High-performance in a cost-effective, economic package
Rugged mechanical design
Direct-drive linear motor for precision motion
Nine models with travels from 100 mm to 800 mm
Certified with -PL1 option. Requires the selection of an appropriate amplifier with sufficient voltage and current, and is dependent on motor selection. Axis-orientation for on-axis loading is listed. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Contact factory for multi-axis applications. NOTE: Lifting option only available on travels 400 mm and greater. Lifting should never be ordered on the upper-axis of an XY set (only order on lower-axis). Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.Specifications
ECO225LM Specifications
ECO225LM Travel 100 150 200 250 300 400 500 600 800 Accuracy(1) Standard ±6 µm ±8 µm ±10 µm ±12 μm ±14 µm ±16 μm ±18 μm ±20 μm ±22 μm Calibrated ±1.5 μm ±1.5 μm ±2 μm ±2 μm ±2 μm ±2.5 μm ±2.5 μm ±3 μm ±3 μm Resolution (Min.
Incremental Motion)10 nm Bidirectional Repeatability(1) ±0.75 μm ±0.75 μm ±0.75 μm ±0.75 μm ±0.75 μm ±1.0 μm ±1.0 μm ±1.0 μm ±1.0 μm Straightness(1) ±2.5 µm ±3 µm ±4 µm ±4.5 µm ±5 μm ±6 μm ±7 μm ±8 μm ±9.5 μm Flatness(1) ±2.5 µm ±3 µm ±4 µm ±4.5 µm ±5 μm ±6 μm ±7 μm ±8 μm ±9.5 μm Pitch 40 μrad
(8.2 arc sec)40 μrad
(8.2 arc sec)50 μrad
(10.3 arc sec)55 μrad
(11.3 arc sec)60 μrad
(12.4 arc sec)70 μrad
(14.4 arc sec)85 μrad
(17.5 arc sec)100 μrad
(20.6 arc sec)115 μrad
(23.7 arc sec)Roll 40 μrad
(8.2 arc sec)40 μrad
(8.2 arc sec)50 μrad
(10.3 arc sec)55 μrad
(11.3 arc sec)60 μrad
(12.4 arc sec)70 μrad
(14.4 arc sec)85 μrad
(17.5 arc sec)100 μrad
(20.6 arc sec)115 μrad
(23.7 arc sec)Yaw 40 μrad
(8.2 arc sec)40 μrad
(8.2 arc sec)50 μrad
(10.3 arc sec)55 μrad
(11.3 arc sec)60 μrad
(12.4 arc sec)70 μrad
(14.4 arc sec)85 μrad
(17.5 arc sec)100 μrad
(20.6 arc sec)115 μrad
(23.7 arc sec)Maximum Speed(2) 2 m/s Maximum Acceleration(2) 1.5 g Maximum Force, Continuous M1 72.1 N M2 153.3 N Load Capacity(3) Horizontal 100 kg Side 100 kg Moving Mass 6.1 kg Stage Mass M1 18.6 kg 20.0 kg 21.0 kg 22.3 kg 23.6 kg 26.3 kg 28.6 kg 31.3 kg 36.2 kg M2 20.2 kg 21.8 kg 22.7 kg 24.3 kg 25.9 kg 29.1 kg 31.6 kg 36.8 kg 40.6 kg Material Anodized Aluminum MTBF (Mean Time Between Failure) 20,000 Hours Electrical Specifications
Drive System Brushless Linear Servomotor Feedback Noncontact Encoder
Incremental – 1 Vpp and TTL (0.1 μm) Output
Absolute – EnDat 2.2Maximum Bus Voltage 340 VDC Limit Switches 5 V, Normally Closed Home Switch Near Center Recommended Controller
Multi-Axis A3200 Ndrive HLe/Ndrive CP/Ndrive HPe/Npaq Ensemble Ensemble HLe/Ensemble CP/Ensemble HPe Single Axis Soloist Soloist CP/Soloist HPe Dimensions
Ordering Information
ECO225LM Series Linear Motor Stage
Travel (Required)Option Description -0100 100 mm travel stage -0150 150 mm travel stage -0200 200 mm travel stage -0250 250 mm travel stage -0300 300 mm travel stage -0400 400 mm travel stage -0500 500 mm travel stage -0600 600 mm travel stage -0800 800 mm travel stage Motor (Optional)
Option Description -M1 Standard motor option -M2 High performance motor option Tabletop (Optional)
Option Description -TT1 Tabletop with metric dimension mounting -TT2 Tabletop with English dimension mounting -TT3 Accessory tabletop with mounting for select rotary stages Feedback (Required)
Option Description -E1 Incremental encoder, 1 Vpp -E2 Incremental linear encoder, 0.1 µm digital TTL output Cable Management (Required)
Option Description -CMS0 No external CMS, motor/feedback connector bracket on carriage -CMS1 External CMS for single axis -CMS2 External CMS for lower-axis of two-axis ECO (XY) assembly -CMS3 External CMS for lower-axis of two-axis (XZ or XT) assembly -CMS4 External CMS for upper-axis of two-axis ECO (XY) assembly Lifting Hardware (Optional)
Option Description -LF Lifting Hardware Metrology (Required)
Option Description -PL0 No metrology performance plots -PL1 Metrology, uncalibrated with performance plots -PL2 Metrology, calibrated (HALAR) with performance plots Integration (Required)
Option Description -TAS Integration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.-TAC Integration - Test as components
Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.Accessories (to be ordered as a separate line item)
Option Description ALIGN-NPA Non-precision XY assembly ALIGN-NPAZ Non-precision XZ or YZ assembly ALIGN-PA10 XY assembly; 10 arc sec orthogonality. Alignment to within 7 microns orthogonality for short travel stages ALIGN-PA10Z XZ or YZ assembly with L-bracket; 10 arc second orthogonality. Alignment to within 10 microns orthogonality for short travel stages. ALIGN-PA5 XY assembly; 5 arc sec orthogonality. Alignment to within 3 microns orthogonality for short travel stages. ALIGN-PA5Z XZ or YZ assembly with L-bracket; 5 arc second orthogonality. Alignment to within 5 microns orthogonality for short travel stages.