Description

Design Features

The ALS130H, with its sub-nanometer resolution, superior bidirectional repeatability and exceptional low-velocity performance, is the unparalleled solution for high performance test, measurement, inspection and other demanding applications.

Linear Motor Drive

Unlike many stages that utilize a side-drive lead screw, the ALS130H employs a center-driven, non-cogging linear motor as the driving element. Since the linear motor is a direct-drive device there is no backlash, windup or "stiction" that is normally associated with a lead screw or ball-screw drive.

The linear motor drive also offers the advantage of higher speeds and accelerations. The compact yet powerful linear motor drives the ALS130H to a peak unloaded acceleration of 1 g and a maximum velocity of 300 mm/s. The result is a high-performance stage with outstanding throughput that significantly outperforms comparable high-accuracy screw-driven stages.

Exceptional Resolution

For alignment applications, outstanding step-to-step resolution is critical. The ALS130H meets this demand with a resolution of 0.5 nm when coupled with Aerotech controls.

The direct-drive linear motor allows the ALS130H to make precise, small resolution steps. This is particularly important in alignment applications where step accuracy is critical. Furthermore, the linear motor and high resolution encoder system also provide excellent in-position stability.

Superior Geometry

Aerotech's ultra-stiff construction and compact two-piece design result in a stage with unmatched geometric tolerances. As a result, straightness and flatness for the standard stage is <±1 μm over the entire travel.

Smooth Travel

Designed for smooth, vibration-free motion, the ALS130H utilizes precision anti-cage-creep crossed-roller bearings for outstanding smoothness of motion. Since neither the bearing system nor the drive system utilize any recirculating elements, the ALS130H exhibits the outstanding ripple-free motion required for scanning and inspection applications.

Designed for Long Life

Like all stages in the Aerotech product family, the ALS130H was designed for outstanding long-term performance. Both the linear motor and linear encoder are noncontact devices - they not only exhibit long-life, but are totally maintenance free. A moving magnet track design eliminates the need for cable management, further improving long-term reliability.

Precision Alignment

ALS130H series stages are easily configured as XY assemblies. Options include precision orthogonality alignment to 5 arc seconds and available vertical axis solutions.

Specifications

ALS130H Specifications

ModelALS130H-025ALS130H-050ALS130H-100ALS130H-150
Travel25 mm50 mm100 mm150 mm
Drive SystemLinear Brushless Servomotor (BLMUC-95-A)
Bus VoltageUp to 80 VDC
Continuous CurrentApk2.94
Arms2.08
FeedbackNoncontact Linear Encoder
Resolution (Minimum Incremental Motion)0.5 nm - 1.0 µm
Maximum Travel Speed(1)300 mm/s
Maximum Linear Acceleration1 g (No Load)
Maximum Load(2)Horizontal12.0 kg
Side10.0 kg
AccuracyCalibrated(3)±0.3 µm
Uncalibrated±1.0 µm±1.0 µm±2.0 µm±3.0 µm
RepeatabilityMean75 nm
Peak to Peak±100 nm
Straightness and FlatnessMaximum Deviation±1.0 µm±1.0 µm±1.5 µm±2.0 µm
Pitch5 arc sec6 arc sec8 arc sec10 arc sec
Roll5 arc sec6 arc sec8 arc sec10 arc sec
Yaw3 arc sec3 arc sec4 arc sec5 arc sec
Nominal Stage Weight3.0 kg3.0 kg3.8 kg4.6 kg
Moving Mass0.9 kg1.1 kg1.3 kg1.6 kg
ConstructionAluminum Body/Black Anodize Finish

  1. Maximum speed based on stage capability. Maximum application velocity may be limited by system data rate and system resolution.

  2. Maximum load based on bearing capability. Maximum application load may be limited by acceleration requirements.

  3. Available with Aerotech controllers.

  4. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.

Dimensions

Ordering Information

ALS130H Mechanical-Bearing Direct-Drive Linear Stage

Travel (Required)

OptionDescription
-02525 mm travel stage with high-accuracy 1 Vpp encoder and single 25-pin connector
-05050 mm travel stage with high-accuracy 1 Vpp encoder and single 25-pin connector
-100100 mm travel stage with high-accuracy 1 Vpp encoder and single 25-pin connector
-150150 mm travel stage with high-accuracy 1 Vpp encoder and single 25-pin connector

  1. Note: The 25-pin connector is not valid for systems using bus voltages greater than 80 V.

Cable Management (Optional)

OptionDescription
-CMS1External CMS for lower-axis of XY assembly, right-side
-CMS2External CMS for lower-axis of XY assembly, left-side

Note: CMS option not available with 25 mm travel stages. Order CMS with lower axis stage only.

Metrology (Required)

OptionDescription
-PL1Metrology, uncalibrated with performance plots
-PL2Metrology, calibrated (HALAR) with performance plots

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

OptionDescription
-TASIntegration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TACIntegration - Test as components
Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.