Description

Design Features

0.01 arc sec resolution
0.005 arc sec in-position stability
Available with both limited and unlimited rotation
Outstanding error motion specifications
Multi-axis configurations
High dynamic performance

The ANT130R direct-drive rotary stages are designed as part of Aerotech’s nano Motion Technology product family. Our rotary stages offer unprecedented in-position stability (0.005 arc sec) and sub 0.01 arc-sec incremental motion performance, and are offered in two grades of accuracy.

Multi-Axis Capabilities

The ANT130R series is designed for compatibility and easy integration with Aerotech's ANT linear stage product offerings. Together these stages provide accuracy, stability and small-size performance capability for almost any nanomanufacturing or inspection application.

Dynamic Performance

In addition to the high precision levels, these systems offer high dynamic performance and throughput ideal for processes that require speed and precision.

Durability

The ANT130R stage series was designed to operate in a 24/7 manufacturing environment. Unlike other rotary devices, the ANT130R requires no periodic maintenance, assuring years of trouble-free operation.

Specifications

ANT130R Series Specifications

Model		ANT130- 20-R	ANT130- 180-R	ANT130- 360-R
Rotation Angle		20°	180°	±360° Continuous
Accuracy⁽¹⁾	Base	10 arc sec	10 arc sec	10 arc sec
Accuracy⁽¹⁾	PLUS	3 arc sec	3 arc sec	3 arc sec
Resolution (Minimum Incremental Motion)		0.01 arc sec	0.01 arc sec	0.01 arc sec
Bidirectional Repeatability⁽¹⁾	Base	1.5 arc sec	1.5 arc sec	1.5 arc sec
Bidirectional Repeatability⁽¹⁾	PLUS	1.5 arc sec	1.5 arc sec	1.5 arc sec
Unidirectional Repeatability		0.5 arc sec	0.5 arc sec	0.5 arc sec
Tilt Error Motion	Synchronous	N/A	N/A	10 arc sec
Tilt Error Motion	Asynchronous	N/A	N/A	3 arc sec
Axial Error Motion⁽¹⁾	Synchronous	N/A	N/A	2 µm
Axial Error Motion⁽¹⁾	Asynchronous	N/A	N/A	0.5 µm
Radial Error Motion⁽¹⁾	Synchronous	N/A	N/A	3 µm
Radial Error Motion⁽¹⁾	Asynchronous	N/A	N/A	1 µm
Maximum Speed		20 rpm	20 rpm	200 rpm
Maximum Acceleration		400 rad/s²	400 rad/s²	400 rad/s²
In-Position Stability⁽²⁾		0.005 arc sec	0.005 arc sec	0.005 arc sec
Aperture		11 mm	11 mm	11 mm
Maximum Torque (Continuous)		0.2 N-m	0.2 N-m	0.2 N-m
Load Capacity⁽³⁾	Axial	3.0 kg	3.0 kg	3.0 kg
	Radial	2.0 kg	2.0 kg	2.0 kg
	Moment	3 N-m	3 N-m	3 N-m
Rotor Inertia (Unloaded)		0.001 kg-m²	0.001 kg-m²	0.0016 kg-m²
Stage Mass		1.5 kg	1.5 kg	1.7 kg
Material		Aluminum Body/Black Hardcoat Finish
MTBF (Mean Time Between Failure)		30,000 Hours

Certified with each stage. Requires the use of an Aerotech controller.
In-Position Jitter listing is 3 sigma value.
Axis orientation for on-axis loading is listed.

Specifications are per axis, measured 25 mm above the tabletop. Consult factory for multi-axis or non-standard applications.
All error motion specifications are measured at 60 rpm.
For high speed operation customer payload must be balanced to G1.0 per ISO 1940.

Electrical Specifications

Drive System	Slotless, Brushless, Direct-Drive Rotary Motor
Feedback	Noncontact Rotary Encoder
Maximum Bus Voltage	±40 VDC
Limit Switches	5 V, Normally Closed
Home Switch	Near Center

Recommended Controller

Multi-Axis	A3200	Npaq MXR Npaq MR-MXH Ndrive ML-MXH
Multi-Axis	Ensemble	Epaq MXR Epaq MR-MXH Ensemble ML-MXH
Single Axis	Soloist	Soloist ML-MXH

Linear amplifiers are required to achieve the listed specifications. Other options are available.

Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25ºC/24 hours. If this is not possible alternate products are available. Please consult Aerotech for more information.

ANT130R Step Plot
ANT130R Series Specifications Images

Ordering Information

ANT130R Single-Axis Rotary Direct-Drive Nanopositioning Stage

Travel (Required)

Option	Description
-360	Continuous travel
-020	Limited travel, +/- 10 degrees
-180	Limited travel, +/- 90 degrees

Mouting Plate (Optional)

Option	Description
-MP	Mounting plate

Performance Grade (Required)

Option	Description
-PL1	Base performance
-PL2	High-accuracy performance, PLUS

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

Option	Description
-TAS	Integration - Test as system Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TAC	Integration - Test as components Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.