Description

Design Features

Nanometer-level performance in a large travel format
High resolution (1 nm), repeatability (75 nm) and accuracy (250 nm)
In-position stability of <1 nm
Anti-creep crossed-roller bearings
High dynamic performance

Introduction

Aerotech’s ANT95L series stages are the world’s first nanometer-level positioning systems with greater than 25 mm travel. The ANT95L and ANT95L-PLUS crossed-roller stages are the best-in-class in combining speed, accuracy, resolution, repeatability, reliability and size, and are offered in two accuracy grades. These linear stages exhibit up to 5 g acceleration, 500 mm/s velocity, enhanced load capacity and are available with standardized, universal base mounting patterns that allow their use in a wide range of configurations.

Noncontact Direct-Drive

Only noncontact direct-drive technology offers the robust, accurate and high-speed positioning necessary for mass production of precision devices. ANT95L stages utilize advanced direct-drive technology pioneered by Aerotech to achieve the highest level of positioning performance. This direct-drive technology is high-performance, non-cogging, noncontact, high-speed, high-resolution and high-accuracy. The unique drive and bearing combination, packaged in an extremely small-profile and footprint, offers tangible advantages in many applications such as high-precision positioning, disk-drive fabrication, fiber alignment, optical delay element actuation, sensor testing and scanning processes that demand smooth and precise motion.

Flexible System Design

The ANT95L family has universal mounting and tabletop patterns that allow for easy system integration. Two, three or more axes can be easily combined for flexible system designs and multi-axis configurations.

System Characteristics

Outstanding accuracy, position repeatability and in-position stability require high system resolution. The ANT95L stage’s industry-leading 1 nm minimum incremental step size provides this high level of performance. Aerotech’s direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion.

Specifications

Mechanical Specifications

Model		ANT95L-025	ANT95L-050
Travel		25 mm	50 mm
Accuracy⁽¹⁾	Base	±2.5 µm (±100 µin)	±2.5 µm (±100 µin)
Accuracy⁽¹⁾	PLUS	±250 nm (±10 µin)	±250 nm (±10 µin)
Resolution (Minimum Incremental Motion)		1 nm (0.04 µin)	1 nm (0.04 µin)
Repeatability (Bidirectional)⁽¹⁾	Base	±100 nm (±4 µin)	±100 nm (±4 µin)
Repeatability (Bidirectional)⁽¹⁾	PLUS	±75 nm (±3 µin)	±75 nm (±3 µin)
Repeatability (Unidirectional)		±25 nm (±1 µin)	±25 nm (±1 µin)
Straightness⁽¹⁾		±1.0 µm (±40 µin)	±1.0 µm (±40 µin)
Flatness⁽¹⁾		±1.0 µm (±40 µin)	±1.0 µm (±40 µin)
Pitch		10 arc sec	10 arc sec
Roll		10 arc sec	10 arc sec
Yaw		5 arc sec	5 arc sec
Maximum Speed		500 mm/s (20 in/s)	500 mm/s (20 in/s)
Maximum Acceleration		5 g (no load)	4 g (no load)
Speed Stability		See graph for typical performance
Settling Time		See graph for typical performance
In-Position Stability⁽²⁾		<1 nm (<0.04 µin)	<1 nm (<0.04 µin)
Maximum Force (Continuous)		7.75 N	9.5 N
Load Capacity⁽³⁾	Horizontal	5.0 kg (11 lb)	7.0 kg (15.4 lb)
Load Capacity⁽³⁾	Side	5.0 kg (11 lb)	5.0 kg (11 lb)
Moving Mass		0.46 kg (1.0 lb)	0.52 kg (1.1 lb)
Stage Mass		0.8 kg (1.8 lb)	1.2 kg (2.7 lb)
Material		Aluminum body/black hardcoat finish
MTBF (Mean Time Between Failure)		30,000 hours

Certified with each stage.
In-Position Jitter listing is 3 sigma value.
Axis orientation for on-axis loading is listed.

Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of combined multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
-PLUS requires the use of an Aerotech controller.

Model		ANT95L-075	ANT95L-100
Travel		75 mm	100 mm
Accuracy⁽¹⁾	Base	±4.0 µm (±160 µin)	±5.0 µm (±200 µin)
Accuracy⁽¹⁾	PLUS	±275 nm (±11 µin)	±275 nm (±11 µin)
Resolution (Minimum Incremental Motion)		1 nm (0.04 µin)	1 nm (0.04 µin)
Repeatability (Bidirectional)⁽¹⁾	Base	±100 nm (±4 µin)	±100 nm (±4 µin)
Repeatability (Bidirectional)⁽¹⁾	PLUS	±75 nm (±3 µin)	±75 nm (±3 µin)
Repeatability (Unidirectional)		±25 nm (±1 µin)	±25 nm (±1 µin)
Straightness⁽¹⁾		±2.0 µm (±80 µin)	±2.5 µm (±80 µin)
Flatness⁽¹⁾		±2.0 µm (±80 µin)	±2.5 µm (±80 µin)
Pitch		10 arc sec	10 arc sec
Roll		10 arc sec	10 arc sec
Yaw		5 arc sec	5 arc sec
Maximum Speed		500 mm/s (20 in/s)	500 mm/s (20 in/s)
Maximum Acceleration		3 g (no load)	3 g (no load)
Speed Stability		See graph for typical performance
Settling Time		See graph for typical performance
In-Position Stability⁽²⁾		<1 nm (<0.04 µin)	<1 nm (<0.04 µin)
Maximum Force (Continuous)		9.5 N	12.9 N
Load Capacity⁽³⁾	Horizontal	7.0 kg (15.4 lb)	7.0 kg (15.4 lb)
Load Capacity⁽³⁾	Side	5.0 kg (11 lb)	5.0 kg (11 lb)
Moving Mass		0.72 kg (1.6 lb)	0.91 kg (2.0 lb)
Stage Mass		1.64 kg (3.6 lb)	2.1 kg (4.6 lb)
Material		Aluminum body/black hardcoat finish
MTBF (Mean Time Between Failure)		30,000 hours

Certified with each stage.
In-Position Jitter listing is 3 sigma value.
Axis orientation for on-axis loading is listed.

Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of combined multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
-PLUS requires the use of an Aerotech controller.

Electrical Specifications	ANT95L
Drive System	Brushless Linear Servomotor
Feedback	Noncontact Linear Encoder
Maximum Bus Voltage	±40 VDC
Limit Switches	5 V, Normally Closed
Home Switch	Near Center

Recommended Controller		ANT95L
Multi-Axis	A3200	Npaq MXR Npaq MR-MXH Npaq ML-MXH
Multi-Axis	Ensemble	Epaq MXH Epaq MR-MXH Ensemble ML-MXH
Single Axis	Soloist	Soloist ML-MXH

Linear amplifiers are required to achieve the listed specifications. Other options are available.

Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25°C/24 hours. If this is not possible, alternate products are available. Please consult Aerotech for more information.

Step Plot
Performance Graphs

Ordering Information

ANT95L Single-Axis Linear Direct-Drive Nanopositioning Stage

Travel (Required)

Option	Description
-025	25 mm travel
-050	50 mm travel
-075	75 mm travel
-100	100 mm travel

Mounting Plate (Optional)

Option	Description
-MP	Mounting plate

Performance Grade (Required)

Option	Description
-PL1	Base performance
-PL2	High-accuracy performance, PLUS

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

Option	Description
-TAS	Integration - Test as system Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TAC	Integration - Test as components Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.