产品名称： 压电平移台PPS-110
产品编号： PPS-110
台面尺寸： 110×110mm
行程： 100、200、300、500、1000mmmm
最大载重： 25kg
分辨率： 1nm
重复定位精度： ±20nm
真空选项：
The PPS-110 is a high-precision, long travel linear stage. It is available with piezo motor, linear motor, or ballscrew drives. Stainless steel recirculating ball bearings allow for smooth motion and high guiding accuracy for loads up to 25kg. Closed loop resolution of 2nm is achievable with a high precision digital encoder.
| Travel range [mm] | 100 | 200 | 300 | 500 | 1000 |
| Straightness/Flatness [µm] | ±3 | ±4 | ±5 | ±10 | ±15 |
| Pitch [µrad] | ±75 | ±100 | ±125 | ±200 | ±300 |
| Yaw [µrad] | ±75 | ±85 | ±100 | ±200 | ±300 |
| Motor option | Piezo Motor, PM-003 |
| Speed, max [mm/s] | 5 (MMC-110) |
| Encoder option | Open Loop | Digital (RS-422) |
| Resolution, typical [µm] | 0.001 | 0.002 |
| Repeatability, bi-directional [µm] | n/a | ±0.02 |
| Repeatability, uni-directional [µm] | n/a | 0.02 |
| Accuracy [µm] | n/a | ±1 |
| Orientation | Fx
[N] | Fy
[N] | Fz
[N] | Mx
[N·m] | My
[N·m] | Mz
[N·m] | kax
[µrad/N·m] | kay
[µrad/N·m] |
| Load, max | 5 | 150 | 250 | 60 | 30 | 35 | 50 | 50 |
| Order no.: | PPS-110PM- | |||||
|---|---|---|---|---|---|---|
| DRIVE | ||||||
| Piezo Motor PM-002 | 1 | |||||
| TRAVEL | ||||||
| 100mm | 1 | |||||
| 200mm | 2 | |||||
| 300mm | 3 | |||||
| 500mm | 4 | |||||
| 1000mm | 5 | |||||
| ENCODER | ||||||
| None (Open Loop) | 0 | |||||
| Digital (RS-422) | 3 | |||||
| LIMIT SWITCH | ||||||
| None | 0 | |||||
| Mechanical | 1 | |||||
| Optical | 2 | |||||
| ENVIRONMENT | ||||||
| Atmospheric | 0 | |||||
| High Vacuum, 10-6 mbar | 6 | |||||
| Ultra High Vacuum, 10-9 mbar | 9 | |||||