Medium-size, high-stiffness design
Rugged mechanical construction
High-performance in a cost-effective package
Direct-drive linear motor for ultra-precise motion
Ten models with travels from 100 mm to 1000 mm
Vacuum and cleanroom versions available
Available with ThermoCompTM for high-performance in changing environments
The PRO190LM is part of Aerotech’s second-generation PRO-LM stage series with many improvements and added features. When higher stiffness, load capacity, and improved geometric performance is required, the PRO190LM is a solid alternative to the PRO165LM. Building on the fundamental precision design of other PRO-LM series stages, the PRO190LM is the ideal choice in many high-performance applications.
A long-life recirculating linear guide bearing system and a low-friction sealing solution make the PRO190LM an attractive solution for industrial applications such as laser machining. The basic external construction of the PRO190LM design provides protection from debris while the side-seals prevent dirt and particulates from entering the stage. The curved hard-cover design provides a natural shape that prevents excessive debris from collecting on the stage.
The PRO190LM series stages are optimized with high-precision, noncontact linear encoders that are protected from debris by the stage sealing system. Precision recirculating linear bearings along with machining and assembly craftsmanship enable excellent geometric performance specifications.
Incremental and absolute encoders are available as standard options and enable minimum incremental motion down to 5 nm and sub-micrometer repeatability. The optional HALAR factory calibration improves positioning accuracy down to ±1 μm.
Temperature changes and thermal effects are some of the largest error sources in precision machines. All PRO series stages are available with Aerotech’s ThermoComp feature, an embedded temperature compensation unit that guarantees accurate positioning in variable temperature environments. Using this feature protects your process from real-world conditions, even in extreme industrial settings.
Aerotech’s high-power U-channel linear motors drive the PRO190LM. The ironless forcer coil provides high force with zero cogging for super-smooth velocity and position control. This ironless design is ideal for applications requiring outstanding contour accuracy and smooth velocity profiling. As with all Aerotech linear motor stages, the linear motor has zero backlash, no windup, zero friction, and excellent dynamic responsiveness.
The PRO190LM is designed with many standard features and options that make the design incredibly flexible and allow it to be easily tailored to a specific application. The PRO190LM is available in 10 different models with travels ranging from 100 mm to 1000 mm and speeds up to 2 m/s. Configurable cable management solutions are available for single and multi-axis systems as standard options.
The base mounting holes are accessible from the outside of the stage allowing for easy mounting. Standard mounting holes for both English and metric optical tables are present in all travels. The tabletop is available with both English and metric mounting patterns and can be ordered with brush attachments to clear any debris that may collect on the stage hard cover. Tabletops with hole patterns that allow the direct attachment of Aerotech’s ADRS, ACS-LP, ADRT, ACS, and AGR rotary stages are also available.
The PRO190LM series is also available with cleanroom preparation and vacuum versions.
Certified with -PL1 option. Requires the selection of an appropriate amplifier with sufficient voltage and current. Axis-orientation for on-axis loading is listed. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Contact factory for multi-axis applications. Note: -TT1 or -TT4 tabletop option required for lower axis of XY. Note: Lifting option only available on travels 400 mm and greater. Lifting should never be ordered on the upper-axis of an XY set (only order on lower-axis). Note: An A3200 controller must be used with the -TCMP option Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.Specifications
PRO190LM Specifications
PRO190LM Travel 100 150 200 250 300 400 500 600 800 1000 Accuracy(1) Standard ±4 µm ±6 µm ±8 µm ±9 μm ±10 µm ±12 μm ±14 μm ±15.5 μm ±17 μm ±18 μm Calibrated ±1 μm ±1 μm ±1 μm ±1 μm ±1 μm ±1 μm ±1 μm ±1 μm ±1.5 μm ±1.5 μm Resolution (Min.
