Description

Design Features

Nanometer performance in a large travel format (35 mm to 160 mm)
Dual-counterbalance, low-profile design
High-dynamic, noncontact direct-drive
Anti-creep crossed-roller bearings
Flexible tabletop and mounting patterns
High-resolution (2 nm), repeatability (75 nm), and accuracy (275 nm)
In-position stability of <2 nm

Introduction

Aerotech’s ANT series stages are the world’s first nanometer-level positioning systems with greater than 25 mm travel. Designed for vertical axis applications, the ANT130LZS series crossed-roller stages are the best-in-class in combining speed, resolution, accuracy, repeatability, reliability, and size, and are offered in two accuracy grades.

The ANT130LZS stages use a nearly frictionless dual-counterbalance mechanism to maintain performance levels while minimizing motor heating. The counterbalance is user adjustable from 0 to 14 kg. The dual-counterbalance design minimizes overall stage height and prevents off-axis moments that are applied by the counterbalance design that adversely affect straightness and angular errors. The result is positioning and geometric performance nearly equivalent to a non-counterbalanced ANT stage.

Noncontact Direct-Drive

Only noncontact direct-drive technology offers the robust, accurate, and high-speed positioning necessary for mass production of precision devices. ANT130LZS stages utilize advanced direct-drive technology pioneered by Aerotech to achieve the highest level of performance for high-precision positioning, disk-drive fabrication, fiber alignment, optical delay element actuation, sensor testing, and scanning processes that demand smooth and precise motion.

Flexible System Design

The ANT130LZS family has universal mounting and tabletop patterns that allow for easy system integration. Two, three, or more axes can be easily combined for flexible system designs and multi-axis configurations.

System Characteristics

Outstanding accuracy, position repeatability, and in-position stability require small minimum incremental motion (mechanical resolution). The ANT130LZS stage’s industry-leading 2 nm minimum incremental step size enables this high level of performance. Excellent in-position stability is assisted by high-quality, anti-creep, crossed-roller bearings. The stage offers virtually maintenance-free operation over the life of the product. Aerotech’s direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion.

Specifications

ANT130LZS Series Specifications

		ANT130LZS-035	ANT130LZS-060
Travel		35 mm	60 mm
Accuracy⁽¹⁾	BASE	±2.5 µm	±2.5 µm
Accuracy⁽¹⁾	PLUS	±275 nm	±275 nm
Resolution (Minimum Incremental Motion)		2 nm
Repeatability (Bidirectional)⁽¹⁾	BASE	±100 nm	±100 nm
Repeatability (Bidirectional)⁽¹⁾	PLUS	±75 nm	±75 nm
Repeatability (Unidirectional)		±35 nm
Straightness⁽¹⁾		±1.5 µm
Flatness⁽¹⁾		±1.5 µm
Pitch		10 arc sec
Roll		10 arc sec
Yaw		5 arc sec
Maximum Speed⁽²⁾		200 mm/s
Maximum Acceleration⁽²⁾		1 g (No Load)
In-Position Stability⁽³⁾		<2 nm
Maximum Force (Continuous)		23 N
Load Capacity⁽⁴⁾	Vertical	14 kg
Moving Mass		1.3 kg	1.5 kg
Stage Mass		2.5 kg	2.9 kg
Material		Aluminum Body/Black Hardcoat Finish
MTBF (Mean Time Between Failure)		30,000 Hours

Certified with each stage.
Requires the selection of an appropriate amplifier with sufficient voltage and current.
In-position jitter listing is 3 sigma value.
Axis orientation for on-axis loading is listed.
Air supply must be clean, dry to 0°F dew point and filtered to 0.25 µm or better; recommend nitrogen at 99.9% purity. Supply pressure is determined by the amount of payload carried by the stage.
Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of combined multi-axis systems is payload and work-point dependent. Consult factory for multi-axis or non-standard applications.
-PLUS requires the use of an Aerotech controller

		ANT130LZS-110	ANT130LZS-160
Travel		110 mm	160 mm
Accuracy⁽¹⁾	BASE	±3 µm	±4 µm
Accuracy⁽¹⁾	PLUS	±325 nm	±325 nm
Resolution (Minimum Incremental Motion)		2 nm
Repeatability (Bidirectional)⁽¹⁾	BASE	±100 nm	±100 nm
Repeatability (Bidirectional)⁽¹⁾	PLUS	±75 nm	±75 nm
Repeatability (Unidirectional)		±35 nm
Straightness⁽¹⁾		±1.5 µm	±2 µm
Flatness⁽¹⁾		±1.5 µm	±2 µm
Pitch		10 arc sec
Roll		10 arc sec
Yaw		5 arc sec
Maximum Speed⁽²⁾		200 mm/s
Maximum Acceleration⁽²⁾		1 g (No Load)
In-Position Stability⁽³⁾		<2 nm
Maximum Force (Continuous)		23 N
Load Capacity⁽⁴⁾	Vertical	14 kg
Moving Mass		2.1 kg	2.5 kg
Stage Mass		3.9 kg	4.6 kg
Material		Aluminum Body/Black Hardcoat Finish
MTBF (Mean Time Between Failure)		30,000 Hours

Certified with each stage
Requires the selection of an appropriate amplifier with sufficient voltage and current.
In-position jitter listing is 3 sigma value.
Axis orientation for on-axis loading is listed.
Air supply must be clean, dry to 0°F dew point and filtered to 0.25 µm or better; recommend nitrogen at 99.9% purity. Supply pressure is determined by the amount of payload carried by the stage.
Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of combined multi-axis systems is payload and work-point dependent. Consult factory for multi-axis or non-standard applications.
-PLUS requires the use of an Aerotech controller.

Electrical Specifications

Drive System	Brushless Linear Servomotor
Feedback	Noncontact Linear Encoder
Maximum Bus Voltage	320 VDC (-4DU-25DU), 80 VDC (-25DU)
Limit Switches	5 V, Normally Closed
Home Switch	Near Center

Recommended Controller

Multi-Axis	A3200	Npaq MXR Npaq MR-MXH Ndrive ML-MXH
Multi-Axis	Ensemble	Epaq MXH Epaq MR-MXH Ensemble ML-MXH
Single Axis	Soloist	Soloist ML-MXH

Plots 1

Ordering Information

ANT130LZS Single-Axis Z Low-Profile Direct-Drive Nanopositioning Stage

Travel (Required)

Option	Description
-035	35 mm travel
-060	60 mm travel
-110	110 mm travel
-160	160 mm travel

Connectors (Required)

Option	Description
-CN1	Single 25-pin D connector, 25DU
-CN2	Two connectors, 4-pin HPD and 25-pin D, 4DU-25DU

Note: -CN1 option not valid for systems using bus voltages greater than 80 V.

Mounting Plate (Optional)

Option	Description
-MP	Mounting plate

Performance Grade (Required)

Option	Description
-PL1	Base performance
-PL2	High-accuracy performance, PLUS

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.
-TAS	Integration - Test as system Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TAC	Integration - Test as components Testing and integration of individual items as discrete components. This is typically used for spare parts, replacement parts, or items that will not be used or shipped together (ex: stage only). These components may or may not be part of a larger system