Description

Design Features

Aerotech’s ATX165SL and ATX165SLE linear positioning stages combine the performance capabilities of a high-precision crossed-roller-bearing positioner with the convenience and simplicity of a ball-screw drive mechanism. Outstanding motion performance and a variety of advanced options and features offer superb value and make the ATX165SL/SLE an excellent choice to use in high-performance applications.

Superior Motion Performance

Featuring anti-creep crossed-roller bearings and a precision-ground, fine-pitch ball-screw, the ATX165SL/SLE boasts excellent geometric performance and minimal angular error motion. With up to 250 mm of nominal travel, the ATX165SL/SLE offers superior minimum incremental step size and in-position stability compared to other stages that utilize recirculating ball bearings. This makes the ATX165SL/SLE ideal for many high-precision tasks such as vertical positioning of sensors and cameras, optics focusing, and beamline measurement and manipulation applications.

Linear Encoder Option

The ATX165SLE offers an integral center-mounted linear encoder to provide direct position measurement at the stage’s moving carriage. The typical effects of backlash commonly associated with screw drives are virtually eliminated when using the linear encoder as a position feedback device. Applications that require exacting workpoint performance benefit greatly from the ATX165SL’s direct linear encoder. Options are available with either incremental (1 Vpp and digital TTL) or absolute output signals.

Design and Integration Flexibility

The ATX165SL/SLE is designed with a variety of standard features and available options, allowing it to be easily integrated into a larger subsystem or machine, or to serve as a stand-alone positioning axis. It mounts to both metric and English optical tables and features a versatile customer mounting interface on the moving carriage to which other positioning stages or equipment can be mounted. Brushless, slotless servomotors, with or without a holding brake, as well as stepper motors, are available options. The ATX165SL/SLE can be equipped with an optional motor foldback kit in order to reduce the overall length of the stage. This is particularly useful in vertical-axis applications where space is limited. Vacuum and cleanroom-compatible variants are also available.

Mitigate Thermal Errors with ThermoComp®

Temperature changes and thermal effects are often the most detrimental sources of error in precision machines, and screw drives are particularly susceptible. All ATX-series stages are available with Aerotech’s ThermoComp® feature, an integrated temperature compensation solution that delivers accurate and dependable positioning performance in the presence of thermal disturbances. It protects the stage from the effects of variable-temperature environments and friction-induced self-heating, ultimately providing stability to the user’s process, even in extreme industrial environments.

Specifications

ATX165SL/SLE Specifications

Mechanical SpecificationsATX165SL/ATX165SLE
Travel150 mm200 mm250 mm
Accuracy(1)SLUncalibrated±8 µm±8 µm±9 µm
Calibrated(2)±1 µm±1 µm±1 µm
SLEUncalibrated±4 µm±5 µm±6 µm
Calibrated(2)±0.4 µm±0.5 µm±0.5 µm
Resolution (Minimum Incremental Motion)SL

0.05 µm(3)
0.1 µm(4)

SLE0.025 µm (-E1 feedback option)(6)
0.1 µm (-E2 feedback option)
0.2 µm (-E3 feedback option)
Bidirectional Repeatability(1)SL±0.5 µm
SLE±0.15 µm±0.2 µm±0.25 µm
Horizontal Straightness(1)±1.75 µm±2.0 µm±2.25 µm
Vertical Straightness(1)±1.75 µm±2.0 µm±2.25 µm
Pitch80 µrad (16 arc-sec)85 µrad (17 arc-sec)90 µrad (18 arc-sec)
Yaw80 µrad (16 arc-sec)85 µrad (17 arc-sec)90 µrad (18 arc-sec)
Maximum Speed(5)DC Servomotor (-M1 through -M8)100 mm/s
Stepper Motor (-M9)25 mm/s
Load CapacityHorizontal40 kg
Side25 kg
Vertical (Axial)20 kg
Moving Mass3.4 kg3.8 kg4.1 kg
Stage Mass (No Motor)12.3 kg13.7 kg15.0 kg
MaterialAnodized aluminum

