Design Features

The PRO560LM is the full-sized offering in Aerotech’s PRO-LM series of high performance, cost-effective and versatile linear motor positioning stages. The PRO560LM was designed to be used primarily as the lower axis of a PRO560LM/PRO280LM XY stack, but it may be used anywhere the wider support platform, increased roll stiffness and extra motor thrust force may be of benefit. The PRO560LM is the stage of choice in industrial applications such as laser machining, medical component manufacturing and other applications requiring high accuracy in a production environment.

Construction Features

Sealed linear motion guide bearings with integral wipers are incorporated to provide excellent payload capability and long life. Both the metal waycover and tabletop are treated with a hardcoat that is scratch-resistant and provides outstanding protection in the harshest applications. The tabletop utilizes stainless steel Helicoil® inserts to protect mounting holes against thread wear. Several tabletop options are available for metric or English mounting, as well as for direct interface with our popular ADRS, ADRT and AGR rotary stages. In addition, configurable cable management options are available for single or multi-axis systems.

Linear Motor Drive

Two of Aerotech’s high-power, cog-free, BLMH series linear motors drive the PRO560LM. The non-magnetic forcer coils provide high force with zero cogging for super-smooth velocity and position control. This zero cogging design is ideal for applications requiring outstanding contour accuracy and smooth velocity profiling. As with all Aerotech linear motor positioning stages, the linear motors have zero backlash, no windup, zero friction and outstanding system responsiveness. The magnetic fields of the linear motors are totally self-contained within the U-channel design. Many high-performance applications cannot tolerate the stray magnetic fields generated by flat-motor magnet tracks.

High Performance

Noncontact linear encoders with micron-level repeatabilities are standard on all PRO560LM series stages. Either a line-driver output or amplified sine-wave output encoder is available.

The optional HALAR factory calibration further increases the standard accuracy and repeatability. Aerotech manufactures a wide range of matching drives and controls to provide a fully integrated and optimized motion solution.


Mechanical Specifications

Model PRO560LM-0300 PRO560LM-0400 PRO560LM-0500 PRO560LM-0600
Travel 300 mm 400 mm 500 mm 600 mm
Accuracy(1) Standard ±11.5 µm ±14.0 µm ±16.0 µm ±17.5 µm
HALAR ±2.0 µm ±2.0 µm ±2.5 µm ±2.5 µm
Resolution(2) 250 nm 250 nm 250 nm 250 nm
Bidirectional Repeatability(1) ±0.75 µm ±0.75 µm ±0.75 µm ±0.75 µm
Straightness(1) ±5 µm ±6.5 µm ±7.25 µm ±8 µm
Flatness(1) ±5 µm ±6.5 µm ±7.25 µm ±8 µm
Pitch 10 arc sec 13 arc sec 15.5 arc sec 18 arc sec
Roll 10 arc sec 13 arc sec 15.5 arc sec 18 arc sec
Yaw 13 arc sec 16 arc sec 19.5 arc sec 22.5 arc sec
Maximum Speed 2 m/s
Maximum Acceleration 3 g
Maximum Force (Continuous) 532.4 N
Maximum Force (Continuous) (With Air – 20 psi) 792.6 N
Load Capacity(3) Horizontal 150 kg
Side 150 kg
Moving Mass 20.5 kg
Stage Mass 98 kg 109 kg 118 kg 130 kg
Material Aluminum
MTBF (Mean Time 
Between Failure)
20,000 Hours
  1. Certified with -PLOTS option.

  2. Minimum incremental motion.

  3. Axis orientation for on-axis loading is listed. See curves for offset loading behavior.

  4. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.

Model PRO560LM-0800 PRO560LM-1000 PRO560LM-1200 PRO560LM-1500
Travel 800 mm 1000 mm 1200 mm 1500 mm
Accuracy(1) Standard ±19 µm ±20 µm ±21 µm ±22 µm
HALAR ±2.5 µm ±2.5 µm ±3.0 µm ±3.0 µm
Resolution(2) 250 nm 250 nm 250 nm 250 nm
Bidirectional Repeatability(1) ±0.75 µm ±0.75 µm ±0.75 µm ±0.75 µm
Straightness(1) ±9.75 µm ±11.25 µm ±12.5 µm ±14 µm
Flatness(1) ±9.75 µm ±11.25 µm ±12.5 µm ±14 µm
Pitch 22 arc sec 24.5 arc sec 27 arc sec 29 arc sec
Roll 22 arc sec 24.5 arc sec 27 arc sec 29 arc sec
Yaw 27.5 arc sec 30.5 arc sec 33.5 arc sec 36 arc sec
Maximum Speed 2 m/s
Maximum Acceleration 3 g
Maximum Force (Continuous) 532.4 N
Maximum Force (Continuous) (With Air – 20 psi) 792.6 N
Load Capacity(3) Horizontal 150 kg
Side 150 kg
Moving Mass 20.5 kg
Stage Mass 150 kg 173 kg 193 kg 224 kg
Material Aluminum
MTBF (Mean Time 
Between Failure)
20,000 Hours
  1. Certified with -PLOTS option.

  2. Minimum incremental motion.

  3. Axis orientation for on-axis loading is listed. See curves for offset loading behavior.

  4. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.

Electrical Specifications

Drive System Brushless Linear Servomotor
Feedback Noncontact Linear Encoder
Maximum Bus Voltage 320 VDC
Limit Switches 5 V, Normally Closed
Home Switch Near Center

Recommended Controller

Multi-Axis A3200 Ndrive CP/Ndrive HPe/Npaq
Ensemble Ensemble CP/Ensemble HPe
Single Axis Soloist Soloist CP/Soloist HPe