Compact stage with travels to 100 mm
Low-thermal expansion glass-scale linear encoder
Precision-ground ball-screw drive
DC servo or stepper motor
Anti-creep crossed-roller bearings
High resolution (0.025 µm), repeatability (±0.1 µm) and accuracy (±0.75 µm)
Optional bellows waycovers
Compact multi-axis configurations
Aerotech’s MPS75SLE is a compact, high-performance linear positioning stage offering the benefits of direct measurement feedback via a linear encoder. The MPS75SLE is the ideal high-accuracy stage for applications in optics positioning, z-axis positioning of sensors in surface metrology, or high-precision alignment. Multi-axis stage configurations can easily be assembled with other MPS linear and rotary stages using the multitude of adapter brackets and mounting compatibility inherent in the entire MPS stage family.
The precision ground, preloaded ball-screw coupled with the linear encoder provide outstanding accuracy, repeatability and a positioning resolution capability to 25 nm. The anti-creep crossed-roller bearings provide exceptionally smooth travel and high-load capacity in a compact package.
Unlike competitive designs using steel (13 ppm/˚C) or glass scales with 8 ppm/˚C thermal expansion coefficients, the MPS75SLE is available with a low thermal expansion (3.3 ppm/˚C) precision glass scale allowing for high-accuracy and repeatable positioning over long periods of time. The linear encoder is available with amplified sine (1 Vpp) or 50 nm TTL digital outputs allowing for easy integration with all standard controllers.
The MPS75SLE motor options include a DC servomotor with a high-resolution rotary encoder or a stepper motor. Just like the MPS75SL, the SLE is available with and without optional bellows waycovers.
An optional mounting plate provides direct mounting to both English and metric optical breadboards. The inherent mounting compatibility of all MPS stages allows for simple mounting in multi-axis arrangements.
| Model | MPS75SLE-025 | MPS75SLE-050 | MPS75SLE-075 | MPS75SLE-100 | ||
|---|---|---|---|---|---|---|
| Travel | 25 mm | 50 mm | 75 mm | 100 mm | ||
| Accuracy | Standard | ±1.75 µm | ±2.25 µm | ±2.75 µm | ±3.25 µm | |
| HALAR(1) | ±0.75 µm | ±0.75 µm | ±1.0 µm | ±1.0 µm | ||
|
Resolution (Minimum Incremental Motion)(2) | 0.025 µm | |||||
| Repeatability (Bidirectional)(2) | ±0.1 µm | |||||
| Straightness | ±2.0 µm | ±2.0 µm | ±3.0 µm | ±3.0 µm | ||
| Flatness | ±2.0 µm | ±2.0 µm | ±3.0 µm | ±3.0 µm | ||
| Maximum Speed |
1.0 mm/rev Ball Screw | DC Motor | 50 mm/s | 50 mm/s | 50 mm/s | 35 mm/s |
| SM Motor | 30 mm/s | 30 mm/s | 30 mm/s | 30 mm/s | ||
| Load Capacity(3) | Horizontal | 15 kg | ||||
| Side | 15 kg | |||||
| Vertical | 4 kg | |||||
| Stage Mass | 2.3 kg | 2.4 kg | ||||