMG) bearings to provide high load capability and high stiffness. The LMG design provides a compact stage with continuous carriage support over the entire travel and good cantilevered load capability. Integral wipers on the bearing trucks help ensure stage travel life. Highly accurate optical limit switches and end stops are also standard.

Integral bellows-type waycovers protect the drive and bearing system from contamination. Metal surfaces are protected with an attractive clear anodized finish. Both metric (standard) and English mounting and bolt-hole patterns are available.

Linear Encoder

A precision noncontact linear encoder is an option. The encoder is mounted internal to the stage, protecting it from external contaminants and debris.

Motors and Drives

Included with all ATS150 series stages are Aerotech’s BMS series brushless rotary motors. This motor has all of the advantages of a brushless motor – high acceleration, no brushes to wear and lower heating – yet has zero cogging for extremely smooth motion and accuracy. Aerotech manufactures a wide range of matching drives and controls to provide a fully integrated and optimized motion solution.


ATS150 Specifications

Model ATS150-100 ATS150-150 ATS150-200 ATS150-250
Travel 100 mm 150 mm 200 mm 250 mm
Drive System Super Precision Ground Ball Screw/Brushless Servomotor (BMS60-A-D25-E1000H)
Bus Voltage Up to 160 VDC
Continuous Current Apk Up to 2.3 A
Arms Up to 1.6 A
Feedback Noncontact Rotary Encoder (1000 line)
Resolution 2 mm/rev lead 0.5 µm @ 4000 steps/rev Motor Resolution
4 mm/rev lead 1.0 µm @ 4000 steps/rev Motor Resolution
LN Linear Encoder 0.001 µm - 0.2 µm N/A N/A
Maximum Travel Speed(1) 2 mm/rev lead 115 mm/s
4 mm/rev lead 230 mm/s
Maximum Load(2) Horizontal 45.0 kg
Vertical 25.0 kg
Side 25.0 kg
Accuracy Ball Screw HALAR(3) ±1.0 µm
Standard +2,-4 µm +2,-5 µm +2,-8 µm +2,-10 µm
LN HALAR(3) ±1.0 µm N/A N/A
Standard ±5.0 µm N/A N/A
Repeatability (Bidirectional) Ball Screw HALAR(3) ±0.5 µm
Standard ±1.0 µm
LN ±0.5 µm N/A N/A
Straightness and Flatness Differential HALSF 1 µm/25 mm
Standard 2 µm/25 mm
Maximum
Deviation 		HALSF ±1.0 µm ±1.5 µm ±2.0 µm ±3.0 µm
Standard ±2.0 µm ±3.0 µm ±4.0 µm ±5.0 µm
Pitch and Yaw 8 arc sec 10 arc sec 12 arc sec 14 arc sec
Nominal Stage Weight Less Motor 6.1 kg 7.5 kg 7.9 kg 8.4 kg
With Motor 7.2 kg 8.6 kg 9.0 kg 9.5 kg
Construction Aluminum Body/Stage and Table; Clear Anodize Finish

  1. Excessive duty cycle may impact accuracy.

  2. Payload specifications are for single axis system and based on ball screw and bearing life of 2500 km (100 million inches) of travel.

  3. Available with Aerotech controllers.

  4. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.