Description

Design Features

Long life linear motion guide bearing system
Ultra-fine resolution
Integral bellows waycovers
Low-profile compact design
Includes brushless, slotless motor

The ATS100 series motor-driven linear stages provide the high resolution and repeatability required for semiconductor wafer testing and fabrication, automated microscope inspection systems and precision micromachining applications.

Outstanding Construction Features

ATS100 series stages are machined from a special cast aluminum alloy to provide a high strength-to-weight ratio and long-term stability. The base is a box design that provides exceptional stiffness and stability.

ATS100 series stages employ a precision-ground ball screw pre-loaded to eliminate backlash, and its nut has wipers to prevent contamination and maintain high accuracy throughout the life of the stage. High-quality, pre-loaded duplex bearings are used to eliminate axial play.

All ATS100 series stages incorporate Linear Motion Guide (LMG) bearings to provide high load capability and high stiffness. The LMG design provides a compact stage with continuous carriage support over the entire travel and good cantilevered load capability. Integral wipers on the bearing trucks help ensure stage travel life. Highly accurate optical limit switches and end stops are also standard.

Integral bellows-type waycovers protect the drive and bearing system from contamination. Metal surfaces are protected with an attractive clear anodized finish. Both metric (standard) and English mounting and bolt-hole patterns are available.

High Accuracy

The ATS100 sets the standard for precision performance in a compact package. With the -PL2 option, the ATS100 is capable of submicron accuracy and an impressive repeatability of 0.3 µm.

Motors and Drives

Included with the ATS100 series stages are Aerotech's BMS series brushless rotary motors. This motor has all of the advantages of a brushless motor – high acceleration, no brushes to wear and lower heating – yet has zero cogging for extremely smooth motion and accuracy. Aerotech manufactures a wide range of matching drives and controls to provide a fully integrated and optimized motion solution.

Options

Standard options include a precision right-angle bracket for multi-axis assembly and vacuum preparation to 10^-6 torr.

Specifications

ATS100 Specifications

Model			ATS100-050	ATS100-100	ATS100-150	ATS100-200
Travel			50 mm	100 mm	150 mm	200 mm
Maximum Travel Speed⁽¹⁾			100 mm/s
Maximum Load⁽²⁾	Horizontal		25.0 kg
	Vertical		10.0 kg
	Side		10.0 kg
Accuracy	Calibrated⁽³⁾		±0.5 µm	±0.5 µm	±0.75 µm	±1.0 µm
Accuracy	Standard		±2.0 µm	±3.0µm	±5.0 µm	±6.0 µm
Repeatability (Bidirectional)	Calibrated⁽³⁾		±0.3 µm
Repeatability (Bidirectional)	Standard		±0.7 µm
Straightness and Flatness	Differential	HALSF	1.0 µm/25 mm
	Differential	Standard	2.0 µm/25 mm
	Maximum Deviation	HALSF	±0.5 µm	± 1.0 µm	±1.5 µm	±1.75 µm
	Maximum Deviation	Standard	±1.0 µm	±2.0 µm	±2.0 µm	±3.0 µm
Pitch and Yaw			5 arc sec	8 arc sec	10 arc sec	12 arc sec
Nominal Stage Weight	Less Motor		1.6 kg	1.7 kg	1.8 kg	2.0 kg
Nominal Stage Weight	With Motor		2.7 kg	2.8 kg	2.9 kg	3.1 kg
Construction			Aluminum Body/Stage and Table; Clear Anodize Finish

Excessive duty cycle may impact stage accuracy.
Payload specifications are for single axis systems and based on ball screw and bearing life of 2500 km (100 million inches) of travel.
Available with Aerotech controllers.
Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.

ATS100 Cantilevered Load Graph

Ordering Information

ATS100 Series Mechanical-Bearing Screw-Driven Linear Stage

Travel (Required)

Option	Description
-050	50 mm
-100	100 mm
-150	150 mm
-200	200 mm

Vacuum Preparation (Required)

Option	Description
-HV	High vacuum preparation to 10^-6 Torr

Tabletop (Required)

Option	Description
-TT1	Tabletop with metric dimension mounting pattern and holes
-TT2	Tabletop with English dimension mounting pattern and holes

Motor (Optional)

Option	Description
-M1	BMS60 servomotor w/2500-line TTL encoder
-M2	BMS60 servomotor w/2500-line TTL encoder and holding brake
-M3	BMS60 servomotor w/1000-line 1 Vpp encoder
-M4	BMS60 servomotor w/1000-line 1 Vpp encoder and holding brake
-M5	BM75 servomotor w/2500-line TTL encoder
-M6	BM75 servomotor w/2500-line TTL encoder and holding brake
-M7	BM75 servomotor w/1000-line 1 Vpp encoder
-M8	BM75 servomotor w/1000-line 1 Vpp encoder and holding brake
-M9	SM60 stepper motor, SM60-CN1-VT2
-M10	SM60 stepper motor w/holding brake, SM60-CN1-VT2-BK

Foldback (Optional)

Option	Description
-FB1	Foldback kit for .250 inch diameter shaft NEMA 23 motor
-FB2	Foldback kit w/brake for .250 inch diameter shaft NEMA 23 motor

Motor Orientation (Optional)

Option	Description
-2	Bottom cable exit, optional orientation
-3	Left-side cable exit, standard orientation
-4	Top cable exit, optional orientation
-5	Right-side cable exit, optional orientation
-8	Right-side foldback, standard orientation
-12	Left-side foldback, optional orientation

Limits (Required)

Option	Description
-LI1	Normally-closed limit switches, 9-pin D connector
-LI2	Normally-closed limit switches; flying leads
-LI3	Normally-open limit switches, 9-pin D connector
-LI4	Normally-open limit switches, flying leads

Coupling (Optional)

Option	Description
-CP1	Coupling for 0.250 inch diameter shaft
-CP2	Coupling for 0.375 inch diameter shaft

Mounting Plate (Optional)

Option	Description
-MP1	Mounting plate, metric
-MP2	Mounting plate, English

Metrology (Optional)

Option	Description
-PL1	Metrology, uncalibrated with performance plots
-PL2	Metrology, calibrated (HALAR) with performance plots

Metrology - HALSF (Optional)

Option	Description
-PL5	Metrology, horizontal/vertical straightness correction (HALSF)

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

Option	Description
-TAS	Integration - Test as system Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TAC	Integration - Test as components Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.

Accessories (to be ordered as a separate line item)

Option	Description
ALIGN-NPA	Non-precision XY assembly
ALIGN-NPAZ	Non-precision XZ or YZ assembly
ALIGN-PA10	XY assembly; 10 arc sec orthogonality. Alignment to within 7 microns orthogonality for short travel stages.
ALIGN-PA10Z	XZ or YZ assembly with L-bracket; 10 arc second orthogonality. Alignment to within 10 microns orthogonality for short travel stages.
ALIGN-PA5	XY assembly; 5 arc sec orthogonality. Alignment to within 3 microns orthogonality for short travel stages.
ALIGN-PA5Z	XZ or YZ assembly with L-bracket; 5 arc second orthogonality. Alignment to within 5 microns orthogonality for short travel stages.
HDZ1	English right angle L-bracket; for ATS100-050 and ATS100-100 only
HDZ1L	English right angle L-bracket; for ATS100-150 and ATS100-200 only
HDZ1M	Metric right angle L-bracket; for ATS100-050 and ATS100-100 only
HDZ1LM	Metric right angle L-bracket; for ATS100-150 and ATS100-200 only