产品名称： 压电平移台PPS-28
产品编号： pps-28
台面尺寸： 28x28mm
行程： 26、51、76、102mmmm
最大载重： 5kg
分辨率： 1nm
重复定位精度： ±50nm
真空选项：
The PPS-28 is a high-precision, long travel linear piezo stage. Miniature crossed roller bearings assure high stiffness and guiding accuracy for loads up to 50 N (horizontal orientation). It utilizes our patent-pending multi-phase piezo motor resulting in high speed (> 2 mm/s) and high blocking force (> 2 N). The PPS-28 is available in open loop or with an external encoder. Closed-loop resolution of 2 nm is achievable. Versions capable of operation in vacuum (10-9 mbar) and/or cryo (4 Kelvin) are available. The PPS-28 is compatible with the MMC-100 and MMC-110 controllers.
| Travel range [mm] | 26 | 51 | 76 | 102 |
| Straightness/Flatness [µm] | ± 1.5 | ± 2.5 | ± 3 | ± 3.5 |
| Pitch [µrad] | ± 50 | ± 70 | ± 80 | ± 100 |
| Yaw [µrad] | ± 60 | ± 75 | ± 90 | ± 100 |
| Weight [g] | 63 | 125 | 165 | 206 |
| Motor option | Piezo Motor, PM-002 |
| Speed, max [mm/s] | 2 (MMC-100), 10 (MMC-110) |
| Encoder option | None (open loop) | Analog (1 Vpp) | Digital (RS-422) |
| Resolution, typical [nm] | 1 | 10 | 1 |
| Repeatability, bi-directional [nm] | n/a | ± 50 | ± 50 |
| Repeatability, uni-directional [nm] | n/a | 50 | 50 |
| Accuracy [µm] | - | ± 1 | ± 1 |
| Orientation | Fx [N] | Fy [N] | Fz [N] | Mx [N·m] | My [N·m] | Mz [N·m] |
| Load, max | 2 | 50 | 50 | 1 | 1 | 1 |
| Order no.: | PPS-28- | |||||
|---|---|---|---|---|---|---|
| Drive | ||||||
| Piezo Motor, PM-002 | 1 | |||||
| Travel | ||||||
| 26 mm | 1 | |||||
| 51 mm | 3 | |||||
| 76 mm | 4 | |||||
| 102 mm | 5 | |||||
| Encoder | ||||||
| None (open loop) | 0 | |||||
| Analog (1 Vpp) | 2 | |||||
| Digital (RS-422) | 3 | |||||
| Limit Switch | ||||||
| None | 0 | |||||
| Environment | ||||||
| Atmospheric | 0 | |||||
| High Vacuum, 10-6 mbar | 6 | |||||
| Ultra High Vacuum, 10-9 mbar | 9 | |||||
