MPS50SL Load Curves
Compact 50 mm width with travel to 50 mm
Precision ground ball-screw or lead-screw drive
DC servo or stepper motor
Crossed-roller bearings
High resolution (0.1 µm), repeatability (±0.75 µm), and accuracy (±1.5 µm)
High vacuum capable
Compact multi-axis configurations
The MPS50SL is a compact, high-performance linear positioning stage that is perfect for the confines of the laboratory while providing the high reliability required in a production environment. It is the ideal choice for measurement, testing, accurate alignment and component assembly in space-constrained applications.
The precision ground ball-screw or lead screw provides exceptional accuracy, repeatability and ultra-fine positioning resolution capability to 0.1 micron. The DC servomotor is equipped with a rotary encoder. The crossed-roller linear bearings provide smooth travel and excellent payload characteristics.
The MPS50SL is available with optional vacuum preparation to 10-6 Torr. It is the perfect compact stage choice for today\'s demanding vacuum applications in markets such as semiconductor manufacturing and inspection, optics fabrication and military/aerospace.
An optional breadboard mounting plate provides direct mounting to both English and metric breadboards. Any of the models can be mounted in an XY configuration and, with the right-angle L-bracket, in XYZ configurations. It can also be directly mounted to the larger MPS75SL stage.
The MPS50SL is a member of the MPS (Miniature Positioning Stage) family of linear, rotary, goniometer and vertical lift and Z stages. Two or more stages can easily be mounted together in numerous combinations using standardized mounting patterns and adapter plates.
| Model | MPS50SL-025 | MPS50SL-050 | ||
|---|---|---|---|---|
| Travel | 25 mm | 50 mm | ||
| Accuracy | 1.0 mm/rev Ball Screw | Standard | ±3.0 µm | ±4.0 µm |
| HALAR(1) | ±1.5 µm | ±1.5 µm | ||
| 0.5 mm/rev Lead Screw | Standard | ±4.0 µm | ±6.0 µm | |
| HALAR(1) | ±2.0 µm | ±2.5 µm | ||
| Resolution | 1.0 mm/rev Ball Screw | 0.1 µm | 0.1 µm | |
| 0.5 mm/rev Lead Screw | 0.1 µm | 0.1 µm | ||
| Repeatability (Bidirectional)(1) | 1.0 mm/rev Ball Screw | ±0.75 µm | ±0.75 µm | |
| 0.5 mm/rev Lead Screw | ±1.0 µm | ±1.0 µm | ||
| Straightness | ±2.0 µm | ±3.0 µm | ||
| Flatness | ±2.0 µm | ±3.0 µm | ||
| Maximum Speed | 1.0 mm/rev Ball Screw | DC Motor | 5 mm/s | 5 mm/s |
| SM Motor | 1 mm/s | 1 mm/s | ||
| 0.5 mm/rev Lead Screw | DC Motor | 2.5 mm/s | 2.5 mm/s | |
| SM Motor | 0.5 mm/s | 0.5 mm/s | ||
| Load Capacity(2) | Horizontal | 5 kg | 5 kg | |
| Side | 5 kg | 5 kg | ||
| Vertical | 2.5 kg | 2.5 kg | ||
| Stage Mass | 0.85 kg | 0.9 kg | ||
| Material | Anodized Aluminum Body | |||
With Aerotech controllers.
Payload specifications are single-axis system.
Excessive duty cycle may impact stage accuracy.
Specifications are for single-axis systems measured 25 mm above the tabletop.
| Model | DC Motor (Standard and VAC) | SM Motor (Standard and VAC) | |
|---|---|---|---|
| Drive System | DC Brush Servomotor with 14:1 Gearbox | 24 VDC Bipolar Stepper Motor with 43:1 Gearbox | |
| Feedback | 512 lines/rev Rotary Encoder | N/A | |
| Electronic Resolution | 1.0 mm/rev Ball Screw | 0.0348 µm | 0.0484 µm @ 480 steps/rev Motor Resolution |
| 0.5 mm/rev Lead Screw | 0.0174 µm | 0.0242 µm @ 480 steps/rev Motor Resolution | |
| Maximum Bus Voltage | 48 VDC | 48 VDC* | |
| Limit Switches | 5 V, Normally Closed | 5 V, Normally Closed | |
*With Aerotech control system.
| Model | DC Motor and SM Motor | |
|---|---|---|
| Multi-Axis | A3200 | Npaq/Npaq MR/Ndrive MP |
| Ensemble | Ensemble LAB/Epaq/Epaq MR/Ensemble MP | |
| Single Axis | Soloist | Soloist MP |
MPS50SL Load Curves