Description

Design Features

The PRO560LM is part of Aerotech’s second-generation PRO-LM stage series with many improvements and added features. Enhanced positioning specifications, improved stiffness, and competitive pricing make the PRO560LM stage the ideal choice for both medium and highper-formance production applications. The PRO560LM was designed to be used primarily as the lower axis of a PRO560LM/PRO280LM XY stack. The design is also ideal for applications that benefit from a larger support carriage, increased roll stiffness, and higher motor force.

Rugged Mechanical Construction

A long-life recirculating linear guide bearing system and a low-friction sealing solution make the PRO560LM an attractive solution for industrial applications such as laser machining. The basic external construction of the PRO560LM design provides protection from debris while the side-seals prevent dirt and particulates from entering the stage. The curved hard-cover design provides a natural shape that prevents excessive debris from collecting on the stage.

Precision Motion Performance

The PRO560LM series stages are optimized with high-precision, noncontact linear encoders that are protected from debris by the stage sealing system. Precision recirculating linear bearings along with machining and assembly craftsmanship enable excellent geometric performance specifications.

Incremental and absolute encoders are available as standard options and enable minimum incremental motion down to 5 nm and sub-micrometer repeatability. The optional HALAR factory calibration improves positioning accuracy down to ±1 μm.

Accurate Positioning with ThermoComp

Temperature changes and thermal effects are some of the largest error sources in precision machines. All PRO series stages are available with Aerotech’s ThermoComp feature, an embedded temperature compensation unit that guarantees accurate positioning in variable temperature environments. Using this feature protects your process from real-world conditions, even in extreme industrial settings.

Direct-Drive Linear Motor

Aerotech’s high-power U-channel linear motors drive the PRO560LM. The ironless forcer coil provides high force with zero cogging for super-smooth velocity and position control. This ironless design is ideal for applications requiring outstanding contour accuracy and smooth velocity profiling. As with all Aerotech linear motor stages, the linear motor has zero backlash, no windup, zero friction, and excellent dynamic responsiveness.

Design and Integration Flexibility

The PRO560LM is designed with many standard features and options that make the design incredibly flexible and allow it to be easily tailored to a specific application. The PRO560LM is available in eight different models with travels ranging from 300 mm to 1500 mm and speeds up to 2 m/s. Configurable cable management solutions are available for single and multi-axis systems as standard options.

The base mounting holes are accessible from the outside of the stage allowing for easy mounting. Standard mounting holes for both English and metric optical tables are present in all travels. The tabletop is available with both English and metric mounting patterns and can be ordered with brush attachments to clear any debris that may collect on the stage hard cover. Tabletops with hole patterns that allow the direct attachment of Aerotech’s ADRS, ACS-LP, ADRT, ACS, and AGR rotary stages are also available.

The PRO560LM series is also available with cleanroom preparation and vacuum versions.

Specifications

PRO560LM Specifications

PRO560LM 
Travel300400500600800100012001500
Accuracy(1)Standard±10 μm±12 μm±14 μm±15.5 μm±17 μm±18 μm±21 μm±22 μm
Calibrated±1 μm±1 μm±1 μm±1 μm±1.5 μm±1.5 μm±2 μm±2 μm
Resolution (Min.
Incremental Motion)
5 nm (-E1 Encoder), 10 nm (-E3 Encoder)
Bidirectional Repeatability(1)±0.4 μm±0.4 μm±0.4 μm±0.4 μm±0.5 μm±0.5 μm±0.5 μm±0.5 μm
Horizontal Straightness(1)±3 μm±4 μm±5 μm±6 μm±7 μm±8 μm±8.5 μm±9.5 μm
Vertical Straightness(1)±3 μm±4 μm±5 μm±6 μm±7 μm±8 μm±8.5 μm±9.5 μm
Pitch49 μrad
(10.1 arc sec)
60 μrad
(12.4 arc sec)
70 μrad
(14.4 arc sec)
78 μrad
(16.1 arc sec)
90 μrad
(18.6 arc sec)
110 μrad
(22.7 arc sec)
120 μrad
(24.7 arc sec)
130 μrad
(26.8 arc sec)
Roll39 μrad
(8.0 arc sec)
44 μrad
(9.1 arc sec)
53 μrad
(10.9 arc sec)
58 μrad
(12.0 arc sec)
73 μrad
(15.1 arc sec)
87 μrad
(17.9 arc sec)
97 μrad
(20.0 arc sec)
107 μrad
(22.1 arc sec)
Yaw49 μrad
(10.1 arc sec)
60 μrad
(12.4 arc sec)
70 μrad
(14.4 arc sec)
78 μrad
(16.1 arc sec)
90 μrad
(18.6 arc sec)
110 μrad
(22.7 arc sec)
120 μrad
(24.7 arc sec)
130 μrad
(26.8 arc sec)
Maximum Speed(2)2 m/s
Maximum Acceleration(2)3 g
Maximum Force, Continuous532.4 N – Standard
792.6 N – With Air Cooling (20 psig)
Load Capacity(3)Horizontal150 kg
Side150 kg
Moving Mass25.0 kg
Stage Mass90.4 kg99.5 kg108.6 kg117.7 kg135.9 kg154.1 kg172.3 kg199.6 kg
MaterialAnodized Aluminum
MTBF (Mean Time Between Failure)20,000 Hours
  1. Certified with -PL1 option.

