Nanometer-level performance in a large travel format
High resolution (1 nm), repeatability (75 nm) and accuracy (250 nm)
In-position stability of <1 nm
Anti-creep crossed-roller bearings
High dynamic performance
Large selection - 8 models in travel and accuracy
The ANT130L series stages offer nanometer-level performance in travels up to 160 mm. With its low profile and outstanding performance characteristics, the ANT130L is the ultimate solution for high-accuracy alignment, inspection, positioning, and measurement stations.
The linear motor drive also offers the advantage of higher speeds and accelerations. The compact yet powerful linear motor drives the ANT130L to a peak unloaded acceleration of 1 g and a maximum velocity of 350 mm/s. The result is a high-accuracy device with outstanding throughput that significantly outperforms comparable high-accuracy screw-driven or other stages in its class.
For alignment applications, outstanding step-to-step resolution is critical. The ANT130L meets this demand with an incremental step size of 1 nm when coupled with Aerotech drives and controls. The direct-drive linear motor allows the ANT130L to make precise, small resolution steps. This is particularly important in alignment applications where step accuracy is critical.
Like all stages in the Aerotech product family, the ANT130L was designed for outstanding long-term performance. Both the linear motor and linear encoder are noncontact devices, which means they not only exhibit long-life but are totally maintenance free.
ANT130L series stages are easily configured as XY assemblies. Options include precision orthogonality alignment to 5 arc seconds and vertical axis solutions.
Certified with each stage. In-Position Jitter listing is 3 sigma value. Axis orientation for on-axis loading is listed. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of combined multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications. -PLUS requires the use of an Aerotech controller. Certified with each stage. In-Position Jitter listing is 3 sigma value. Axis orientation for on-axis loading is listed. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of combined multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications. -PLUS requires the use of an Aerotech controller. Linear amplifiers are required to achieve the listed specifications. Other options are available. Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25°C/24 hours. If this is not possible, alternate products are available. Please consult Aerotech for more information. Note: CN1 option not valid for systems using bus voltages greater than 80 V Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.Specifications
Mechanical Specifications
Model ANT130L-035 ANT130L-060 Travel 35 mm 60 mm Accuracy(1) Basic ±2 µm ±2 µm PLUS ±250 nm ±250 nm Resolution (Minimum Incremental Motion) 1 nm 1 nm Repeatability (Bidirectional)(1) Basic ±100 nm ±100 nm PLUS ±75 nm ±75 nm Repeatability (Unidirectional) ±25 nm ±25 nm Straightness(1) ±1.0 µm ±1.0 µm Flatness(1) ±1.0 µm ±1.0 µm Pitch 10 arc sec 10 arc sec Roll 10 arc sec 10 arc sec Yaw 5 arc sec 5 arc sec Maximum Speed 350 mm/s 350 mm/s Maximum Acceleration 1 g (No Load) 1 g (No Load) Speed Stability See graph for typical performance Settling Time See graph for typical performance In-Position Stability(2) <1 nm <1 nm Maximum Force (Continuous) 23 N 23 N Load Capacity(3) Horizontal 12.0 kg 12.0 kg Side 10 kg 10 kg Moving Mass 1.2 kg 1.4 kg Stage Mass 2.1 kg 2.5 kg Material Aluminum Body/Black Hardcoat Finish MTBF (Mean Time Between Failure) 30,000 Hours Model ANT130L-110 ANT130L-160 Travel 110 mm 160 mm Accuracy(1) Basic ±3 µm ±4 µm PLUS ±300 nm ±300 nm Resolution (Minimum Incremental Motion) 1 nm 1 nm Repeatability (Bidirectional)(1) Basic ±100 nm ±100 nm PLUS ±75 nm ±75 nm Repeatability (Unidirectional) ±25 nm ±25 nm Straightness(1) ±1.0 µm ±1.5 µm Flatness(1) ±1.0 µm ±1.5 µm Pitch 10 arc sec 10 arc sec Roll 10 arc sec 10 arc sec Yaw 5 arc sec 5 arc sec Maximum Speed 350 mm/s 350 mm/s Maximum Acceleration 1 g (No Load) 1 g (No Load) Speed Stability See graph for typical performance Settling Time See graph for typical performance In-Position Stability(2) <1 nm <1 nm Maximum Force (Continuous) 23 N 23 N Load Capacity(3) Horizontal 12.0 kg 12.0 kg Side 10 kg 10 kg Moving Mass 1.9 kg 2.3 kg Stage Mass 3.3 kg 3.9 kg Material Aluminum Body/Black Hardcoat Finish MTBF (Mean Time Between Failure) 30,000 Hours Electrical Specifications
Drive System Brushless Linear Servomotor Feedback Noncontact Linear Encoder Maximum Bus Voltage 320 VDC (-4DU-25DU), 80 VDC (-25DU) Limit Switches 5 V, Normally Closed Home Switch Near Center Recommended Controller
Multi-Axis A3200 Npaq MXR
Npaq MR-MXH
Ndrive ML-MXHEnsemble Epaq MXH
Epaq MR-MXH
Ensemble ML-MXHSingle Axis Soloist Soloist ML-MXH Dimensions
Ordering Information
ANT130L Single-Axis Direct-Drive Nanopositioning Stage
Travel (Required)
Option Description -035 35 mm travel -060 60 mm travel -110 110 mm travel -160 160 mm travel Connectors (Required)
Option Description -CN1 Single 25-pin D connector, 25DU -CN2 Two connectors, 4-pin HPD and 25-pin D, 4DU-25DU Mounting Plate (Optional)
Option Description -MP Mounting plate Performance Grade (Required)
Option Description -PL1 Base Performance -PL2 High-Accuracy Performance, PLUS Integration (Required)
Option Description -TAS Integration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.-TAC Integration - Test as components
Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.