出色的延迟灵敏度和双向重复定位精度
低轴向角便宜
易用(可提供图形控制软件和Labview例程
型号 | DL125 | DL225 | DL325 |
---|---|---|---|
行程范围 | 125 mm | 225 mm | 325 mm |
最大速度 | 500 mm/s | 500 mm/s | 500 mm/s |
最小位移增量 | 0.075 µm | 0.075 µm | 0.075 µm |
最大加速度 | 7,500 mm/s2 | 7,500 mm/s2 | 7,500 mm/s2 |
精度,保证值 | ±1.5 µm | ±2.0 µm | ±2.5 µm |
双向重复精度,保证值 | ±0.15 µm | ±0.15 µm | ±0.15 µm |
俯仰,典型值 | ±60 µrad | ±60 µrad | ±90 µrad |
俯仰,保证值 | ±100 µrad | ±100 µrad | ±150 µrad |
偏摆,典型值 | ±30 µrad | ±40 µrad | ±50 µrad |
偏摆,保证值 | ±60 µrad | ±90 µrad | ±120 µrad |
限位开关 | Optical | Optical | Optical |
原点 | Optical, on encoder’s fiducial track, located at the minus end of travel | Optical, on encoder’s fiducial track, located at the minus end of travel | Optical, on encoder’s fiducial track, located at the minus end of travel |
原点重复精度 | 0.4 µm | 0.4 µm | 0.4 µm |
电缆长度 | 3 m | 3 m | 3 m |
重量 | 2.8 kg | 3.8 kg | 4.8 kg |
MTBF | 20,000 hours | 20,000 hours | 20,000 hours |
RoHS | Compliant | Compliant | Compliant |
Compatible with Windows 7 and up
Dual unit display (mm and psec)
User defined scan sequence
Absolute and relative moves, jog mode
Precision position feedback is provided by a linear glass scale encoder mounted inside the stage. The encoder signals are interpolated by integrated motion controller with nanometer resolution for outstanding position sensitivity, repeatability and stability.
<0.2 s step and settle for short moves.
To facilitate setup, beam kits consisting of retroreflectors, mirrors, mounts, and other optomechanical parts, are available to suit various wavelengths and delay line configurations.
Stage has been designed to be mounted on standard breadboards (with a 0.2 mm flatness). Padding minimizes the effect of the table to pitch, yaw and roll performance of the stage. To reach the specifications stated, stages must be fixed on a plane surface with a flatness of 5 μm with washer under each fixing screw head (max. tightening torque for mounting screws: 3 Nm)
Clamps allow for locating the stage where the std hole pattern is not available. Suggested base clamps are BC-5 and BC-6.