Description

Design Features

Aerotech’s PlanarDL-series stages offer excellent geometric and dynamic performance in a compact, low-profile package. A variety of travel and performance options make this stage ideal for applications ranging from surface profilometry to LED wafer scribing.

Superior Stage Design

The PlanarDL XY design allows for industry-leading planar geometric performance in applications where straightness and flatness of motion are critical. High-precision anti-creep crossed-roller bearings, precision-machined surfaces and Aerotech linear motors driving through the axes’ center-of-stiffness result in a positioning stage with exceptional geometric tolerances.

The PlanarDL structural elements are optimized for high-dynamics and high-stiffness for the most demanding dynamic applications. Capable of achieving 1 m/s velocities and 1.5 g accelerations, the PlanarDL enables high-throughput, high-accuracy processing resulting in superior process yield and a low total cost of ownership. Unlike competitive products using recirculating bearings, the anti-creep crossed-roller bearings used in this design permit smooth motion making this an ideal stage solution for challenging scanning applications.

Noncontact Direct-Drive Technology

Only noncontact, direct-drive technology offers high-speed and accurate positioning coupled with maintenance-free operation and long service life. At the heart of the PlanarDL is Aerotech’s proprietary direct-drive technology. This drive technology allows for unmatched performance compared to other competitive screw-based and linear motor designs.

The PlanarDL-200XY and -300XY stages are both available with one or two motors per axis, allowing optimization of each individual axis for the specific application and process. Regardless of the number of motors selected, the resulting drive force acts through the centers of friction and stiffness resulting in superior geometric performance and accuracy.

Integrated Cable Management

The cable management system on the PlanarDL is integrated into the stage and optimized for long life and performance. Additional standard options are available for extra servo axes or air/vacuum lines for vacuum chucks or other process pneumatics.

Extreme Positioning Performance

The PlanarDL is available in three positioning performance options. Relying upon decades of experience in system-level design including not only positioning mechanics, but also software and electronics, Aerotech has developed advanced technologies to push the envelope of precision. High-performance -PLUS and -ULTRA options are available to enable accuracies and straightness values down to ±400 nm and orthogonality down to 1 arc second.

Specifications

Mechanical Specifications

 PlanarDL-100XYPlanarDL-200XYPlanarDL-300XY
Performance Grade-PL1-PL3(1)-PL4(1)-PL1-PL3(1)-PL4(1)-PL1-PL3(1)-PL4(1)
Travel100 mm x 100 mm200 mm x 200 mm300 mm x 300 mm
Accuracy±3 
µm		±0.4 
µm		±0.4 
µm		±4 
µm		±0.5 
µm		±0.5 
µm		±5 
µm		±0.75 
µm		±0.75 
µm
Bidirectional Repeatability(2)±0.1 µm
Resolution
(Minimum Incremental Motion)		3 nm
Straightness±1 µm±0.4 µm±1.5 µm±0.5 µm±2 µm±0.75 µm
Flatness±1 µm±1.5 µm±2 µm
Pitch12 arc sec15 arc sec18 arc sec
Roll12 arc sec15 arc sec18 arc sec
Yaw6 arc sec8 arc sec10 arc sec
Orthogonality20 arc sec5 arc sec1 arc sec20 arc sec5 arc sec1 arc sec20 arc sec5 arc sec1 arc sec
Maximum Speed500 mm/s750 mm/s1000 mm/s
Maximum Acceleration
(No Load; Upper Axis)		1.5 g (No Load)1.0 g (x1 Motor)
1.5 g (x2 Motors)		1.0 g (x1 Motor)
1.5 g (x2 Motors)
Maximum Force (Continuous)26 N31 N (x1 Motor)
62 N (x2 Motors)		78 N (x1 Motor)
156 N (x2 Motors)
Load Capacity(3)Horizontal15 kg20 kg30 kg
Moving MassUpper Axis2.9 kg6.3 kg (-M1 or -M3 Motor)
7.4 kg (-M2 or -M4 Motor)		16.3 kg (-M1 or -M3 Motor)
19.1 kg (-M2 or -M4 Motor)
Lower Axis8.4 kg16.8 kg (-M1 Motor)
17.8 kg (-M2 or -M3 Motor)
19.0 kg (-M4 Motors)		45.0 kg (-M1 Motor)
48.1 kg (-M2 or -M3 Motor)
50.9 kg (-M4 Motors)
Stage Mass(4)11 kg23-25 kg53-63 kg
MaterialBlack Anodized Aluminum
MTBF (Mean Time Between Failure)30,000 Hours

  1. The -PL3 and -PL4 options require the use of an Aerotech controller.

  2. Repeatability specification assumes a feedback resolution of 20 nm or less.

  3. On-axis loading for orientation listed.

  4. Stage mass is a function of motor configuration.

  5. Specifications for -PL1 and -PL3 options are per axis measured 25 mm above the tabletop. Specifications for -PL4 are XY measured 25 mm above the tabletop.

Electrical Specifications

 PlanarDL-100XYPlanarDL-200XYPlanarDL-300XY
Drive SystemBrushless Linear Servomotor
FeedbackNoncontact Linear Encoder
Maximum Bus Voltage340 VDC
Limit Switches5 V, Normally Closed
Home SwitchNear Center of XY Travel

Recommended Controller

Multi-AxisA3200Ndrive CP
Ndrive HLe/HPe
Npaq
EnsembleEnsemble CP
Ensemble HLe/HPe
Single AxisSoloistSoloist CP
Soloist HLe/HPe

    Dimensions

    Ordering Information

    PlanarDL Two Axis Mechanical-Bearing Direct-Drive Linear Stage

    OptionDescription
    PlanarDL-100XYTwo axis mechanical-bearing direct-drive linear stage, 100 x 100 mm travel
    PlanarDL-200XYTwo axis mechanical-bearing direct-drive linear stage, 200 x 200 mm travel
    PlanarDL-300XYTwo axis mechanical-bearing direct-drive linear stage, 300 x 300 mm travel

    Motor (Required) - Not Applicable for PlanarDL-100XY

    OptionDescription
    -M11 motor on upper axis; 1 motor on lower axis
    -M22 motors on upper axis; 1 motor on lower axis
    -M31 motor on upper axis; 2 motors on lower axis
    -M42 motors on upper axis; 2 motors on lower axis

    Feedback (Required)

    OptionDescription
    -E1Incremental encoders, 1 Vpp on upper and lower axes
    -E2Incremental encoders, 0.1 µm TTL on upper axis, 1 Vpp on lower axis
    -E3Incremental encoders, 1 Vpp on upper axis, 0.1 µm TTL on lower axis
    -E4Incremental encoders, 0.1 µm TTL on upper and lower axes

    Cable Management (Optional)

    OptionDescription
    -CMS1Cable management for air/vacuum line
    -CMS2Cable management for air/vacuum line and 3rd axis motor/feedback

    Performance Grade (Required)

    OptionDescription
    -PL1Base performance
    -PL3High-accuracy performance, PLUS
    -PL4Ultra-high accuracy 2D performance, ULTRA

    1. Note: -PL3 and -PL4 performance grades require Aerotech controller.

    Integration (Required)

    Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

    OptionDescription
    -TASIntegration - Test as system
    Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
    -TACIntegration - Test as components
    Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.