Description

Design Features

Integrated, low-profile, XY, linear-motor stage with clear aperture
Excellent geometric performance (straightness to ±0.5 µm, flatness to ±1.25 µm)
Optimized for high-dynamic applications
Speeds to 2 m/s and accelerations to 2g
Integrated cable management
Large selection - nine models in travel and accuracy

Aerotech’s Planar_DLA-series stages offer a clear aperture, high dynamics, and exceptional geometric performance in a compact, low-profile package. These stages are essential for applications ranging from two-sided LED wafer processing where high-dynamics and micrometer-level straightness are required, to quasi-static optical metrology where high-accuracy and precise geometric performance are necessary. Regardless of the application, the Planar_DLA is designed to meet a variety of application needs with an array of configurable options.

Ultra-Precise Stage Design

The Planar_DLA XY design provides for unparalleled planar geometric performance in applications where straightness and flatness of motion are critical. High-precision roller bearings, precision-machined surfaces, and noncontact direct-drive linear motors driving through the axes’ center-of-stiffness result in a positioning stage with exceptional geometric tolerances (straightness to ±0.5 µm and flatness to ±1.25 µm).

The Planar_DLA structural elements are optimized for high dynamics and high stiffness for the most demanding dynamic applications. With this optimized design, the Planar_DLA achieves high servo bandwidths while at the same time maximizing the clear aperture available and keeping the overall height to a minimum. Capable of achieving 2 m/s velocities and 2 g accelerations, the Planar_DLAenables high-throughput, high-accuracy processing resulting in superior process yield, and a low total cost of ownership.

Noncontact Direct-Drive Technology

Only noncontact, direct-drive technology offers high speed and accurate positioning coupled with maintenance-free operation and long service life. At the heart of the Planar_DLA is Aerotech’s proprietary direct-drive technology. This drive technology allows for unmatched performance compared to other competitive screw-based and linear motor designs.

All Planar_DLA stages are available with one or two motors per axis allowing optimization of each individual axis for the specific application and process. With two motors, the resulting drive force acts through the centers of friction and stiffness resulting in superior geometric performance and accuracy, while one motor per axis provides for a more economical choice if high-throughput and the strictest positioning performance is not required.

Variety of Cable Management Options

The standard cable management system on the Planar_DLA is integrated into the stage and optimized for long life and performance. Several standard options are available for additional servo axes, air/vacuum lines for vacuum chucks, or other process pneumatics.

Extreme Positioning Performance

The Planar_DLA is available in three positioning performance options. Relying on decades of experience in system-level design including not only positioning mechanics, but also software and electronics, Aerotech has developed advanced technologies to push the envelope of precision. High-performance -PLUS and -ULTRA options are available to enable accuracies and straightness values down to ±500 nm and orthogonality down to 5 µrad.

