Description

Design Features

Integrated low-profile XY linear motor stage
Nanometer-level performance in a large travel format
High resolution (1 nm), repeatability (75 nm), and accuracy (250 nm)
In-position stability of <1 nm
Anti-creep crossed-roller bearings
High dynamic performance with direct-drive technology
ULTRA performance grade option

Introduction

The ANT130XY series stages offer nanometer-level performance in XY travels up to 160 mm. The integrated, sleek design provides an extremely low profile of only 85 mm. The stage comes with proprietary direct-drive motor technology, noncontact linear encoders, limits, integrated cable management system, and three performance grades.

Ultra-Precise Stage Design

The ANT130XY design allows critical elements such as orthogonality, straightness, and flatness to be optimized, resulting in a stage with exceptional geometric tolerances. Aerotech’s direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion in both the X and Y dimensions. All travel options (60 mm x 60 mm, 110 mm x 110 mm, 160 mm x 160 mm) come with the 85 mm profile height. The integrated cable management system is designed for long life and to minimize drag forces.

Noncontact Direct-Drive

Only noncontact direct-drive technology offers the robust, accurate, and high-speed positioning necessary for mass production of precision devices. ANT130XY stages utilize advanced direct-drive technology pioneered by Aerotech to achieve the highest level of positioning performance. This direct-drive technology is high-performance, non-cogging, noncontact, high speed, high resolution, and high accuracy. This unique drive and bearing combination, packaged in an extremely small-profile and footprint, offers tangible advantages in many applications such as high-precision positioning, disk-drive fabrication, fiber alignment, optical delay element actuation, sensor testing, and scanning processes that demand smooth and precise motion.

Multi-Axis Configurations

The ANT130XY can be combined with other Aerotech ANT series products (vertical lift stages, direct-drive rotaries, and goniometers) to create unique, high performance, multi-axis systems.

ULTRA Performance Grade Option

In order to achieve the highest possible system accuracy from our multi-axis nanopositioning systems, Aerotech has developed an advanced, dynamic trajectory calibration system. To take advantage of this sophisticated calibration system, the mechanical system has to be completely assembled, functionally tested, and calibrated in our best-in-class metrology labs. Nanometer-level system accuracy can only be achieved under stringent environmental conditions, calibrating with the best test equipment, using the highest-precision mechanical elements, and utilizing the ULTRA software capabilities of Aerotech’s industry-leading controls. By implementing ULTRA dynamic trajectory calibration with the ANT130XY, we are able to produce guaranteed two-dimensional accuracies of ±250 nm or better.

The plots provided in the specifications illustrate performance differences between a standard ANT130XY and the ULTRA version. Straightness errors, orthogonality errors, and accuracy errors caused by stage yawing are virtually eliminated.

Specifications

Mechanical Specifications

		ANT130XY-060
		Base	PLUS^(1,2)	ULTRA^(1,2)
Travel		60 mm
Accuracy^(2,3)		±2.5 µm	±250 nm	±250 nm
Resolution (Minimum Incremental Motion)		1 nm
Repeatability (Bidirectional)⁽³⁾		±100 nm	±75 nm	±75 nm
Repeatability (Unidirectional)		±25 nm	±25 nm	±25 nm
Straightness⁽³⁾		±1.5 µm	±1.5 µm	±250 nm
Flatness⁽³⁾		±1.5 µm	±1.5 µm	±1.0 µm
Pitch		49 µrad (10 arc sec)	49 µrad(10 arc sec)	49 µrad (10 arc sec)
Roll		49 µrad (10 arc sec)	49 µrad (10 arc sec)	49 µrad (10 arc sec)
Yaw		24 µrad (5 arc sec)	24 µrad (5 arc sec)	24 µrad (5 arc sec)
Orthogonality		49 µrad (10 arc sec)	15 µrad (3 arc sec)	4.8 µrad (1 arc sec)
Maximum Speed⁽⁴⁾		350 mm/s (Upper Axis)
Maximum Acceleration⁽⁴⁾		1 g - 10 m/s² (No Load) (Upper Axis)
Speed Stability		See graph for typical performance
Settling Time		See graph for typical performance
In-Position Stability⁽⁵⁾		<1 nm
Maximum Force (Continuous)		23 N
Load Capacity⁽⁶⁾	Horizontal	12.0 kg
Moving Mass	Upper	1.5 kg
Moving Mass	Lower	4.2 kg
Stage Mass		5.5 kg
Material		Aluminum Body/Black Hardcoat Finish
MTBF (Mean Time Between Failure)		30,000 Hours

-PLUS and-ULTRA require the use of an Aerotech controller.
Specifications for -BASE and -PLUS options are per axis measured 25 mm above the tabletop. Specifications for -ULTRA are XY measured 25 mm above the tabletop.
Certified with each stage.
Requires the selection of an appropriate amplifier with sufficient voltage and current.
In-position jitter listing is 3 sigma value
Axis orientation for on-axis loading is listed.