  2. Requires the selection of an appropriate amplifier with sufficient voltage and current.

  3. Axis-orientation for on-axis loading is listed.

  4. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Contact factory for multi-axis applications.

Electrical Specifications

Drive SystemBrushless Linear Servomotor
FeedbackNoncontact Encoder
Incremental – 1 Vpp and TTL (0.1 μm) Output
Absolute – EnDat 2.2
Maximum Bus Voltage340 VDC
Limit Switches5 V, Normally Closed
Home SwitchNear Center

Recommended Controller

Multi-AxisA3200Ndrive HLe/Ndrive CP/Ndrive HPe/Npaq
EnsembleEnsemble HLe/Ensemble CP/Ensemble HPe
Single AxisSoloistSoloist CP/Soloist HPe

Dimensions

Ordering Information

PRO560LM Series Linear Motor Stage

Travel (Required)

OptionDescription
-0300300 mm travel stage
-0400400 mm travel stage
-0500500 mm travel stage
-0600600 mm travel stage
-0800800 mm travel stage
-10001000 mm travel stage
-12001200 mm travel stage
-15001500 mm travel stage

Mounting Orientation (Required)

OptionDescription

Normal mounting orientation
-MT1Side-mounted or vertical orientation
-MT2Inverted mounting orientation

Tabletop (Required)

OptionDescription
-TT1Tabletop with metric dimension mounting
-TT2Tabletop with English dimension mounting
-TT3Accessory tabletop with mounting for select rotary stages
-TT4Tabletop with metric dimension mounting and wiper brushes
-TT5Tabletop with English dimension mounting and wiper brushes
-TT6Accessory tabletop with mounting for select rotary stages and wipers
  1. Note: -TT1 or -TT4 tabletop option required for lower axis of XY.

Feedback (Required)

OptionDescription
-E1Incremental encoder, 1 Vpp
-E2Incremental linear encoder, 0.1 μm digital TTL output
-E3Absolute linear encoder, EnDat 2.2

Cable Management (Required)

OptionDescription
-CMS0No external CMS, motor/feedback connector bracket on carriage
-CMS1External CMS for single axis
-CMS2External CMS for lower-axis of two-axis PRO (XY) assembly
-CMS3External CMS for lower-axis of two-axis (XZ or XT) assembly
-CMS6External CMS for lower-axis of three-axis (XYZ or XYT) assembly
-CMS7External CMS for lower-axis of three-axis (XZT) assembly
-CMS9External CMS for lower-axis of four-axis (XYZT) assembly

Lifting Hardware (Optional)

OptionDescription
-LFLifting hardware
  1. Note: Lifting option available on all travels.


ThermoComp (Optional)

OptionDescription
-TCMPThermoComp integrated thermal compensation, single or lower axis
  1. Note: An A3200 controller must be used with the -TCMP option

Metrology (Required)

OptionDescription
-PL0No metrology performance plots
-PL1Metrology, uncalibrated with performance plots
-PL2Metrology, calibrated (HALAR) with performance plots

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

OptionDescription
-TASIntegration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TACIntegration - Test as components
Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.

Accessories (to be ordered as a separate line item)

OptionDescription
ALIGN-NPANon-precision XY assembly
ALIGN-NPAZNon-precision XZ or YZ assembly
ALIGN-PA10XY assembly; 10 arc sec orthogonality. Alignment to within 7 microns orthogonality for short travel stages
ALIGN-PA10ZXZ or YZ assembly with L-bracket; 10 arc second orthogonality. Alignment to within 10 microns orthogonality for short travel stages.
ALIGN-PA5XY assembly; 5 arc sec orthogonality. Alignment to within 3 microns orthogonality for short travel stages.
ALIGN-PA5ZXZ or YZ assembly with L-bracket; 5 arc second orthogonality. Alignment to within 5 microns orthogonality for short travel stages.