Compact, high-performance elevation stage
Precision-ground ball screw or lead screw
DC or stepper motor options
High-vacuum capable
Precision crossed-roller bearings
Multi-axis configurations available with MPS linear and rotary stages
With Aerotech controllers. Payload specifications are for a single-axis system. Specifications for a single-axis system measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard application requirements. 1. With Aerotech controllers. *Note: -LS Leadscrew option is valid only on MPS50SV-5. Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.Specifications
Mechanical Specifications
Model MPS50SV-5 MPS75SV-5 Travel 5 mm 5 mm Accuracy 1.0 mm/rev Ball Screw Standard ±2.5 µm ±2.0 µm Calibrated(1) ±1.0 µm ±1.0 µm 0.5 mm/rev Lead Screw Standard ±3.0 µm N/A Calibrated(1) ±1.25 µm N/A Resolution (Minimum Incremental Motion) 0.05 µm 0.05 µm Repeatability (Bidirectional)(1) 1.0 mm/rev Ball Screw ±0.75 µm ±0.75 µm 0.5 mm/rev Lead Screw ±1.0 µm N/A Straightness ±3.0 µm ±3.0 µm Wedge Ratio 6.82:1 8.34:1 Maximum Speed 1.0 mm/rev Ball Screw DC Motor 0.8 mm/s 5.5 mm/s SM Motor 0.15 mm/s 3.0 mm/s 0.5 mm/rev Lead Screw DC Motor 0.4 mm/s N/A SM Motor 0.1 mm/s N/A Load Capacity(2) 6 kg 12 kg Stage Mass 1.4 kg 2.8 kg Material Stainless-Steel Carriage; Anodized Aluminum Body Electrical Specifications
Model MPS50SV DC Servomotor (-M1) MPS50SV Stepper Motor (-M2) MPS75SV Servomotor (-M1) MPS75SV Stepper Motor (-M2) Drive System DC Brush Servomotor with 14:1 Gearbox 24 VDC Bipolar Stepper Motor with 43:1 Gearbox DC Brush Servomotor 24 VDC Bipolar Stepper Motor Feedback 512 lines/rev Rotary Encoder N/A 10,000 lines/rev Rotary Encoder N/A Electronic Resolution 1.0 mm/rev Ball Screw 0.0051 µm 0.0071 µm @ 480 steps/rev Motor Resolution 0.0028 µm 0.0028 µm @ 40,000 steps/rev Motor Resolution 0.5 mm/rev Lead Screw 0.0026 µm 0.0035 µm @ 480 steps/rev Motor Resolution N/A N/A Maximum Bus Voltage 48 VDC 48 VDC1 48 VDC 48 VDC1 Limit Switches 5 V, Normally Closed Recommended Controller
Model DC Motor and SM Motor Multi-Axis A3200 Npaq/Npaq MR/Ndrive MP Ensemble Ensemble LAB/Epaq/Epaq MR/Ensemble MP Single Axis Soloist Soloist MP Dimensions
Ordering Information
MPS-SV Series Miniature Mechanical-Bearing Screw-Driven Lift Stage
Option Description MPS50SV-5 MPS50SV-5 miniature mechanical-bearing screw-driven lift stage, 5 mm travel MPS75SV-5 MPS75SV-5 miniature mechanical-bearing screw-driven lift stage, 5 mm travel Drive Screw (Required - MPS50SV-5 ONLY)
Option Description -BS Precision-ground ballscrew, 1 mm/rev -LS Precision-ground leadscrew, 0.5 mm/rev Vacuum Preparation (Optional)
Option Description -HV High vacuum preparation to 10e-6 torr Motor (Required)
Option Description -M1 DC servomotor -M2 Stepper motor Mounting Plate (Optional)
Option Description -MP Optical table mounting plate Metrology (Required)
Option Description -PL0 No metrology performance plots -PL1 Metrology, uncalibrated with performance plots -PL2 Metrology, calibrated (HALAR) with performance plots Integration (Required)
Option Description -TAS Integration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.-TAC Integration - Test as components
Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.