Description

Design Features

The ANT130L series stages offer nanometer-level performance in travels up to 160 mm. With its low profile and outstanding performance characteristics, the ANT130L is the ultimate solution for high-accuracy alignment, inspection, positioning, and measurement stations.

Noncontact Direct-Drive

The linear motor drive also offers the advantage of higher speeds and accelerations. The compact yet powerful linear motor drives the ANT130L to a peak unloaded acceleration of 1 g and a maximum velocity of 350 mm/s. The result is a high-accuracy device with outstanding throughput that significantly outperforms comparable high-accuracy screw-driven or other stages in its class.

Outstanding Resolution

For alignment applications, outstanding step-to-step resolution is critical. The ANT130L meets this demand with an incremental step size of 1 nm when coupled with Aerotech drives and controls. The direct-drive linear motor allows the ANT130L to make precise, small resolution steps. This is particularly important in alignment applications where step accuracy is critical.

Designed for Long Life

Like all stages in the Aerotech product family, the ANT130L was designed for outstanding long-term performance. Both the linear motor and linear encoder are noncontact devices, which means they not only exhibit long-life but are totally maintenance free.

Precision Alignment

ANT130L series stages are easily configured as XY assemblies. Options include precision orthogonality alignment to 5 arc seconds and vertical axis solutions.

Specifications

Mechanical Specifications

ModelANT130L-035ANT130L-060
Travel35 mm60 mm
Accuracy(1)Basic±2 µm±2 µm
PLUS±250 nm±250 nm
Resolution (Minimum Incremental Motion)1 nm1 nm
Repeatability (Bidirectional)(1)Basic±100 nm±100 nm
PLUS±75 nm±75 nm
Repeatability (Unidirectional)±25 nm±25 nm
Straightness(1)±1.0 µm±1.0 µm
Flatness(1)±1.0 µm±1.0 µm
Pitch10 arc sec10 arc sec
Roll10 arc sec10 arc sec
Yaw5 arc sec5 arc sec
Maximum Speed350 mm/s350 mm/s
Maximum Acceleration1 g (No Load)1 g (No Load)
Speed StabilitySee graph for typical performance
Settling TimeSee graph for typical performance
In-Position Stability(2)<1 nm<1 nm
Maximum Force (Continuous)23 N23 N
Load Capacity(3)Horizontal12.0 kg12.0 kg
Side10 kg10 kg
Moving Mass1.2 kg1.4 kg
Stage Mass2.1 kg2.5 kg
MaterialAluminum Body/Black Hardcoat Finish
MTBF (Mean Time Between Failure)30,000 Hours
  1. Certified with each stage.

  2. In-Position Jitter listing is 3 sigma value.

  3. Axis orientation for on-axis loading is listed.

ModelANT130L-110ANT130L-160
Travel110 mm160 mm
Accuracy(1)Basic±3 µm±4 µm
PLUS±300 nm±300 nm
Resolution (Minimum Incremental Motion)1 nm1 nm
Repeatability (Bidirectional)(1)Basic±100 nm±100 nm
PLUS±75 nm±75 nm
Repeatability (Unidirectional)±25 nm±25 nm
Straightness(1)±1.0 µm±1.5 µm
Flatness(1)±1.0 µm±1.5 µm
Pitch10 arc sec10 arc sec
Roll10 arc sec10 arc sec
Yaw5 arc sec5 arc sec
Maximum Speed350 mm/s350 mm/s
Maximum Acceleration1 g (No Load)1 g (No Load)
Speed StabilitySee graph for typical performance
Settling TimeSee graph for typical performance
In-Position Stability(2)<1 nm<1 nm
Maximum Force (Continuous)23 N23 N
Load Capacity(3)Horizontal12.0 kg12.0 kg
Side10 kg10 kg
Moving Mass1.9 kg2.3 kg
Stage Mass3.3 kg3.9 kg
MaterialAluminum Body/Black Hardcoat Finish
MTBF (Mean Time Between Failure)30,000 Hours
  1. Certified with each stage.

  2. In-Position Jitter listing is 3 sigma value.

  3. Axis orientation for on-axis loading is listed.

Electrical Specifications

Drive SystemBrushless Linear Servomotor
FeedbackNoncontact Linear Encoder
Maximum Bus Voltage320 VDC (-4DU-25DU), 80 VDC (-25DU)
Limit Switches5 V, Normally Closed
Home SwitchNear Center

Recommended Controller

Multi-AxisA3200Npaq MXR 
Npaq MR-MXH 
Ndrive ML-MXH
EnsembleEpaq MXH 
Epaq MR-MXH 
Ensemble ML-MXH
Single AxisSoloistSoloist ML-MXH
  1. Linear amplifiers are required to achieve the listed specifications. Other options are available.

Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25°C/24 hours. If this is not possible, alternate products are available. Please consult Aerotech for more information.

Dimensions

Ordering Information

ANT130L Single-Axis Direct-Drive Nanopositioning Stage

Travel (Required)

OptionDescription
-03535 mm travel
-06060 mm travel
-110110 mm travel
-160160 mm travel

Connectors (Required)

OptionDescription
-CN1Single 25-pin D connector, 25DU
-CN2Two connectors, 4-pin HPD and 25-pin D, 4DU-25DU
  1. Note: CN1 option not valid for systems using bus voltages greater than 80 V

Mounting Plate (Optional)

OptionDescription
-MPMounting plate

Performance Grade (Required)

OptionDescription
-PL1Base Performance
-PL2High-Accuracy Performance, PLUS

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

OptionDescription
-TASIntegration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TACIntegration - Test as components
Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.