MPS75SL Load Curves
Compact 75 mm width with travel to 100 mm
Precision ground ball-screw drive
DC servo or stepper motor
Anti-creep crossed-roller bearings
High resolution (0.1 µm), repeatability (±0.75 µm) and accuracy (±1.0 µm)
High-vacuum compatible
Optional bellows waycovers
Compact multi-axis configurations
The MPS75SL is a compact, high-performance linear positioning stage that is perfect for the confines of the laboratory while providing the high reliability required in a production environment. It is the ideal choice for measurement, testing, accurate alignment and component assembly.
The precision ground ball-screw provides exceptional accuracy, repeatability and ultra-fine positioning resolution capability to 0.1 micron. The DC servomotor is equipped with a rotary encoder. The anti-creep crossed-roller linear bearings provide smooth travel and excellent payload characteristics.
The MPS75SL is available with optional vacuum preparation to 10-6 Torr. It is the perfect compact stage choice for today\'s demanding vacuum applications in markets such as semiconductor manufacturing and inspection, optics fabrication and military/aerospace.
An optional breadboard mounting plate provides direct mounting to both English and metric breadboards. Bellows waycovers are available for use in dusty environments. Any of the models can be mounted in an XY configuration and, with the right-angle L-bracket, in XYZ configurations. It can also be mounted with the smaller MPS50SL stage.
The MPS75SL is a member of the MPS (Miniature Positioning Stage) family of linear, rotary, goniometer and vertical lift and Z stages. Two or more stages can easily be mounted together in numerous combinations using standardized mounting patterns and adapter plates.
| Model | MPS75SL-025 | MPS75SL-050 | MPS75SL-075 | MPS75SL-100 | ||
|---|---|---|---|---|---|---|
| Travel | 25 mm | 50 mm | 75 mm | 100 mm | ||
| Accuracy | Standard | ±2.5 µm | ±3.0 µm | ±3.5 µm | ±4.0 µm | |
| HALAR(1) | ±1.0 µm | ±1.0 µm | ±1.5 µm | ±1.5 µm | ||
| Resolution | 0.1 µm | |||||
| Repeatability (Bidirectional)(1) | ±0.75 µm | |||||
| Straightness | ±2.0 µm | ±2.0 µm | ±3.0 µm | ±3.0 µm | ||
| Flatness | ±2.0 µm | ±2.0 µm | ±3.0 µm | ±3.0 µm | ||
| Maximum Speed |
1.0 mm/rev Ball Screw | DC Motor | 50 mm/s | 50 mm/s | 50 mm/s | 35 mm/s |
| SM Motor | 30 mm/s | 30 mm/s | 30 mm/s | 30 mm/s | ||
| Load Capacity(2) | Horizontal | 15 kg | ||||
| Side | 15 kg | |||||
| Vertical | 4 kg | |||||
| Stage Mass | 1.7 kg | 1.8 kg | 1.9 kg | 2.0 kg | ||
| Material | Anodized Aluminum Body | |||||
With Aerotech controllers.
Payload specifications are single-axis system.
Excessive duty cycle may impact stage accuracy.
Specifications are for single-axis systems measured 25 mm above the tabletop.
Contact factory for specifications of stages with bellows option.
| Model | DC Motor (Standard and VAC) | SM Motor (Standard and VAC) |
|---|---|---|
| Drive System | DC Brush Servomotor | 24 VDC Bipolar Stepper Motor |
| Feedback | 10,000 lines/rev Rotary Encoder | N/A |
| Electronic Resolution | 0.025 µm | 0.025 µm @ 40,000 steps/rev Motor Resolution |
| Maximum Bus Voltage | 48 VDC | 48 VDC* |
| Limit Switches | 5V, Normally Closed | |
*With Aerotech control system.
| Model | DC Motor and SM Motor | |
|---|---|---|
| Multi-Axis | A3200 | Npaq/Npaq MR/Ndrive MP |
| Ensemble | Ensemble LAB/Epaq/Epaq MR/Ensemble MP | |
| Single Axis | Soloist | Soloist MP |
MPS75SL Load Curves