  1. Certified with each stage.

  2. Available with Aerotech controllers.

  3. Achieved with Aerotech rotary motor with amplified sine encoder. Specification is unidirectional.

  4. Achieved with Aerotech rotary motor with 10,000 lines/rev digital encoder. Specification is unidirectional.

  5. Requires the selection of an appropriate amplifier with sufficient voltage and current.

  6. Requires motor with 1 Vpp amplified sine encoder (-M3, -M4, -M7, -M8 motor options) and linear amplifier.

  7. Specifications listed are valid for non-foldback kit options. Contact factory for specifications when a foldback kit option (-FBx) is ordered.

Electrical SpecificationsATX165SL / ATX165SLE
Drive SystemBrushless Rotary Servomotor (-M1 through -M8)
Stepper Motor (-M9)
Feedback (Linear Encoder - SLE Version Only)Incremental: 1 Vpp (-E1 feedback option) or 0.05 μm TTL (-E2 feedback option)
Absolute: EnDat 2.2 (-E3 feedback option)
Feedback (Rotary Encoder)

Incremental: 10,000-Line TTL (-M1, -M2, -M5, -M6 motor options)
or 1000-Line 1 Vpp (-M3, -M4, -M7, -M8 motor options)

Maximum Bus Voltage320 VDC
Limit Switches5 V, Normally Closed

Dimensions

Ordering Information

ATX165SL/SLE Series Mechanical-Bearing, Screw-Driven Linear Stage

Direct Linear Feedback (Required)

OptionDescription
SLNo direct linear feedback
SLE-E1Incremental linear encoder, 1 Vpp
SLE-E2Incremental linear encoder, 0.05 µm digital TTL output
SLE-E3Absolute linear encoder

Travel (Required)

OptionDescription
-150150 mm travel
-200200 mm travel
-250250 mm travel

Motor (Optional)

OptionDescription
-M1BMS60 brushless servomotor and 10,000-line TTL encoder
-M2BMS60 brushless servomotor, 10,000-line TTL encoder, and brake
-M3BMS60 brushless servomotor and 1000-line 1 Vpp encoder
-M4BMS60 brushless servomotor, 1000-line 1 Vpp encoder, and brake
-M5BM75 brushless servomotor and 10,000-line TTL encoder
-M6BM75 brushless servomotor, 10,000-line TTL encoder, and brake
-M7BM75 brushless servomotor and 1000-line 1 Vpp encoder
-M8BM75 brushless servomotor, 1000-line 1 Vpp encoder, and brake
-M9SM60 stepper motor, high voltage

Foldback Kit (Optional)

OptionDescription
-FB1Foldback kit for .250 inch diameter shaft NEMA 23 motor (standard)
-FB2Foldback kit for .375 inch diameter shaft NEMA 23 motor

Motor Orientation (Optional)

OptionDescription
-2Bottom cable exit, optional orientation
-3Left-side cable exit, standard orientation
-5Right-side cable exit, optional orientation
-8Right-side foldback, standard orientation
-9Right-side foldback with bottom cable exit, optional orientation
-12Left-side foldback, optional orientation
-13Left-side foldback with bottom cable exit, optional orientation

Coupling (Optional)

OptionDescription
-CP1Coupling for 0.250 inch diameter shaft
-CP2Coupling for 0.375 inch diameter shaft, required for BMS100/BM130 motor

Lifting Hardware (Optional)

OptionDescription
-LF1Lifting handles
-LF2Hoist rings

ThermoComp (Optional)

OptionDescription
-TCMPThermoComp integrated thermal compensation

Metrology (Required)

OptionDescription
-PL1Metrology, uncalibrated with performance plots
-PL2Metrology, calibrated (HALAR) with performance plots

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

OptionDescription
-TASIntegration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TACIntegration - Test as components
Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.