Description

Design Features

Compact 75 mm width with travel to 100 mm
Precision ground ball-screw drive
DC servo or stepper motor
Anti-creep crossed-roller bearings
High resolution (0.1 µm), repeatability (±0.75 µm) and accuracy (±1.0 µm)
High-vacuum compatible
Optional bellows waycovers
Compact multi-axis configurations

The MPS75SL is a compact, high-performance linear positioning stage that is perfect for the confines of the laboratory while providing the high reliability required in a production environment. It is the ideal choice for measurement, testing, accurate alignment and component assembly.

High Accuracy

The precision ground ball-screw provides exceptional accuracy, repeatability and ultra-fine positioning resolution capability to 0.1 micron. The DC servomotor is equipped with a rotary encoder. The anti-creep crossed-roller linear bearings provide smooth travel and excellent payload characteristics.

Optional Vacuum Preparation

The MPS75SL is available with optional vacuum preparation to 10^-6 Torr. It is the perfect compact stage choice for today's demanding vacuum applications in markets such as semiconductor manufacturing and inspection, optics fabrication and military/aerospace.

Highly Configurable

An optional breadboard mounting plate provides direct mounting to both English and metric breadboards. Bellows waycovers are available for use in dusty environments. Any of the models can be mounted in an XY configuration and, with the right-angle L-bracket, in XYZ configurations. It can also be mounted with the smaller MPS50SL stage.

The MPS75SL is a member of the MPS (Miniature Positioning Stage) family of linear, rotary, goniometer and vertical lift and Z stages. Two or more stages can easily be mounted together in numerous combinations using standardized mounting patterns and adapter plates.

Specifications

Mechanical Specifications

Model			MPS75SL-025	MPS75SL-050	MPS75SL-075	MPS75SL-100
Travel			25 mm	50 mm	75 mm	100 mm
Accuracy	Uncalibrated		±2.5 µm	±3.0 µm	±3.5 µm	±4.0 µm
	Uncalibrated with Bellows		±3.5 µm	±4.0 µm	±4.5 µm	±5.0 µm
	Calibrated⁽¹⁾		±1.0 µm	±1.0 µm	±1.5 µm	±1.5 µm
Resolution (Minimum Incremental Motion)			0.1 µm
Repeatability (Bidirectional)⁽¹⁾			±0.75 µm (Standard); ±1.2 µm (with Bellows)
Straightness			±2.0 µm	±2.0 µm	±3.0 µm	±3.0 µm
Flatness			±2.0 µm	±2.0 µm	±3.0 µm	±3.0 µm
Maximum Speed	1.0 mm/rev Ball Screw	DC Motor (-M1)	50 mm/s	50 mm/s	50 mm/s	35 mm/s
Maximum Speed	1.0 mm/rev Ball Screw	Stepper Motor (-M2)	30 mm/s	30 mm/s	30 mm/s	30 mm/s
Load Capacity⁽²⁾	Horizontal		15 kg
	Side		15 kg
	Vertical		4 kg
Stage Mass			1.7 kg	1.8 kg	1.9 kg	2.0 kg
Material			Anodized Aluminum Body

With Aerotech controllers.
Payload specifications are single-axis system.
Excessive duty cycle may impact stage accuracy.
Specifications are for single-axis systems measured 25 mm above the tabletop.
Contact factory for specifications of stages with bellows option.

Electrical Specifications

Model	DC Motor (-M1) (Standard and VAC)	Stepper Motor (-M2) (Standard and VAC)
Drive System	DC Brush Servomotor	24 VDC Bipolar Stepper Motor
Feedback	10,000 lines/rev Rotary Encoder	N/A
Electronic Resolution	0.025 µm	0.025 µm @ 40,000 steps/rev Motor Resolution
Maximum Bus Voltage	48 VDC	48 VDC*
Limit Switches	5V, Normally Closed

*With Aerotech control system.

Recommended Controller

Model
Multi-Axis	A3200	Npaq/Npaq MR/Ndrive MP
Multi-Axis	Ensemble	Ensemble LAB/Epaq/Epaq MR/Ensemble MP
Single Axis	Soloist	Soloist MP

MPS75SL Load Curves

Ordering Information

MPS75SL Miniature Mechanical-Bearing Screw-Driven Linear Stage

Travel (Required)

Option	Description
-025	25 mm travel stage
-050	50 mm travel stage
-075	75 mm travel stage
-100	100 mm travel stage

Vacuum Preparation (Optional)

Option	Description
-HV	High vacuum preparation to 10^-6 Torr

Motor (Required)

Option	Description
-M1	DC servomotor
-M2	Stepper motor

Bellows (Optional)

Option	Description
-BL	Bellows waycover

Note: Bellows waycover not available with -HV vacuum preparation.

Mounting Plate (Optional)

Option	Description
-MP	Optical table mounting plate

Metrology (Required)

Option	Description
-PL0	No metrology performance plots
-PL1	Metrology, uncalibrated with performance plots
-PL2	Metrology, calibrated (HALAR) with performance plots

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

Option	Description
-TAS	Integration - Test as system Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TAC	Integration - Test as components Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.

Accessories (to be ordered as separate line item)

Option	Description
HDZ-MPS75SL	Right angle bracket, MPS75SL
HDZ-MPS75SL-HV	Right angle bracket, MPS75SL, high vacuum preparation to 10^-6 Torr