Description

Design Features

High-performance in a cost-effective, economic package
Rugged mechanical design
Available with servomotor or stepping motor
Nine models with travels from 50 mm to 600 mm
Vacuum and cleanroom versions available

The ECO165SL is part of the ECO linear stage family, building upon Aerotech’s long tradition of producing low total cost of ownership motion designs. Excellent positioning specifications, high stiffness, and a variety of options and features combined with economic pricing make the ECO165SL stage ideal for medium-performance production applications requiring ball-screw stage actuation.

Quality Mechanical Construction

A long-life recirculating linear guide bearing system and quality construction make the ECO165SL an attractive solution for applications where up-time is critical. Unlike low-cost competitive motion stages, the ECO165SL can be integrated into complex machines with the assurance it will perform at a high level and outlast other machine components.

Stepper Motor Option

For cost sensitive applications, the ECO165SL series includes several NEMA 23 stepper motor options. With the ability to run on standard wall voltages, the ECO165SL provides plug-and-play capability with a minimal amount of supporting electrical equipment.

Design and Integration Flexibility

The ECO165SL is designed with many standard features and options that make the design adaptable to specific applications. It is available in nine different models with travels ranging from 50 mm to 600 mm and speeds up to 300 mm/s.

The base mounting holes are accessible from the outside of the stage for easy mounting. Standard mounting holes for both English and metric optical tables are present in all travels. Each stage also mounts to another ECO165SL or ECO225SL for easy integration of multi-axis systems.

Optional tabletops are available with either English or metric mounting patterns. A third tabletop option features hole patterns to allow the direct attachment of several types of Aerotech rotary stages.

Aerotech BM or BMS series brushless servomotors are available with a variety of encoder options providing net resolutions ranging from 0.5 µm down to sub-nm. A holding brake can be added to the motor for vertical applications. A motor fold-back kit is available for space-constrained applications to reduce the overall stage length.

The ECO165SL stage series offers many options to fit the exact requirements of numerous applications. Its flexible, cost-effective design easily makes it one of the best value linear ball-screw stage series available today.

Specifications

ECO165SL Specifications

ECO165SL
Travel		50	100	150	200	250	300	400	500	600
Accuracy⁽¹⁾	Standard	±18 µm	±23 µm	±27 µm	±30 µm	±34 μm	±38 µm	±43 μm	±45 μm	±48 μm
Accuracy⁽¹⁾	Calibrated	±5 µm	±5 μm	±5 μm	±5.5 μm	±5.5 μm	±5.5 μm	±6 μm	±6 μm	±7 μm
Resolution (Min. Incremental Motion)		0.2 µm⁽²⁾, 0.75 µm⁽³⁾
Bidirectional Repeatability⁽¹⁾		±4 µm	±4 μm	±4 μm	±4.5 μm	±4.5 μm	±4.5 μm	±5 μm	±5 μm	±5 μm
Straightness⁽¹⁾		±2 µm	±3 µm	±4 µm	±5 µm	±6 µm	±7 μm	±9 μm	±11 μm	±13 μm
Flatness⁽¹⁾		±2 µm	±3 µm	±4 µm	±5 µm	±6 µm	±7 μm	±9 μm	±11 μm	±13 μm
Pitch		35 μrad (7.2 arc sec)	40 μrad (8.3 arc sec)	40 μrad (8.3 arc sec)	50 μrad (10.3 arc sec)	60 μrad (12.4 arc sec)	65 μrad (13.4 arc sec)	80 μrad (16.5 arc sec)	95 μrad (19.6 arc sec)	110 μrad (22.7 arc sec)
Roll		35 μrad (7.2 arc sec)	40 μrad (8.3 arc sec)	40 μrad (8.3 arc sec)	50 μrad (10.3 arc sec)	60 μrad (12.4 arc sec)	65 μrad (13.4 arc sec)	80 μrad (16.5 arc sec)	95 μrad (19.6 arc sec)	110 μrad (22.7 arc sec)
Yaw		35 μrad (7.2 arc sec)	40 μrad (8.3 arc sec)	40 μrad (8.3 arc sec)	50 μrad (10.3 arc sec)	60 μrad (12.4 arc sec)	65 μrad (13.4 arc sec)	80 μrad (16.5 arc sec)	95 μrad (19.6 arc sec)	110 μrad (22.7 arc sec)
Maximum Speed⁽⁴⁾		300 mm/s
Maximum Acceleration⁽⁴⁾		Function of motor, amplifier selection, payload, and maximum axial load
Load Capacity⁽⁴⁾	Horizontal	45 kg
	Vertical (Axial)	25 kg
	Side	45 kg
Moving Mass (w/tabletop)		2.8 kg
Stage Mass (no motor)		5.4 kg	5.8 kg	6.3 kg	6.8 kg	7.3 kg	7.8 kg	8.7 kg	9.7 kg	10.6 kg
Material		Anodized Aluminum
MTBF (Mean Time Between Failure)		20,000 Hours

Certified with -PL1 option.
Achieved with Aerotech rotary motor with amplified sine encoder.
Achieved with Aerotech rotary motor with 2500 cnts/rev digital enocoder.
Requires the selection of an appropriate amplifier with sufficient voltage and current.
Axis-orientation for on-axis loading is listed.
Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Contact factory for multi-axis applications.
Specifications listed are non-foldback kit options. Contact factory for specifications when a foldback kit (-FBx) is used.

