Description

Design Features

• High load-carrying capacity

• High stiffness

• Direct-drive brushless, slotless servomotor

• Large aperture

• Easily configured with AVL1000 lift-stage for multi-axis applications

Aerotech’s ARA1000 rotary actuator is well-suited for applications such as flat panel display processing that require articulation of large payloads. Multi-axis systems with high load inertia can suffer from mechanical instability that limits total machine throughput. The ARA1000 eliminates this problem through a proprietary design that significantly increases stage stiffness. The ARA1000 incorporates a standard 57.2 mm aperture which allows for easy pass-through of vacuum lines. The tabletop includes a standard mounting pattern that allows for easy chuck mounting.

Superior Design

The ARA1000 utilizes large air-bearing surfaces for high stiffness and load capacity in a low profile design.

Cable management is simple and straight-forward with integral motor power and feedback connectors. Because the ARA1000 is a self-contained unit, it can be integrated easily into multi-stage stacks. Either a service loop or an integrated Aerotech cable management system (CMS) can be provided for a highly reliable solution.

Brushless Direct-Drive

To maximize positioning performance, the ARA1000 utilizes Aerotech’s S-series brushless, slotless motor. This motor has all of the advantages of a brushless direct-drive motor — no brushes to wear, no gear trains to maintain and high acceleration and high speeds. Since it is a slotless, ironless design, there is zero cogging, meaning that there is absolutely no torque ripple. This makes the ARA1000 ideal for applications requiring outstanding contoured motion or precise incremental steps. Zero backlash makes the ARA1000 the ideal solution for applications requiring frequent directional changes.

Accurate Positioning

Performance is assured with a 150-line-per-degree encoder that results in 0.012 arc sec resolution. The motor and high-performance rotary encoder are directly coupled to a common shaft.

Flexible Configurations

Aerotech manufactures a wide range of servo amplifiers and advanced controllers to provide a complete, integrated package.

Specifications

ARA1000 Series Specifications

1. Requires Aerotech controller for calibration and parts program implementation.

2. Based on Aerotech controls using 500X multiplication and controller quadrature. Higher resolutions available.

3. Maximum speed is load dependent. Maximum application velocity may be limited by system data rate and resolution.

4. To protect an air bearing against under pressure, an in-line pressure switch tied to the motion controller is recommended.

5. Air supply must be clean, dry to 0°F dew point and filtered to 0.25 µm or better; recommend nitrogen at 99.9% purity.

6. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.

Dimensions

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Ordering Information

ARA1000 Air-Bearing Direct-Drive Rotary Stage

Limits (Required)

Metrology (Required)

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.