The 20QE20LL.55 is a Long Lived Deep UV Excimer Laser Mirror, 50.8 mm in diameter, 9.53mm thick, and is coated for 193 nm, optimized for 45° angle of incidence.

Long Lived Deep UV Mirrors are manufactured using high purity Excimer grade fused silica substrates and ultra hard dielectric coatings. Meticulous production procedures guarantee they will withstand greater than 30 Billion pulses. The coating is highly durable and will withstand repeated cleaning.

• 波长区域

  UV

• 波长范围

  193 nm

• 镜片形状

  Round

• 直径

  50.8 mm  

• 材料

  UV Excimer Grade Fused Silica

• 镀膜类型

  Low Loss Dielectric

• 镀膜代码

  LL.55

• 表面质量

  10-5 scratch-dig

• 表面平面度

  λ/10 at 632.8 nm

• 楔形

  <3 arc min

• 入射角

  45°

• 反射率

  Rave>96% @ 45° AOI @ 193 nm

• 厚度

  9.53 mm  

• 厚度公差

  ±0.25 mm

• 直径公差

  +0/-0.25 mm

• 倒角

  0.5 mm face width

• 倒角公差

  45° ±15°

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20 qe20ll。55是一个长寿的深紫外准分子激光镜,直径50.8毫米,9.53毫米厚,和是193纳米涂层,优化了45°入射角。使用高纯准分子级熔融二氧化硅基体和超硬介电涂层制造的长效深紫外反射镜。精细的生产工艺保证了它们能承受300亿次脉冲。涂层非常耐用，可以经受多次清洗。