Description

Design Features

600 mm, 1000 mm, 1500 mm travel sizes
685 mm square carriage
910 kg load capacity
an be vacuum 10^-6 Torr rated
Bellows covers to protect from particles, laser slag
Accuracy ±8 µm calibrated, ±50 µm uncalibrated
Air purge for positive air pressure

The ATS5000HD (Heavy Duty) linear ball-screw stage is a high-capacity stage with bellows waycovers that can be used for high-load motion testing, laser sintering, aerospace testing, and vacuum applications with up to a 910 kilogram load.

Specifications

Mechanical Specifications

ATS5000HD
Positioning	Travel		600/1000/1500 mm
	Accuracy	LT Standard	±40.0 µm
	Accuracy	HALAR⁽¹⁾	±1 µm
	Repeatability		±0.5 µm
Geometric	Straightness		±9.0 µm
	Flatness		±9.0 µm
	Pitch		±121 µrad (±25 arc sec)
	Roll		±121 µrad (±25 arc sec)
	Yaw		±121 µrad (±25 arc sec)
Dynamic	Maximum Speed⁽²⁾		200 mm/s
Dynamic	Maximum Acceleration⁽²⁾		3g
Other
	Load Capacity⁽³⁾	Axial	910 kg
	Load Capacity⁽³⁾	Vertical	300 kg
	Stage Mass		120 kg (1000 mm travel with motor)
	Material		Aluminum body/stage; hardcoated tabletop

Available with Aerotech controllers.
Speed and acceleration dependent on load.
Maximum load based on bearing capability. Maximum application load may be limited by acceleration requirements.
Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and work-point dependent. Consult factory for multi-axis or non-standard applications.

Dimensions

ATS5000HD
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Ordering Information

Please CONTACT an Aerotech Application Engineer to discuss your requirements.