		ANT130XY-110
		Base	PLUS^(1,2)	ULTRA^(1,2)
Travel		110 mm
Accuracy^(2,3)		±4.0 µm	±300 nm	±300 nm
Resolution (Minimum Incremental Motion)		1 nm
Repeatability (Bidirectional)⁽³⁾		±100 nm	±75 nm	±75 nm
Repeatability (Unidirectional)		±25 nm	±25 nm	±25 nm
Straightness⁽³⁾		±1.5 µm	±1.5 µm	±300 nm
Flatness⁽³⁾		±1.5 µm	±1.5 µm	±1.0 µm
Pitch		58 µrad (12 arc sec)	58 µrad (12 arc sec)	58 µrad (12 arc sec)
Roll		58 µrad (12 arc sec)	58 µrad (12 arc sec)	58 µrad (12 arc sec)
Yaw		29 µrad (6 arc sec)	29 µrad (6 arc sec)	29 µrad (6 arc sec)
Orthogonality		49 µrad (10 arc sec)	15 µrad (3 arc sec)	2.4 µrad (0.5 arc sec)
Maximum Speed⁽⁴⁾		350 mm/s (Upper Axis)
Maximum Acceleration⁽⁴⁾		1 g - 10 m/s² (No Load) (Upper Axis)
Speed Stability		See graph for typical performance
Settling Time		See graph for typical performance
In-Position Stability⁽⁵⁾		<1 nm
Maximum Force (Continuous)		23 N
Load Capacity⁽⁶⁾	Horizontal	12.0 kg
Moving Mass	Upper	2.1 kg
Moving Mass	Lower	5.7 kg
Stage Mass		7.4 kg
Material		Aluminum Body/Black Hardcoat Finish
MTBF (Mean Time Between Failure)		30,000 Hours

-PLUS and -ULTRA require the use of an Aerotech controller.
Specifications for -BASE and -PLUS options are per axis measured 25 mm above the tabletop. Specifications for -ULTRA are XY measured 25 mm above the tabletop.
Certified with each stage.
Requires the selection of an appropriate amplifier with sufficient voltage and current.
In-position jitter listing is 3 sigma value.
Axis orientation for on-axis loading is listed.

		ANT130XY-160
		Base	PLUS^(1,2)	ULTRA^(1,2)
Travel		160 mm
Accuracy^(2,3)		±5.0 µm	±300 nm	±300 nm
Resolution (Minimum Incremental Motion)		1 nm
Repeatability (Bidirectional)⁽³⁾		±100 nm	±75 nm	±75 nm
Repeatability (Unidirectional)		±25 nm	±25 nm	±25 nm
Straightness⁽³⁾		±2.0 µm	±2.0 µm	±300 nm
Flatness⁽³⁾		±2.0 µm	±2.0 µm	±1.0 µm
Pitch		73 µrad (15 arc sec)	73 µrad (15 arc sec)	58 µrad (12 arc sec)
Roll		73 µrad (15 arc sec)	73 µrad (15 arc sec)	58 µrad (12 arc sec)
Yaw		39 µrad (8 arc sec)	39 µrad (8 arc sec)	29 µrad (6 arc sec)
Orthogonality		49 µrad(10 arc sec)	15 µrad (3 arc sec)	2.4 µrad (0.5 arc sec)
Maximum Speed⁽⁴⁾		350 mm/s (Upper Axis)
Maximum Acceleration⁽⁴⁾		1 g - 10 m/s² (No Load)(Upper Axis)
Speed Stability		See graph for typical performance
Settling Time		See graph for typical performance
In-Position Stability⁽⁵⁾		<1 nm
Maximum Force (Continuous)		23 N
Load Capacity⁽⁶⁾	Horizontal	12.0 kg
Moving Mass	Upper	2.4 kg
Moving Mass	Lower	6.9 kg
Stage Mass		8.9 kg
Material		Aluminum Body/Black Hardcoat Finish
MTBF (Mean Time Between Failure)		30,000 Hours

-PLUS and -ULTRA require the use of an Aerotech controller.
Specifications for -BASE and -PLUS options are per axis measured 25 mm above the tabletop. Specifications for -ULTRA are XY measured 25 mm above the tabletop.
Certified with each stage.
Requires the selection of an appropriate amplifier with sufficient voltage and current.
In-position jitter listing is 3 sigma value.
Axis orientation for on-axis loading is listed.

Electrical Specifications

Drive System	Brushless Linear Servomotor
Feedback	Noncontact Linear Encoder
Maximum Bus Voltage	320 VDC (-4DU-25DU), 80 VDC (-25DU)
Limit Switches	5 V, Normally Closed
Home Switch	Near Center

Recommended Controller

Multi-Axis	A3200	Npaq MXR Npaq MR-MXH Ndrive ML-MXH
Multi-Axis	Ensemble	Epaq MXH Epaq MR-MXH Ensemble ML-MXH Ensemble LAB
Single Axis	Soloist	Soloist ML-MXH

Note: Linear amplifiers are required to achieve the listed specifications. Other options are available.

Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25°C/24 hours. If this is not possible, alternate products are available. Please consult Aerotech Application Engineering for more information.

ANT130XY Plots 1
ANT130XY Plots 2

Ordering Information

ANT130XY Two-Axis XY Direct-Drive Nanopositioning Stage

Travel (Required)

Option	Description
-060	60 mm travel
-110	110 mm travel
-160	160 mm travel

Connectors (Required)

Option	Description
-CN1	Single 25-pin D connector, 25DU
-CN2	Two connectors, 4-pin HPD and 25-pin D, 4DU-25DU

Note: -CN1 option not valid for systems using bus voltages greater than 80 V

Cable Managment (Required)

Option	Description
-CMS2	Post for two-axis cable support
-CMS3	Post for three-axis cable support

Mounting Plate (Optional)

Option	Description
-MP	Mounting plate

Performance Grade (Required)

Option	Description
-PL1	Base performance
-PL3	High-accuracy performance, PLUS
-PL4	Ultra high-accuracy performance, ULTRA

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.
-TAS	Integration - Test as system Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TAC	Integration - Test as components Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.