Description

Design Features

The ATS150 series motor-driven linear stages provide the high resolution and repeatability required for semiconductor wafer testing and fabrication, automated microscope inspection systems and precision micromachining applications.

Construction Features

ATS150 series stages are machined from a special cast aluminum alloy to provide a high strength-to-weight ratio and long-term stability. The base is a box design that provides exceptional stiffness and stability.

ATS150 series stages employ a precision-ground ball screw that is pre-loaded to eliminate backlash, and its nut has wipers to prevent contamination and maintain high accuracy throughout the life of the stage. High quality, pre-loaded duplex bearings are used to eliminate axial play.

All ATS150 series stages incorporate Linear Motion Guide (LMG) bearings to provide high load capability and high stiffness. The LMG design provides a compact stage with continuous carriage support over the entire travel and good cantilevered load capability. Integral wipers on the bearing trucks help ensure stage travel life. Highly accurate optical limit switches and end stops are also standard.

Integral bellows-type waycovers protect the drive and bearing system from contamination. Metal surfaces are protected with an attractive clear anodized finish. Both metric (standard) and English mounting and bolt-hole patterns are available.

Linear Encoder

A precision noncontact linear encoder is an option. The encoder is mounted internal to the stage, protecting it from external contaminants and debris.

Motors and Drives

Included with all ATS150 series stages are Aerotech’s BMS series brushless rotary motors. This motor has all of the advantages of a brushless motor – high acceleration, no brushes to wear and lower heating – yet has zero cogging for extremely smooth motion and accuracy. Aerotech manufactures a wide range of matching drives and controls to provide a fully integrated and optimized motion solution.

Specifications

ATS150 Specifications

ModelATS150-100ATS150-150ATS150-200ATS150-250
Travel100 mm150 mm200 mm250 mm
Drive SystemSuper Precision Ground Ball Screw/Brushless Servomotor (BMS60-A-D25-E1000H)
Bus VoltageUp to 160 VDC
Continuous CurrentApkUp to 2.3 A
ArmsUp to 1.6 A
FeedbackNoncontact Rotary Encoder (1000 line)
Resolution2 mm/rev lead0.5 µm @ 4000 steps/rev Motor Resolution
4 mm/rev lead1.0 µm @ 4000 steps/rev Motor Resolution
LN Linear Encoder0.001 µm - 0.2 µmN/AN/A
Maximum Travel Speed(1)2 mm/rev lead115 mm/s
4 mm/rev lead230 mm/s
Maximum Load(2)Horizontal45.0 kg
Vertical25.0 kg
Side25.0 kg
AccuracyBall ScrewCalibrated(3)±1.0 µm
Standard+2,-4 µm+2,-5 µm+2,-8 µm+2,-10 µm
LNCalibrated(3)±1.0 µmN/AN/A
Standard±5.0 µmN/AN/A
Repeatability (Bidirectional)Ball ScrewCalibrated(3)±0.5 µm
Standard±1.0 µm
LN±0.5 µmN/AN/A
Straightness and FlatnessDifferentialHALSF1 µm/25 mm
Standard2 µm/25 mm
Maximum
Deviation		HALSF±1.0 µm±1.5 µm±2.0 µm±3.0 µm
Standard±2.0 µm±3.0 µm±4.0 µm±5.0 µm
Pitch and Yaw8 arc sec10 arc sec12 arc sec14 arc sec
Nominal Stage WeightLess Motor6.1 kg7.5 kg7.9 kg8.4 kg
With Motor7.2 kg8.6 kg9.0 kg9.5 kg
ConstructionAluminum Body/Stage and Table; Clear Anodize Finish

  1. Excessive duty cycle may impact accuracy.

  2. Payload specifications are for single axis system and based on ball screw and bearing life of 2500 km (100 million inches) of travel.

  3. Available with Aerotech controllers.

  4. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.

Dimensions

Ordering Information

ATS150 Series Mechanical-Bearing Screw-Driven Linear Stage

Travel (Required)

OptionDescription
-100100 mm
-150150 mm
-200200 mm
-250250 mm

Vacuum Preparation (Required)

OptionDescription
-HVHigh vacuum preparation to 10-6 Torr

Direct Linear Feedback (Required)

OptionDescription
-E1High-accuracy incremental linear encoder; 1 Vpp

  1. Linear encoder option only available on the 100 mm and 150 mm travels

Tabletop (Required)

OptionDescription
-TT1Tabletop with metric dimension mounting pattern and holes
-TT2Tabletop with English dimension mounting pattern and holes

Ball Screw (Required)

OptionDescription
-BS12 mm/rev precision-ground ball screw
-BS24 mm/rev precision-ground ball screw

Motor (Optional)

OptionDescription
-M1BMS60 servomotor w/2500-line TTL encoder
-M2BMS60 servomotor w/2500-line TTL encoder and holding brake
-M3BMS60 servomotor w/1000-line 1 Vpp encoder
-M4BMS60 servomotor w/1000-line 1 Vpp encoder and holding brake
-M5BM75 servomotor w/2500-line TTL encoder
-M6BM75 servomotor w/2500-line TTL encoder and holding brake
-M7BM75 servomotor w/1000-line 1 Vpp encoder
-M8BM75 servomotor w/1000-line 1 Vpp encoder and holding brake
-M9SM60 stepper motor, SM60-CN1-VT2
-M10SM60 stepper motor w/holding brake, SM60-CN1-VT2-BK

Foldback (Optional)

OptionDescription
-FB1Foldback kit for .250 inch diameter shaft NEMA 23 motor
-FB2Foldback kit w/brake for .250 inch diameter shaft NEMA 23 motor

Motor Orientation (Optional)

OptionDescription
-2Bottom cable exit, optional orientation
-3Left-side cable exit, standard orientation
-4Top cable exit, optional orientation
-5Right-side cable exit, optional orientation
-8Right-side foldback, standard orientation
-12Left-side foldback, optional orientation

Limits (Required)

OptionDescription
-LI1Normally-closed limit switches; 9-pin D connector
-LI2Normally-closed limit switches; flying leads
-LI3Normally-open limit switches; 9-pin D connector
-LI4Normally-open limit switches; flying leads

Coupling (Optional)

OptionDescription
-CP1Coupling for 0.250 inch diameter shaft
-CP2Coupling for 0.375 inch diameter shaft

Metrology (Optional)

OptionDescription
-PL1Metrology, uncalibrated with performance plots
-PL2Metrology, calibrated (HALAR) with performance plots

Metrology - HALSF (Optional)

OptionDescription
-PL5Metrology, horizontal/vertical straightness correction (HALSF)

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

OptionDescription
-TASIntegration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TACIntegration - Test as components
Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.

Accessories (To be ordered as a separate line item)

OptionDescription
ALIGN-NPANon-precision XY assembly
ALIGN-NPAZNon-precision XZ or YZ assembly
ALIGN-PA10XY assembly; 10 arc sec orthogonality. Alignment to within 7 microns orthogonality for short travel stages.
ALIGN-PA10ZXZ or YZ assembly with L-bracket; 10 arc second orthogonality. Alignment to within 10 microns orthogonality for short travel stages.
ALIGN-PA5XY assembly; 5 arc sec orthogonality. Alignment to within 3 microns orthogonality for short travel stages.
ALIGN-PA5ZXZ or YZ assembly with L-bracket; 5 arc second orthogonality. Alignment to within 5 microns orthogonality for short travel stages.
HDZ2English right angle L-bracket; for ATS150-100 and ATS150-150 only
HDZ2MMetric right angle L-bracket; for ATS150-100 and ATS150-150 only