Incremental Motion)5 nm (-E1 Encoder), 10 nm (-E3 Encoder) Bidirectional Repeatability(1) ±0.3 μm ±0.4 μm ±0.4 μm ±0.4 μm ±0.4 μm ±0.4 μm ±0.4 μm ±0.4 μm ±0.5 μm ±0.5 μm Horizontal Straightness(1) ±1.5 μm ±2 μm ±2.5 μm ±3 μm ±3.5 μm ±4.5 μm ±5.5 μm ±6.5 μm ±8 μm ±9.5 μm Vertical Straightness(1) ±1.5 μm ±2 μm ±2.5 μm ±3 μm ±3.5 μm ±4.5 μm ±5.5 μm ±6.5 μm ±8 μm ±9.5 μm Pitch 27 μrad
(5.6 arc sec)29 μrad
(6 arc sec)40 μrad
(8.2 arc sec)45 μrad
(9.3 arc sec)50 μrad
(10.3 arc sec)60 μrad
(12.4 arc sec)70 μrad
(14.4 arc sec)80 μrad
(16.5 arc sec)90 μrad
(18.6 arc sec)110 μrad
(22.7 arc sec)Roll 27 μrad
(5.6 arc sec)29 μrad
(6 arc sec)40 μrad
(8.2 arc sec)45 μrad
(9.3 arc sec)50 μrad
(10.3 arc sec)60 μrad
(12.4 arc sec)70 μrad
(14.4 arc sec)80 μrad
(16.5 arc sec)90 μrad
(18.6 arc sec)110 μrad
(22.7 arc sec)Yaw 27 μrad
(5.6 arc sec)29 μrad
(6 arc sec)40 μrad
(8.2 arc sec)45 μrad
(9.3 arc sec)50 μrad
(10.3 arc sec)60 μrad
(12.4 arc sec)70 μrad
(14.4 arc sec))80 μrad
(16.5 arc sec)90 μrad
(18.6 arc sec)110 μrad
(22.7 arc sec)Maximum Speed(2) 2 m/s Maximum Acceleration(2) 3 g Maximum Force, Continuous 106.7 N – Standard
154.7 – With Air Cooling (20 psig)Load Capacity(3) Horizontal 60 kg Side 60 kg Moving Mass 4.5 kg Stage Mass 14.4 kg 15.6 kg 16.8 kg 18.1 kg 19.3 kg 21.7 kg 24.2 kg 26.6 kg 31.5 kg 36.4 kg Material Aluminum MTBF (Mean Time Between Failure) 20,000 Hours Electrical Specifications
Drive System Brushless Linear Servomotor Feedback Noncontact Encoder
Incremental – 1 Vpp and TTL (0.1 μm) Output
Absolute – EnDat 2.2Maximum Bus Voltage 340 VDC Limit Switches 5 V, Normally Closed Home Switch Near Center Recommended Controller
Multi-Axis A3200 Ndrive HLe/Ndrive CP/Ndrive HPe/Npaq Ensemble Ensemble HLe/Ensemble CP/Ensemble HPe Single Axis Soloist Soloist CP/Soloist HPe Dimensions
Ordering Information
PRO190LM Series Linear Motor Stage
Travel (Required)Option Description -0100 100 mm travel stage -0150 150 mm travel stage -0200 200 mm travel stage -0250 250 mm travel stage -0300 300 mm travel stage -0400 400 mm travel stage -0500 500 mm travel stage -0600 600 mm travel stage -0800 800 mm travel stage -1000 1000 mm travel stage Mounting Orientation (Required)
Option Description Normal mounting orientation -MT1 Side-mounted or vertical orientation -MT2 Inverted mounting orientation Tabletop (Required)
Option Description -TT1 Tabletop with metric dimension mounting -TT2 Tabletop with English dimension mounting -TT3 Accessory tabletop with mounting for select rotary stages -TT4 Tabletop with metric dimension mounting and wiper brushes -TT5 Tabletop with English dimension mounting and wiper brushes -TT6 Accessory tabletop with mounting for select rotary stages and wipers Feedback (Required)
Option Description -E1 Incremental encoder, 1 Vpp -E2 Incremental linear encoder, 0.1 µm digital TTL output -E3 Absolute linear encoder, EnDat 2.2 Cable Management (Required)
Option Description -CMS0 No external CMS, motor/feedback connector bracket on carriage -CMS1 External CMS for single axis -CMS2 External CMS for lower-axis of two-axis PRO (XY) assembly -CMS3 External CMS for lower-axis of two-axis (XZ or XT) assembly -CMS4 External CMS for upper-axis of two-axis PRO (XY) assembly -CMS5 External CMS for upper-axis of two-axis (YZ or YT) assembly -CMS6 External CMS for lower-axis of three-axis (XYZ or XYT) assembly -CMS7 External CMS for lower-axis of three-axis (XZT) assembly -CMS10 External CMS for upper-axis of two-axis PRO225LM XY assembly -CMS11 External CMS for upper-axis of three-axis PRO225LM XYZ/T assembly -CMS12 External CMS for upper-axis of four-axis PRO225LM XYZT assembly Lifting Hardware (Optional)
Option Description -LF Lifting hardware ThermoComp (Optional)
Option Description -TCMP ThermoComp integrated thermal compensation, single or lower axis Metrology (Required)
Option Description -PL0 No metrology performance plots -PL1 Metrology, uncalibrated with performance plots -PL2 Metrology, calibrated (HALAR) with performance plots Integration (Required)
Option Description -TAS Integration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.-TAC Integration - Test as components
Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.Accessories (to be ordered as a separate line item)
Option Description ALIGN-NPA Non-precision XY assembly ALIGN-NPAZ Non-precision XZ or YZ assembly ALIGN-PA10 XY assembly; 10 arc sec orthogonality. Alignment to within 7 microns orthogonality for short travel stages ALIGN-PA10Z XZ or YZ assembly with L-bracket; 10 arc second orthogonality. Alignment to within 10 microns orthogonality for short travel stages. ALIGN-PA5 XY assembly; 5 arc sec orthogonality. Alignment to within 3 microns orthogonality for short travel stages. ALIGN-PA5Z XZ or YZ assembly with L-bracket; 5 arc second orthogonality. Alignment to within 5 microns orthogonality for short travel stages.