Electrical Specifications

Drive System	Brushless Rotary Servomotor or Stepper Motor
Feedback	Incremental – 1000 lines/rev (-AS) and 2500 lines/rev (TTL)
Maximum Bus Voltage	340 VDC
Limit Switches	5 V, Normally Closed

Recommended Controller

Multi-Axis	A3200	Ndrive HLe/Ndrive CP/Ndrive HPe/Npaq
Multi-Axis	Ensemble	Ensemble HLe/Ensemble CP/Ensemble HPe
Single Axis	Soloist	Soloist CP/Soloist HPe

ECO165SL Plot

Ordering Information

ECO165SL Series Linear, Ball-Screw Stage

Travel (Required)

Option	Description
-050	50 mm travel stage
-100	100 mm travel stage
-150	150 mm travel stage
-200	200 mm travel stage
-250	250 mm travel stage
-300	300 mm travel stage
-400	400 mm travel stage
-500	500 mm travel stage
-600	600 mm travel stage

Tabletop (Optional)

Option	Description
-TT1	Tabletop with metric dimension mounting
-TT2	Tabletop with English dimension mounting
-TT3	Accessory tabletop with mounting for select rotary stages

Motor (Optional)

Option	Description
-M1	BMS100 brushless servomotor and 2500-line TTL encoder
-M2	BMS100 brushless servomotor, 2500-line TTL encoder, and brake
-M3	BMS100 brushless servomotor and 1000-line 1 Vpp encoder
-M4	BMS100 brushless servomotor, 1000-line 1 Vpp encoder, and brake
-M5	BM130 brushless servomotor and 2500-line TTL encoder
-M6	BM130 brushless servomotor, 2500-line TTL encoder, and brake
-M7	BM130 brushless servomotor and 1000-line 1 Vpp encoder
-M8	BM130 brushless servomotor, 1000-line 1 Vpp encoder, and brake
-M9	SM100 high voltage stepper motor
-M10	SM100 high voltage stepper motor and brake

Foldback Kit (Optional)

Option	Description
-FB1	Foldback kit for 0.250 inch diameter shaft NEMA 23 motor
-FB2	Foldback kit with brake for 0.250 inch diameter shaft NEMA 23 motor
-FB3	Foldback kit for 0.375 inch diameter shaft NEMA 23 motor
-FB4	Foldback kit with brake for 0.375 inch diameter shaft NEMA 23 motor

Motor Orientation (Optional)

Option	Description
-2	Bottom cable exit, optional orientation
-3	Left-side cable exit, standard orientation
-4	Top cable exit, optional orientation
-5	Right-side cable exit, optional orientation
-8	Right-side foldback, standard orientation
-12	Left-side foldback, optional orientation

Limits (Required)

Option	Description
-LI1	Normally-closed limit switches; 5 VDC with 9-Pin D connector
-LI2	Normally-open limit switches; 5 VDC with 9-Pin D connector

Coupling (Optional)

Option	Description
-CP1	Coupling for 0.250 inch diameter shaft
-CP2	Coupling for 0.375 inch diameter shaft

Lifting Hardware (Optional)

Option	Description
-LF	Lifting hardware

Note: Lifting option only available on travels 400 mm and greater. Lifting should never be ordered on the upper-axis of an XY set (only order on lower-axis).

Metrology (Required)

Option	Description
-PL0	No metrology performance plots
-PL1	Metrology, uncalibrated with performance plots
-PL2	Metrology, calibrated (HALAR) with performance plots

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

Option	Description
-TAS	Integration - Test as system Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TAC	Integration - Test as components Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.

Accessories (to be ordered as separate line item)

Option	Description
ALIGNMENT-NPA	Non-precision XY assembly
ALIGN-NPAZ	Non-precision XZ or YZ assembly
ALIGN-PA10	XY assembly; 10 arc sec orthogonality. Alignment to within 7 microns orthogonality for short travel stages.
ALIGN-PA10Z	XZ or YZ assembly with L-bracket; 10 arc second orthogonality. Alignment to within 10 microns orthogonality for short travel stages.
ALIGN-PA5	XY assembly; 5 arc sec orthogonality. Alignment to within 3 microns orthogonality for short travel stages.
ALIGN-PA5Z	XZ or YZ assembly with L-bracket; 5 arc second orthogonality. Alignment to within 5 microns orthogonality for short travel stages.
HDZ165	Right angle L-bracket for ECO165SL-050, ECO165SL-100, and ECO165SL-150 only.

Note: HDZ165 bracket requires -TT1 or -TT2 option to mount to ECO165SL.