产品名称： 压电平移台PPX-50
产品编号： PPX-50
台面尺寸： 50x50mm
行程： 28x28mmmm
最大载重： 3kg
分辨率： 1nm
重复定位精度： ±20nm
真空选项：
The PPX-50 is a low profi le, long travel, integrated XY stage with an open aperture and a height of only 17.5 mm. Cross roller bearings guarantee smooth and stable motion for loads up to 30 N. It utilizes a multi-phase piezo motor resulting in high speed (>5mm/s) and high blocking force (> 2 N). The PPX-50 is available in open loop or with a linear encoder with a closed-loop esolution of 1 nm. Versions capable of operation in vacuum (10-9 mbar) are available. The PPX-50 is compatible with the MMC-100 and MMC-110 controllers.
| Travel range [mm] | 28x28 |
| Straightness/Flatness [µm] | ±3.5 |
| Pitch [µrad] | ±200 |
| Yaw [µrad] | ±100 |
| Weight [g] | 120 |
| Motor option | Piezo Motor |
| Speed, max [mm/s] | 2 (MMC-100), 5 (MMC-110) |
| Encoder option | None(open Loop) | Analog(1 Vpp) | Digital |
| Resolution, typical [nm] | 1 | 10 | 1 |
| Repeatability, bi-directional [nm] | n/a | ±50 | ±20 |
| Repeatability, uni-directional [nm] | n/a | 50 | 20 |
| Accuracy [µm] | - | ±1 | ±1 |
| Orientation | Fx [N] | Fy [N] | Fz [N] | Mx [N] | My [N] | Mz [N] |
| Load, max | 2 | 2 | 30 | 0.6 | 0.6 | 0.6 |
| Order no.: | PPX-50- | |||||
|---|---|---|---|---|---|---|
| DRIVE | ||||||
| Piezo Motor, PM-002 | 1 | |||||
| TRAVEL | ||||||
| 28mm | 1 | |||||
| ENCODER | ||||||
| None | 0 | |||||
| Analog (1 Vpp) | 2 | |||||
| Digital (RS-422) | 3 | |||||
| LIMIT SWITCH | ||||||
| None | 0 | |||||
| ENVIORNMENT | ||||||
| Atmospheric | 0 | |||||
| High Vacuum, 10-6 mbar | 6 | |||||
| Ultra High Vacuum, 10-9 mbar | 9 | |||||
