Description

Design Features

High-load lift stage with aperture
Submicron closed-loop positioning
Excellent pitch and yaw characteristics over full travel
5 mm or 10 mm travel; custom designs for alternate travels available
Optional cleanroom and ESD protection
Precision-ground ball screw for high performance

Aerotech’s AVS1000 series stages offer the ideal solution for applications that require moving large or heavy loads over very small incremental movements in elevation above a horizontal plane. Low profiles and precise motion capability make these stages ideal for use in semiconductor manufacturing and inspection, automated tool alignment, machine vision inspection systems and laser machining applications.

Quality Design Provides Superior Performance

The AVS1000 series provides precise elevation of a load in a vertical plane using a moving wedge design. The precision machined wedge block converts horizontal movement from a precision-ground ball screw to vertical elevation of the AVS1000 series tabletop.

Sealed linear motion guide bearings with integral wipers are incorporated to provide excellent payload capability, long life and smooth, precision motion. Stable and parallel vertical motion with no rocking or horizontal deviation of the platform is ensured.

Careful design of the wedge angle and bearing system allows the AVS1000 series to achieve submicron resolution and still maintain a compact profile. The optional factory calibration option is available to further increase standard accuracy and repeatability.

A Better Approach to Vertical Motion

The vertical lift approach offers an alternative to traditional Z-plane oriented stages. Not only do the AVS1000 series stages offer a lower profile, but the load can also be accessed easily from any side. And by centering the payload over the bearings, there are no cantilevering effects.

Motor and Drives

The AVS1000 series includes Aerotech's high performance NEMA 34 frame-size BMS series brushless, slotless servomotor. The slotless motor has zero cogging and therefore is optimized for applications requiring very smooth motion.

Aerotech manufactures a wide range of matching drives and controls to provide a fully integrated and optimized motion solution.

Specifications

Mechanical Specifications

Model		AVS1000-05	AVS1000-10
Travel		5 mm	10 mm
Accuracy⁽¹⁾	Standard	±2.0 µm	±4.0 µm
Accuracy⁽¹⁾	Calibrated	±1.0 µm	±1.0 µm
Resolution		5 nm
Bidirectional Repeatability⁽¹⁾		±0.5 µm
Straightness⁽²⁾		±0.5 µm	±1.0 µm
Pitch⁽²⁾		±5 arc sec	±7.5 arc sec
Roll⁽²⁾		±5 arc sec	±7.5 arc sec
Yaw⁽²⁾		±5 arc sec	±7.5 arc sec
Maximum Speed		20 mm/s
Maximum Acceleration		0.05 g
Load Capacity⁽³⁾	Vertical	135 kg
Material		Aluminum
MTBF (Mean Time Between Failure)		15,000 Hours

Certified with each stage.
Specifications are for no-load condition. Pitch, roll and straightness may be affected by amount and centering of the load.
Load must be centered within the stage aperture.
Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.

Electrical Specifications

Drive System	Brushless Rotary Servomotor
Feedback	Noncontact Linear Encoder
Maximum Bus Voltage	up to 320 VDC
Limit Switches	5 V, Normally Closed

Recommended Controller

Multi-Axis	A3200	Ndrive MP/Ndrive CP/Ndrive HLe/Npaq MXR
Multi-Axis	Ensemble	Ensemble MP/Ensemble CP/Ensemble HLe/Epaq
Single Axis	Soloist	Soloist MP/Soloist CP/Soloist HLe

Linear amplifiers are required to achieve the listed specifications. Other options are available.

Ordering Information

AVS1000 Mechanical-Bearing Ball-Screw Lift Stage

Travel (Required)

Option	Description
-05	5 mm travel

Note: Custom travels available; consult Aerotech for more information.

Motor (Optional)

Option	Description
-M1	BMS280 brushless servomotor and 1000-line TTL encoder
-M2	BMS280 brushless servomotor and 1000-line TTL encoder with brake
-M3	BMS280 brushless servomotor and 1000-line 1 Vpp encoder
-M4	BMS280 brushless servomotor and 1000-line 1 Vpp encoder with brake

Limits (Required)

Option	Description
-LI1	Normally-closed limit switches, 9-pin D connector
-LI2	Normally-closed limit switches, flying leads
-LI3	Normally-open limit switches, 9-pin D connector
-LI4	Normally-open limit switches, flying leads

Metrology (Required)

Option	Description
-PL1	Metrology, uncalibrated with performance plots
-PL2	Metrology, calibrated (HALAR) with performance plots

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

Option	Description
-TAS	Integration - Test as system Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TAC	Integration - Test as components Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.