The NPA100V6 Vacuum Compatible Nano-Positioning Piezo Actuator is ideally suited for integration into custom motion devices. It provides nanometer resolution over a 100 μm travel range with micro-second response time in a very compact housing. NPA series actuators can generate large forces up to 1000 N which makes them particularly useful for machine tools, active vibration isolation or adaptive mechanics. Their small size and high resonant frequency are suitable for scanning microscopy, laser tuning and beam steering, patch clamping or micro lithography applications. In this open-loop version, the resolution is only limited by the noise of the control electronics, but repeatability and stability are compromised due to the hysteresis and creep of the piezo ceramic material. Fastening is accomplished by M3-threads at the top and the base of the piezoelectric actuator. Like all piezoelectric devices, moment loads and side forces should be avoided. Spanner flats are provided and should be used when securing screws. Vacuum compatible to 10-6 hPa.
Use with the NPC3 Nanopositioning Amplifier.
行程范围
100 µm
轴向负载
1000 N
负载,拉
150 N
轴向刚度
10 N/µm
电容
9.0
共振频率
3000.0
电缆长度
1 m
开环分辨率
0.2 nm
真空兼容性
10-6 hPa
NPA100V6真空兼容的纳米定位压电驱动器非常适合集成到定制的运动设备中。它提供了纳米分辨率在100μm旅游范围微秒响应时间非常紧凑的房屋。NPA系列执行机构能产生高达1000 N的巨大力,这使得它们特别适用于机床、主动隔振或自适应力学。其体积小,谐振频率高,适用于扫描显微镜,激光调谐和波束转向,贴片夹紧或微光刻应用。在这种开环版本中,分辨率仅受控制电子器件噪声的限制,但由于压电陶瓷材料的滞后和蠕变,影响了其重复性和稳定性。紧固由压电执行机构顶部和底部的m3螺纹完成。与所有压电器件一样,应避免弯矩载荷和侧向力。扳手盖板是提供的,应该在固定螺丝时使用。真空兼容10-6 hPa。与NPC3纳米放大一起使用。