产品名称: 压电平移台PP-12
产品编号: PP-12
台面尺寸: 12×12mm
行程: 4mmmm
最大载重: 0.25kg
分辨率: 20nm
重复定位精度: ±200nm
The PPS-20 is a high-precision, long travel linear piezo stage. Miniature crossed roller bearings assure high stiffness and guiding accuracy for loads up to 20 N (horizontal orientation). It utilizes our patent-pending multi-phase piezo motor resulting in high speed (> 2 mm/s) and high blocking force (> 2 N). The PPS-20 is available in open loop or with an external encoder. Closed-loop resolution of 2 nm is achievable. Versions capable of operation in vacuum (10-9 mbar) and/or cryo (4 Kelvin) are available. The PPS-20 is compatible with the MMC-100 and MMC-110 controllers.
| Travel range [mm] | 4 |
| Straightness/Flatness [µm] | ± 2 |
| Pitch [µrad] | ± 150 |
| Yaw [µrad] | ± 150 |
| Weight [g] | 13 |
| Motor option | Piezo Motor, PM-002 |
| Speed, max [mm/s] | 1 (MMC-100), 3 (MMC-110) |
| Encoder option | None (open loop) | External |
| Resolution, typical [nm] | 1 | 20 |
| Repeatability, bi-directional [nm] | n/a | ± 200 |
| Repeatability, uni-directional [nm] | n/a | 200 |
| Accuracy [µm] | - | ± 10 |
| Orientation | Fx [N] | Fy [N] | Fz [N] | Mx [N·m] | My [N·m] | Mz [N·m] |
| Load, max | 1 | 2 | 2.5 | 0.3 | 0.2 | 0.3 |
| Order no.: | PP-12- | |||||
|---|---|---|---|---|---|---|
| Drive | ||||||
| Piezo Motor, PM-002 | 1 | |||||
| Travel | ||||||
| 4 mm | 1 | |||||
| Encoder | ||||||
| None | 0 | |||||
| Digital | 3 | |||||
| Limit Switch | ||||||
| None | 0 | |||||
| Environment | ||||||
| Atmospheric | 0 | |||||
| High Vacuum, 10-6 mbar | 6 | |||||
| Ultra High Vacuum, 10-9 mbar | 9 | |||||