Description

Design Features

Aerotech’s AVS100/AVSI100 series stages offer a solution for applications that require very small incremental movements in elevation above a horizontal plane. Low profiles and precise motion capability make these stages ideal for use in semiconductor wafer inspection and testing, fiberoptics assembly and inspection, automated tool alignment, machine vision inspection systems, and laser machining applications.

The AVSI100 series stages provide identical performance to the AVS100 stages, but in an even smaller footprint. The AVSI100 integrates the motor directly with the drive screw with no motor coupling. This makes the stage significantly shorter in length.

Quality Design Provides Superior Performance

The AVS100/AVSI100 series provides precise elevation of a load in a vertical plane. Rotational movement of a precision-ground ballscrew is converted into vertical elevation of the AVS100/AVSI100 series tabletop.

Sealed linear motion guide bearings with integral wipers are incorporated to provide excellent payload capability, long life, and smooth, precision motion. Stable and parallel vertical motion with no rocking or horizontal deviation of the platform is ensured.

Careful mechanical design allows the AVS100/AVSI100 series to achieve submicron resolution and still maintain a compact profile. The optional HALAR factory calibration option is available to further increase standard accuracy and repeatability.

A Better Approach to Vertical Motion

The vertical lift approach offers an alternative to traditional Z-plane oriented stages. Not only do the AVS100/AVSI100 series stages offer a lower profile, but the load can also be accessed easily from any side. And by centering the payload over the bearings, there are no cantilevering effects. The AVS100/AVSI100 series stages provide a space-saving alternative to traditional XYZ systems and are equally suited to laboratory and industrial applications. Optional stage finishes are available for various environments, including vacuum preparation.

Additional Standard Features

All AVS100/AVSI100 series stages are equipped standard with integral limit switches and mechanical hard stops. The stage tabletop is treated with a Teflon®-impregnated hardcoat (Rockwell 62 hardness) that is scratch-resistant and provides outstanding protection in the harshest environments. The stage itself has a black anodize finish.

Specifications

AVS/AVSI100 Specifications

ModelAVS100-06 / AVSI100-06AVS100-13 / AVSI100-13AVS100-25 / AVSI100-25
Travel6 mm13 mm25 mm
Drive SystemPrecision Ball Screw/Brushless Servomotor
Bus VoltageUp to 160 VDC
Continuous CurrentApk2.3 A
Arms1.6 A
Resolutionwith 1000-line TTL encoder0.53 µm @ 4000 steps/rev motor resolution
with 1000-line 1 Vpp encoder5.3 nm - 0.106 µm
with 2500-line TTL encoder0.2 µm @ 10,000 steps/rev motor resolution
Maximum Travel Speed50 mm/s
Effective Lead2.12 mm/rev
Maximum Load(1)25.0 kg
AccuracyUncalibrated±1.5 µm±3.0 µm±5.0 µm
Calibrated(2)±1.0 µm
Bidirectional RepeatabilityUncalibrated±1.0 µm
Calibrated(2)±0.75 µm
Straightness and Flatness 
(Maximum Deviation)		±1.5 µm±3.0 µm±5.0 µm
Pitch and Roll±5 arc sec±7.5 arc sec±10 arc sec
Nominal Stage Weight (With Motor)4.1 kg6.1 kg10.5 kg
ConstructionAluminum/Black Anodize/Hardcoat Table

  1. Higher load possible with larger motor on the AVS series stage.

  2. Requires Aerotech controller.

  3. Specifications are for single-axis systems measured 50 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.

  4. For inverted operation, consult factory.

Dimensions

Ordering Information

AVS100 Mechanical-Bearing Screw-Driven Lift Stage

Travel (Required)

OptionDescription
-066 mm Travel
-1313 mm Travel
-2525 mm Travel

Motor (Optional)

OptionDescription
-M1BMS60 Servo Motor with 2500-Line TTL Encoder
-M2BMS60 Servo Motor with 2500-Line TTL Encoder and Holding Brake
-M3BMS60 Servo Motor with 1000-Line 1 Vpp Encoder
-M4BMS60 Servo Motor with 1000-Line 1 Vpp Encoder and Holding Brake
-M5BM75 Servo Motor with 2500-Line TTL Encoder
-M6BM75 Servo Motor with 2500-Line TTL Encoder and Holding Brake
-M7BM75 Servo Motor with 1000-Line 1 Vpp Encoder
-M8BM75 Servo Motor with 1000-Line 1 Vpp Encoder and Holding Brake
-M9SM60 High-Voltage Stepper Motor

Foldback (Optional)

OptionDescription
-FB1Motor Foldback Kit for .250 Inch Diameter Shaft
-FB2Motor Foldback Kit with Brake for .250 Inch Diameter Shaft

Motor Orientation (Optional)

OptionDescription
-2Bottom Cable Exit
-3Left-Side Cable Exit (Standard)
-4Top Cable Exit
-5Right-Side Cable Exit
-8Right-Side Foldback
-12Left-Side Foldback

Limits (Required)

OptionDescription
-LI1Normally-Closed Limit Switches, 9-Pin D Connector
-LI2Normally-Closed Limit Switches, Flying Leads
-LI3Normally-Open Limit Switches, 9-Pin D Connector
-LI4Normally-Open Limit Switches, Flying Leads

Coupling (Optional)

OptionDescription
-CP1Coupling for 0.250 Inch Diameter Shaft
-CP2Coupling for 0.375 Inch Diameter Shaft

Metrology (Required)

OptionDescription
-PL1Metrology, Uncalibrated with Performance Plots
-PL2Metrology, Calibrated (HALAR) with Performance Plots

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

OptionDescription
-TASIntegration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TACIntegration - Test as components
Testing and integration of individual items as discrete components. This is typically used for spare parts, replacement parts, or items that will not be used or shipped together (ex: stage only). These components may or may not be part of a larger system.

AVSI100 Mechanical-Bearing Integrated Motor Screw-Driven Lift Stage

Travel (Required)

OptionDescription
-066 mm Travel
-1313 mm Travel
-2525 mm Travel

Motor (Optional)

OptionDescription
-M1BMS60 Servo Motor with 2500-Line TTL Encoder
-M2BMS60 Servo Motor with 2500-Line TTL Encoder and Holding Brake
-M3BMS60 Servo Motor with 1000-Line 1 Vpp Encoder
-M4BMS60 Servo Motor with 1000-Line 1 Vpp Encoder and Holding Brake

Motor Orientation (Optional)

OptionDescription
-3Left-Side Cable Exit (Standard)
-5Right-Side Cable Exit

Limits (Required)

OptionDescription
-LI1Normally-Closed Limit Switches
-LI3Normally-Open Limit Switches

Metrology (Required)

OptionDescription
-PL1Metrology, Uncalibrated with Performance Plots
-PL2Metrology, Calibrated (HALAR) with Performance Plots

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

OptionDescription
-TASIntegration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TACIntegration - Test as components
Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.