Specifications

Mechanical Specifications

			Planar_DLA-150XY			Planar_DLA-250XY
			-PL1	-PL3^(1,2)	-PL4^(1,2)	-PL1	-PL3^(1,2)	-PL4^(1,2)
Travel			150 mm x 150 mm			250 mm x 250 mm
Accuracy⁽²⁾		Single Motor	±5.0 µm	±0.7 µm	±0.7 µm	±6.0 µm	±0.8 µm	±0.8 µm
Accuracy⁽²⁾		Dual Motors	±4.0 µm	±0.4 µm	±0.4 µm	±5.0 µm	±0.5 µm	±0.5 µm
Bidirectional Repeatability		Single Motor	±0.5 µm			±0.5 µm
Bidirectional Repeatability		Dual Motors	±0.25 µm			±0.25 µm
Resolution (Minimum Incremental Motion)⁽³⁾			3.0 nm			3.0 nm
Straightness	Upper Axis	-M1 or -M3 Motor	±1.5 µm	±1.5 µm	±0.7 µm	±2.0 µm	±2.0 µm	±0.7 µm
	Upper Axis	-M2 or -M4 Motor	±1.0 µm	±1.0 µm	±0.5 µm	±1.5 µm	±1.5 µm	±0.5 µm
	Lower Axis	-M1 or -M2 Motor	±2.5 µm	±2.5 µm	±0.7 µm	±3.25 µm	±3.25 µm	±0.7 µm
	Lower Axis	-M3 or -M4 Motor	±2.0 µm	±2.0 µm	±0.5 µm	±2.75 µm	±2.75 µm	±0.5 µm
Flatness			±1.25 µm			±1.75 µm
Pitch			39 µrad (8 arc sec)			58 µrad (12 arc sec)
Roll			39 µrad (8 arc sec)			58 µrad (12 arc sec)
Yaw		Single Motor	39 µrad (8 arc sec)			49 µrad (10 arc sec)
Yaw		Dual Motors	29 µrad (6 arc sec)			39 µrad (8 arc sec)
Orthogonality			97 µrad (20 arc sec)	24 µrad (5 arc sec)	5 µrad (1 arc sec)	97 µrad (20 arc sec)	24 µrad (5 arc sec)	5 µrad (1 arc sec)
Max Speed⁽⁴⁾			1.5 m/s			2.0 m/s
Max Acceleration (No Load, Upper-Axis)⁽⁴⁾			1.0 g (-M1 or -M3 Motor) 2.0 g (-M2 or -M4 Motor)			1.0 g (-M1 or -M3 Motor) 2.0 g (-M2 or -M4 Motor)
Maximum Force - Continuous, 1.4 bar (20 psi) Air Cooling		Upper Axis	47 N (-M1 or -M3 Motor) 94 N (-M2 or -M4 Motor)			120 N (-M1 or -M3 Motor) 240 N (-M2 or -M4 Motor)
Maximum Force - Continuous, 1.4 bar (20 psi) Air Cooling		Lower Axis	120 N (-M1 or -M2 Motor) 240 N (-M3 or -M4 Motor)			250 N (-M1 or -M2 Motor) 500 N (-M3 or -M4 Motor)
Load Capacity⁽⁵⁾		Horizontal	20 kg			30 kg
Moving Mass		Upper Axis	4.3 kg (-M1 or -M3 Motor) 4.5 kg (-M2 or -M4 Motor)			6.9 kg (-M1 or -M3 Motor) 7.2 kg (-M2 or -M4 Motor)
Moving Mass		Lower Axis	18.1 kg (-M1 Motor) 20.0 kg (-M2 Motor) 18.5 kg (-M3 Motor) 20.6 kg (-M4 Motor)			33.7 kg (-M1 Motor) 38.1 kg (-M2 Motor) 34.6 kg (-M3 Motor) 39.0 kg (-M4 Motor)
Stage Mass⁽⁶⁾			30 kg-36 kg			60 kg-67 kg
Material			Black Anodized Aluminum
MTBF (Mean Time Between Failure)			30,000 Hours

The -PL3 and -PL4 options require the use of an Aerotech controller.
Specifications for -PL1 and -PL3 options are per axis measured 25 mm above the tabletop. Specifications for -PL4 are XY measured 25 mm above the tabletop.
Specified for dual motors. Contact factory for single motor arrangement.
Requires the selection of an appropriate amplifier with sufficient voltage and current.
On-axis loading for orientation listed.
Stage mass is a function of motor configuration.

