产品名称： 直线电机位移台PPS-110LM
产品编号： PPS-110LM
台面尺寸： 110 x 110mm
行程： 100、200、300、500、1000mm
最大载重： 25kg
分辨率： 2nm
重复定位精度： ±20nm
真空选项：
The PPS-110 is a high-precision, long travel linear stage. It is available with piezo motor, linear motor, or ballscrew drives. Stainless steel recirculating ball bearings allow for smooth motion and high guiding accuracy for loads up to 25kg. Closed loop resolution of 2nm is achievable with a high precision digital encoder.
| Travel range [mm] | 100 | 200 | 300 | 500 | 1000 |
| Straightness/Flatness [µm] | ±3 | ±4 | ±5 | ±10 | ±15 |
| Pitch [µrad] | ±75 | ±100 | ±125 | ±200 | ±300 |
| Yaw [µrad] | ±75 | ±85 | ±100 | ±200 | ±300 |
| Motor option | Linear Motor |
| Speed, max [mm/s] | 250 (Depending on load) |
| Encoder option | Digital (RS-422) |
| Resolution, typical [µm] | 0.002 |
| Repeatability, bi-directional [µm] | ±0.02 |
| Repeatability, uni-directional [µm] | 0.02 |
| Accuracy [µm] | ±1 |
| Orientation | Fx
[N] | Fy
[N] | Fz
N] | Mx
N·m] | My
[N·m] | Mz
[N·m] | kax
[µrad/N·m] | kay
[µrad/N·m] |
| Load, max | 150 peak, 50 continuous | 150 | 250 | 60 | 30 | 35 | 50 | 50 |
| Order no.: | PPS-110LM- | |||||
|---|---|---|---|---|---|---|
| DRIVE | ||||||
| Linear Motor (LM-004) | 3 | |||||
| TRAVEL | ||||||
| 100mm | 1 | |||||
| 200mm | 2 | |||||
| 300mm | 3 | |||||
| 500mm | 4 | |||||
| 1000mm | 5 | |||||
| ENCODER | ||||||
| Digital (RS-422) | 3 | |||||
| LIMIT SWITCH | ||||||
| None | 0 | |||||
| Mechanical | 1 | |||||
| Optical | 2 | |||||
| ENVIRONMENT | ||||||
| Atmospheric | 0 | |||||
| High Vacuum, 10-6 mbar | 6 | |||||
| Ultra High Vacuum, 10-9 mbar | 9 | |||||