• <30-nm resolution

• Easily align modulators and isolators

• Six-axis aligner—ideal for semiconductor-wafer alignment

These multi-axis positioners increase the utility of our popular kinematic stages by motorizing each of the axes. The addition of Picomotor™ actuators to each stage allows remote high-resolution (<30-nm) adjustment of various combinations of X, Y, Z, Qx, and Qy. The four-axis and five-axis aligners are ideal for positioning modulators or isolators and for coupling light into waveguide devices. The six-axis aligner is ideal for semiconductor-wafer alignment.

Model 8071

• Motorized Four-Axis Tilt Aligner

Model 8081

• Motorized Five-Axis Tilt Aligner

Model 8081-UHV

• Ultra High Vacuum Compatible (10-9 Torr)

• Outgas less than 5 ppm of volatile mass at 85 °C over 3 hrs