产品名称： 步进电机平移台PPS-110SM
产品编号： PPS-110SM
台面尺寸： 110 × 110mm
行程： 100、200、300、500、1000mm
最大载重： 25kg
分辨率： 50nm
重复定位精度： ±100nm
真空选项：
The PPS-110 is a high-precision, long travel linear stage. It is available with piezo motor, linear motor, or ballscrew drives. Stainless steel recirculating ball bearings allow for smooth motion and high guiding accuracy for loads up to 25kg. Closed loop resolution of 2nm is achievable with a high precision digital encoder.
| Travel range [mm] | 100 | 200 | 300 | 500 | 1000 |
| Straightness/Flatness [µm] | ±3 | ±4 | ±5 | ±10 | ±15 |
| Pitch [µrad] | ±75 | ±100 | ±125 | ±200 | ±300 |
| Yaw [µrad] | ±75 | ±85 | ±100 | ±200 | ±300 |
| Motor option | 2 Phase Stepper Motor |
| Speed, max [mm/s] | 10 (Higher speed on request) |
| Encoder option | Open Loop | Digital (RS-422) |
| Resolution, typical [µm] | 0.1 | 0.05 |
| Repeatability, bi-directional [µm] | ± 2 | ± 0.1 |
| Repeatability, uni-directional [µm] | 0.2 | 0.1 |
| Accuracy [µm] | - | ±1 |
| Orientation | Fx
[N] | Fy
[N] | Fz
N] | Mx
N·m] | My
[N·m] | Mz
[N·m] | kax
[µrad/N·m] | kay
[µrad/N·m] |
| Load, max | 30 | 150 | 250 | 60 | 30 | 35 | 50 | 50 |
| Order no.: | PPS-110- | |||||
|---|---|---|---|---|---|---|
| DRIVE | ||||||
| Stepper Motor (SM-008) | 2 | |||||
| TRAVEL | ||||||
| 100 mm | 1 | |||||
| 200 mm | 2 | |||||
| 300 mm | 3 | |||||
| 500mm | 4 | |||||
| 1000mm | 5 | |||||
| ENCODER | ||||||
| None (Open Loop) | 0 | |||||
| Digital (RS-422) | 3 | |||||
| LIMIT SWITCH | ||||||
| None | 0 | |||||
| Mechanical | 1 | |||||
| Optical | 2 | |||||
| ENVIRONMENT | ||||||
| Atmospheric | 0 | |||||
| High Vacuum, 10-6 mbar | 6 | |||||
| Ultra High Vacuum, 10-9 mbar | 9 | |||||