			Planar_DLA-330XY
			-PL1	-PL3^(1,2)	-PL4^(1,2)
Travel			330 mm x 330 mm
Accuracy⁽²⁾		Single Motor	±8 µm	±1 µm	±1 µm
Accuracy⁽²⁾		Dual Motors	±6 µm	±0.7 µm	±0.7 µm
Bidirectional Repeatability		Single Motor	±0.5 µm
Bidirectional Repeatability		Dual Motors	±0.25 µm
Resolution (Minimum Incremental Motion)⁽³⁾			3 nm
Straightness	Upper Axis	-M1 or -M3 Motor	±2.5 µm	±2.5 µm	±0.8 µm
	Upper Axis	-M2 or -M4 Motor	±2.0 µm	±2.0 µm	±0.6 µm
	Lower Axis	-M1 or -M2 Motor	±4.0 µm	±4.0 µm	±0.8 µm
	Lower Axis	-M3 or -M4 Motor	±3.5 µm	±3.5 µm	±0.6 µm
Flatness			±2.5 µm
Pitch			68 µrad (14 arc sec)
Roll			68 µrad (14 arc sec)
Yaw		Single Motor	58 µrad (12 arc sec)
Yaw		Dual Motors	49 µrad (10 arc sec)
Orthogonality			97 µrad (20 arc sec)	24 µrad (5 arc sec)	5 µrad (1 arc sec)
Max Speed⁽⁴⁾			2.0 m/s
Max Acceleration (No Load, Upper-Axis)⁽⁴⁾			1.0 g (-M1 or -M3 Motor) 2.0 g (-M2 or -M4 Motor)
Maximum Force - Continuous, 1.4 bar (20 psi) Air Cooling		Upper Axis	173 N (-M1 or -M3 Motor) 346 N (-M2 or -M4 Motor)
Maximum Force - Continuous, 1.4 bar (20 psi) Air Cooling		Lower Axis	302 N (-M1 or -M2 Motor) 604 N (-M3 or -M4 Motor)
Load Capacity⁽⁵⁾		Horizontal	50 kg
Moving Mass		Upper Axis	13.4 kg (-M1 or -M3 Motor) 14.0 kg (-M2 or -M4 Motor)
Moving Mass		Lower Axis	57.0 kg (-M1 Motor) 65.3 kg (-M2 Motor) 58.1 kg (-M3 Motor) 66.5 kg (-M4 Motor)
Stage Mass⁽⁶⁾			93 kg - 109 kg
Material			Black Anodized Aluminum
MTBF (Mean Time Between Failure)			30,000 Hours

The -PL3 and -PL4 options require the use of an Aerotech controller.
Specifications for -PL1 and -PL3 options are per axis measured 25 mm above the tabletop. Specifications for -PL4 are XY measured 25 mm above the tabletop.
Specified for dual motors. Contact factory for single motor arrangement.
Requires the selection of an appropriate amplifier with sufficient voltage and current.
On-axis loading for orientation listed.
Stage mass is a function of motor configuration.

Electrical Specifications

	Planar_DLA
Drive System	Brushless Linear Servomotor
Feedback	Noncontact Linear Encoder
Maximum Bus Voltage	340 VDC
Limit Switches	5 V, Normally-Closed
Home Switch	Near Center of XY Travel

Recommended Controller

	PlanarDLA
Multi-Axis	A3200	Ndrive CP Ndrive HLe/Ndrive HPe Npaq
Multi-Axis	Ensemble	Ensemble CP Ensemble HLe/Ensemble HPe

PlanarDLA Plots

Ordering Information

Planar_DLA Two Axis Mechanical-Bearing Direct-Drive Stage with Aperture

Option	Description
Planar_DLA-150XY	Linear motor XY table w/clear aperture; 150 mm x 150 mm travel
Planar_DLA-250XY	Linear motor XY table w/clear aperture; 250 mm x 250 mm travel
Planar_DLA-330XY	Linear motor XY table w/clear aperture; 330 mm x 330 mm travel

Motor (Required)

Option	Description
-M1	1 motor on lower axis, 1 motor on upper axis
-M2	1 motor on lower axis, 2 motors on upper axis
-M3	2 motors on lower axis, 1 motor on upper axis
-M4	2 motors on lower axis, 2 motors on upper axis

Feedback (Required)

Option	Description
-E1	Incremental encoders, 1 Vpp on upper and lower axes
-E2	Incremental encoders, 0.1 um TTL on upper axis, 1 Vpp on lower axis
-E3	Incremental encoders, 1 Vpp on upper axis, 0.1 um TTL on lower axis
-E4	Incremental encoders, 0.1 um TTL on upper and lower axes

Cable Managment (Optional)

Option	Description
-CMS1	Cable management for air/vacuum line
-CMS2	Cable management for air/vacuum line and 3rd axis motor/feedback

Performance Grade (Required)*

Option	Description
-PL1	Base performance
-PL3	High-accuracy performance, PLUS
-PL4	Ultra-high accuracy 2D performance, ULTRA

*Note: -PL3 and -PL4 performance grades require Aerotech controller.

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.
-TAS	Integration - Test as system Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TAC	Integration - Test as components Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.