Description

Design Features

Large, clear aperture
Travel range from 100 mm x 100 mm to 400 mm x 400 mm
High-performance linear motion guides
15 arc sec orthogonality
Noncontact linear encoder for high accuracy

The demand for a high accuracy, robust, open-frame stage is met with the ATS3600. This dual-axis, large aperture, open-frame stage addresses the unique needs of scanning microscopy, wafer and printed circuit board inspection and automated assembly.

Design and Construction

Unlike other designs that are assembled from several discrete pieces, the ATS3600 is a three-piece design. This allows critical components such as orthogonality, straightness and flatness to be controlled during the initial machining, resulting in a stage with exceptional geometrical tolerances and inherent orthogonality.

The ATS3600 utilizes high-precision linear motion guide (LMG) bearings, with a total of four trucks per axis. These make the ATS3600 ideal for fast, repetitive operations. The LMG bearings also exhibit exceptional stiffness, high load capacity and extremely low friction.

The high stiffness inherent in this stage allows it to be side-driven, yet still retain excellent performance characteristics. The ATS3600 represents a major upgrade in performance over typical side-drive stages.

Motors and Drives

The ATS3600 includes two high-performance NEMA 23 BMS series brushless, slotless motors, and a SM60 stepper motor. This motor has all of the advantages of a brushless motor – high acceleration, no brushes to wear and lower heating – yet has zero cogging for the ultimate in smooth motion.

Optional Linear Encoder Feedback

A high-resolution, noncontact linear encoder is available as an option. This noncontact encoder offers exceptional repeatability and stability over a range of operating conditions. Both digital and analog output versions are available. The digital version has a resolution of 0.1µm, while the analog version, can be coupled to achieve µm-level resolutions.

Alternate Configurations

All stage travels offer both single- and dual-axis designs, as well as the option for a solid tabletop.

Specifications

ATS3600 Specifications

Model			ATS3600-100XY	ATS3600-200XY	ATS3600-300XY	ATS3600-400XY
Travel			100 mm	200 mm	300 mm	400 mm
Bus Voltage			Up to 160 VDC
Maximum Travel Speed⁽¹⁾			200 mm/s
Maximum Load⁽²⁾			90.0 kg
Accuracy	High-Precision Ball Screw Only		±2.0 µm/25 mm
	Direct Linear Feedback	Calibrated⁽³⁾	±2.0 µm
	Direct Linear Feedback	Standard	±4.0 µm	±8.0 µm	±12.0 µm	±16.0 µm
Repeatability (Bidirectional)	High-Precision Ball Screw Only		±2.0 µm
Repeatability (Bidirectional)	Direct Linear Feedback		±1.0 µm
Straightness and Flatness	Differential		1.0 µm/25mm
Straightness and Flatness	Maximum Deviation		±2.0 µm	±4.0 µm	±6.0 µm	±8.0 µm
Pitch and Yaw			10 arc sec	15 arc sec	18 arc sec	20 arc sec
Nominal Stage Weight	Less Motor		22.8 kg	34.2 kg	44.4 kg	60.3 kg
Nominal Stage Weight	With Motor		26.4 kg	37.8 kg	48.0 kg	63.9 kg
Construction			Aluminum Body; Black Anodize Finish

Excessive duty cycle may impact stage accuracy.
Payload specifications are based on ball screw and bearing life of 2500 km (100 million inches) of travel.
Available with Aerotech controllers.
Specifications are for single-axis systems, measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.

Ordering Information

ATS3600 Series Mechanical-Bearing Screw-Driven Linear Stage with Aperture

Option	Description
ATS3600-100XY	ATS3600-100XY mechanical-bearing screw-driven linear stage with aperture, 100 x 100 mm travel
ATS3600-200XY	ATS3600-200XY mechanical-bearing screw-driven linear stage with aperture, 200 x 200 mm travel
ATS3600-300XY	ATS3600-300XY mechanical-bearing screw-driven linear stage with aperture, 300 x 300 mm travel
ATS3600-400XY	ATS3600-400XY mechanical-bearing screw-driven linear stage with aperture, 400 x 400 mm travel

Motor (Optional)

Option	Description
-M1	BMS60 brushless servomotor with 2500-line TTL encoder
-M2	BMS60 brushless servomotor with 1000-line 1 Vpp encoder
-M3	SM60 stepper motor

Limits (Required)

Option	Description
-LI1	Normally-closed limit switches, 9-pin D connector
-LI2	Normally-closed limit switches, flying leads
-LI3	Normally-open limit switches, 9-pin D connector
-LI4	Normally-open limit switches, flying leads

Direct Linear Feedback (Optional)

Option	Description
-E1	Incremental linear encoder, 1 Vpp
-E2	Incremental linear encoder, 0.1 μm digital TTL output

Coupling (Optional)

Option	Description
-CP1	Coupling for 0.250 inch diameter shaft
-CP2	Coupling for 0.375 inch diameter shaft

Metrology (Required)

Option	Description
-PL1	Metrology, uncalibrated with performance plots
-PL2	Metrology, calibrated (HALAR) with performance plots

Integration

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

Option	Description
-TAS	Integration - Test as system Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TAC	Integration - Test as components Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.