Description

Design Features

The ABL2000 combines excellent pitch/yaw characteristics with the unsurpassed velocity control that is necessary for printing, imaging, semiconductor and photonic applications.

Air-Bearing Design

By utilizing a magnetic preload, the ABL2000 features a smaller cross-section than typical air-bearing stages without sacrificing load capability. The large air-bearing surfaces provide excellent stiffness, allowing for heavy loading. Proprietary manufacturing techniques result in a stage with unsurpassed pitch, roll and yaw characteristics. Manufactured in Aerotech’s state-of-the-art production facility, the ABL2000 is machined with exacting tolerances that are unachievable by conventional methods.

Linear Motor Drive

The driving force behind this stage is Aerotech’s BLMC brushless linear servomotor. The BLMC utilizes an ironless forcer, which means there is zero cogging and no attractive forces – resulting in unrivaled smoothness of motion. Since the stage is friction-free and the motor has zero cogging, extremely fine resolutions are achievable.

Zero Maintenance

The noncontact air bearing, noncontact linear motor drive and noncontact feedback device ensure years of maintenance-free operation at the high performance levels that are expected of Aerotech equipment. Because there is no mechanical contact between moving elements, the ABL2000 experiences no wear or reduction in performance over time. Service life is virtually unlimited, and since there is no lubrication – only clean, dry gas – air bearings are ideal for clean room and medical applications.

Cable Management

Years of research have resulted in what is universally considered to be the best cable management system (CMS) in the industry. We carefully optimize the cable bend radius and utilize only the highest quality cable to ensure years of trouble-free operation. In the unlikely event of failure, Aerotech’s modular design makes cable replacement quick and easy with minimal downtime. To facilitate integration into the final system, we include all customer-required cables, air hoses, etc. in our CMS bundle. Both ends are fully connectorized for simple integration into the customer’s machine. High flex ribbon cable versions are also available.

Specifications

ABL2000 Specifications

Mechanical SpecificationsABL2000-0100ABL2000-0200ABL2000-0300ABL2000-0400
Total Travel100 mm200 mm300 mm400 mm
Motor TypeLinear Brushless Servomotor
Bus Voltage80 VDC
FeedbackNoncontact Linear Encoder
Maximum Speed(1)2 m/s
Maximum Acceleration2 g (No Load)
Maximum Load(2)50.0 kg
Accuracy-E1 EncoderCalibrated(3)±0.5 µm±0.75 µm
Standard±4.0 µm±8.0 µm±11.5 µm±14.0 µm
-E4 EncoderCalibrated(3)±0.5 µm±0.75 µm
Standard±5.0 µm
Repeatability-E1 Encoder±0.2 µm±0.3 µm
-E4 Encoder±0.2 µm±0.3 µm
Straightness and FlatnessMaximum Deviation±0.25 µm±0.40 µm±0.75 µm±1.5 µm
Pitch/Roll/Yaw1 arc sec2 arc sec3 arc sec4 arc sec
Nominal Stage Mass30.0 kg34.5 kg39.5 kg44.0 kg
Operating Pressure(4)80 psig ±5 psig
Air Consumption(5)19.8 SLPM (0.7 SCFM) (Single Axis)
Moving Mass9 kg
MaterialAluminum
FinishHard Coating (62 Rockwell Hardness)
  1. Maximum speed based on stage capability; maximum application velocity may be limited by system data rate and system resolution.

  2. Maximum load based on bearing capability; maximum application load may be limited by acceleration requirements.

  3. Available with Aerotech controllers.

  4. To protect air bearing against under-pressure, an in-line pressure switch tied to the motion controller/amplifier E-Stop is recommended.

  5. Air supply must be clean, dry to 0° F dew point and filtered to 0.25 µm or better; recommend nitrogen at 99.9% purity.


Mechanical SpecificationsABL2000-0500ABL2000-0750ABL2000-1000
Total Travel500 mm750 mm1000 mm
Motor TypeLinear Brushless Servomotor
Bus Voltage80 VDC
FeedbackNoncontact Linear Encoder
Maximum Speed(1)2 m/s
Maximum Acceleration2 g (No Load)
Maximum Load(2)50.0 kg
Accuracy-E1 EncoderCalibrated(3)±0.75 µm±1 µm
Uncalibrated±15.75 µm±18.5 µm±20.0 µm
-E4 EncoderCalibrated(3)±0.75 µm±1 µm
Uncalibrated±5.0 µm
Repeatability-E1 Encoder±0.3 µm±0.4 µm
-E4 Encoder±0.3 µm±0.4 µm
Straightness and FlatnessMaximum Deviation±2.0 µm±3.0 µm±4.0 µm
Pitch/Roll/Yaw5 arc sec7.5 arc sec10 arc sec
Nominal Stage Mass49.0 kg61.0 kg72.5 kg
Operating Pressure(4)80 psig ±5 psig
Air Consumption(5)19.8 SLPM (0.7 SCFM) (Single Axis)
Moving Mass9 kg
MaterialAluminum
FinishHard Coating (62 Rockwell Hardness)
  1. Maximum speed based on stage capability; maximum application velocity may be limited by system data rate and system resolution.

  2. Maximum load based on bearing capability; maximum application load may be limited by acceleration requirements.

  3. Available with Aerotech controllers.

  4. To protect air bearing against under-pressure, an in-line pressure switch tied to the motion controller/amplifier E-Stop is recommended.

  5. Air supply must be clean, dry to 0° F dew point and filtered to 0.25 µm or better; recommend nitrogen at 99.9% purity.

Dimensions

Ordering Information

ABL2000 Air-Bearing Direct-Drive Linear Stage

Travel (Required)

OptionDescription
-0100100 mm travel
-0200200 mm travel
-0300300 mm travel
-0400400 mm travel
-0500500 mm travel
-0750750 mm travel
-10001000 mm travel

Feedback (Required)

OptionDescription
-E1Incremental linear encoder; 1 Vpp amplified sine output
-E2Incremental linear encoder; 1.0 µm digital TTL output
-E4High-accuracy incremental linear encoder; 1 Vpp amplified sine output

Cable Management (Optional)

OptionDescription
-CMS1Cable management system for lower-axis of XY assembly
-CMS2Cable management system for upper-axis of XY assembly

Metrology (Required)

OptionDescription
-PL1Metrology, uncalibrated with performance plots
-PL2Metrology, calibrated (HALAR) with performance plots

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

OptionDescription
-TASIntegration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TACIntegration - Test as components
Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.

Accessories (to be ordered as separate line item)

OptionDescription
ABFAir-bearing filtration kit