The NPA100SGV6 Vacuum Compatible Nano-Positioning Piezo Actuator is ideally suited for integration into custom motion devices. It provides nanometer resolution over a 100 μm travel range with micro-second response time in a very compact housing. NPA series actuators can generate large forces up to 1000 N which makes them particularly useful for machine tools, active vibration isolation or adaptive mechanics. Their small size and high resonant frequency are suitable for scanning microscopy, laser tuning and beam steering, patch clamping or micro lithography applications. This closed-loop version features a high resolution strain-gauge position sensor for highly accurate and repeatable motion. Also, the position feedback compensates for actuator creep. The assembly is done as a full Wheatstone bridge and is temperature insensitive. The closed-loop devices can be used in either open or closed-loop control. Fastening is accomplished by M3-threads at the top and the base of the piezoelectric actuator. Like all piezoelectric devices, moment loads and side forces should be avoided. Spanner flats are provided and should be used when securing screws. Vacuum compatible to 10-6 hPa.
Use with the NPC3SG Nanopositioning Amplifier.

• 行程范围

  100 µm  

• 轴向负载

  1000 N  

• 负载，拉

  150 N  

• 轴向刚度

  10 N/µm  

• 电容

  9.0

• 共振频率

  3000.0

• 电缆长度

  2 m

• 闭环重复精度

  28 nm  

• 闭环分辨率

  2.0 nm  

• 开环分辨率

  0.2 nm  

• 闭环行程范围

  80 µm  

• 真空兼容性

  10-6 hPa

• 
  

NPA100SGV6真空兼容纳米定位压电驱动器是集成到定制运动设备的理想选择。它提供了纳米分辨率在100μm旅游范围微秒响应时间非常紧凑的房屋。NPA系列执行机构能产生高达1000 N的巨大力，这使得它们特别适用于机床、主动隔振或自适应力学。其体积小，谐振频率高，适用于扫描显微镜，激光调谐和波束转向，贴片夹紧或微光刻应用。这个闭环版本的特点是高分辨率应变片位置传感器的高度精确和可重复运动。此外，位置反馈补偿执行机构蠕变。该总成是作为一个完整的惠斯通电桥完成的，温度不敏感。该闭环装置既可用于开环控制，也可用于闭环控制。紧固由压电执行机构顶部和底部的m3螺纹完成。与所有压电器件一样，应避免弯矩载荷和侧向力。扳手盖板是提供的，应该在固定螺丝时使用。真空兼容10-6 hPa。与NPC3SG纳米级定位放大器一起使用。