Description

Design Features

• Improved second-generation design

• Rugged mechanical construction

• High-performance in a cost-effective package

• Direct-drive linear motor for ultra-precise motion

• Ten models with travels from 100 mm to 1000 mm

• Vacuum and cleanroom versions available

• Available with ThermoComp^TM for high-performance in changing environments

The PRO165LM is part of Aerotech’s second-generation PRO-LM stage series with many improvements and added features. Enhanced positioning specifications, improved stiffness, and competitive pricing make the PRO165LM stage the ideal choice for both medium and high-performance production applications. The design is similar to the PRO115LM series, providing additional load capacity and stiffness with larger bearings and a wider cross-section.

Rugged Mechanical Construction

A long-life recirculating linear guide bearing system and a low-friction sealing solution make the PRO165LM an attractive solution for industrial applications such as laser machining. The basic external construction of the PRO165LM design provides protection from debris while the side-seals prevent dirt and particulates from entering the stage. The curved hard-cover design provides a natural shape that prevents excessive debris from collecting on the stage.

Precision Motion Performance

The PRO165LM series stages are optimized with high-precision, noncontact linear encoders that are protected from debris by the stage sealing system. Precision recirculating linear bearings along with machining and assembly craftsmanship enable excellent geometric performance specifications.

Incremental and absolute encoders are available as standard options and enable minimum incremental motion down to 5 nm and sub-micrometer repeatability. The optional HALAR factory calibration improves positioning accuracy down to ±1 μm.

Direct-Drive Linear Motor

Aerotech’s high-power U-channel linear motors drive the PRO165LM. The ironless forcer coil provides high force with zero cogging for super-smooth velocity and position control. This ironless design is ideal for applications requiring outstanding contour accuracy and smooth velocity profiling. As with all Aerotech linear motor stages, the linear motor has zero backlash, no windup, zero friction, and excellent dynamic responsiveness.

Accurate Positioning with ThermoComp

Temperature changes and thermal effects are some of the largest error sources in precision machines. All PRO series stages are available with Aerotech’s ThermoComp feature, an embedded temperature compensation unit that guarantees accurate positioning in variable temperature environments. Using this feature protects your process from real-world conditions, even in extreme industrial settings.

Design and Integration Flexibility

The PRO165LM is designed with many standard features and options that make the design incredibly flexible and allow it to be easily tailored to a specific application. The PRO165LM is available in 10 different models with travels
ranging from 100 mm to 1000 mm and speeds up to 2 m/s. Configurable cable management solutions are available for single and multi-axis systems as standard options.

The base mounting holes are accessible from the outside of the stage allowing for easy mounting. Standard mounting holes for both English and metric optical tables are present in all travels. The tabletop is available with both English and metric mounting patterns and can be ordered with brush attachments to clear any debris that may collect on the stage hard cover. Tabletops with hole patterns that allow the direct attachment of Aerotech’s ADRS, ACS-LP, ADRT, ACS, and AGR rotary stages are also available.

The PRO165LM series is also available with cleanroom preparation and vacuum versions.

Specifications

PRO165LM Specifications

1. Certified with -PL1 option.

2. Requires the selection of an appropriate amplifier with sufficient voltage and current.

3. Axis-orientation for on-axis loading is listed.

4. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Contact factory for multi-axis applications.

Electrical Specifications

Recommended Controller

Dimensions

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Ordering Information

PRO165LM Series Linear Motor Stage

Travel (Required)

Mounting Orientation (Required)

Tabletop (Required)

1. Note: -TT1 or -TT4 tabletop option required for lower axis of XY.

Feedback (Required)

Cable Management (Required)

Lifting Hardware (Optional)

1. Note: Lifting option only available on travels 400 mm and greater. Lifting should never be ordered on the upper-axis of an XY set (only order on lower-axis).

ThermoComp (Optional)

1. Note: An A3200 controller must be used with the -TCMP option

Metrology (Required)

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

Accessories (to be ordered as a separate line item)