The NPM140 Piezoelectric Micrometer Adapter provides nanometer positioning capability for manual products. This adapter mounts to the actuator seat on the stage and is mechanically compatible with all Newport stages and mounts and with a 0.375 inch (9.5mm) diameter mounting flange. Coarse adjustment is done with the manual screw. The final and fine adjustment is accomplished by controlling the piezo voltage of the NPM140. The extraordinary long travel range of 140 μm is provided by a sophisticated wire-EDM flexure system, which also serves as a linear guide for the actuator tip. The resolution of this open-loop version is in the sub-nanometer range and is limited only by the noise of the control electronics. Repeatability and stability are compromised due to the hysteresis and creep of the piezo ceramic material. Since this micrometer adapter holds the manual screw 22 mm back from its normal position, micrometers or screws with longer than 22mm are recommended for use in order to utilize the full travel of the manual stage or mount.
Use with the NPC3 Nanopositioning Amplifier.
行程范围
140 µm
轴向负载
100 N
负载,拉
150 N
轴向刚度
0.4 N/µm
电容
1.7
共振频率
670.0
电缆长度
1 m
开环分辨率
0.1 nm
重量
0.125 kg
NPM140压电测微适配器为手动产品提供纳米定位能力。该适配器安装在舞台上的执行机构阀座上,并与所有新港舞台和安装机械兼容,安装法兰直径为0.375英寸(9.5mm)。用手动螺丝进行粗调。最后通过控制NPM140的压电电压实现了最终的微调。非凡的长140μm旅行提供了一个复杂的电火花挠曲系统,也可以作为致动器的直线导轨小费。这个开环版本的分辨率在亚纳米范围内,仅受到控制电子的噪声的限制。由于压电陶瓷材料的滞后和蠕变,其重复性和稳定性受到了影响。由于千分尺适配器将手动螺杆从正常位置向后支撑22毫米,建议使用大于22毫米的千分尺或螺钉,以充分利用手动级或安装的行程。与NPC3纳米放大一起使用。