The 8081 XYZTxTy Motorized Five-Axis Tilt Aligner which increases the utility of our popular kinematic stages by motorizing each of the axes can now be used in UHV environments (10-9 Torr) as well as for VUV/EUV applications. The Picomotor™ actuators to each stage allows the same better than <30 nm remote high-resolution adjustment of various combinations of X, Y, Z, Tx, and Ty. With its minimal backlash, it is excellent for long term stability and high stiffness. The 8081-UHV has been tested and measured to outgas levels less than 5ppm of volatile mass at 85 °C over three hours. Mass Spectrograms detailing the exact outgassing compounds are available upon request. M4 and M6 tapped holes. Use with one 8081-UHV-C cable, two 8725 multi axis adapters and two 8742 controller/drivers to control all 5 axes.

• 移轴

  X, Y, Z, θx, θy

• 机制

  Piezo Motor

• 行程范围

  3 mm  

• 角范围

  θx=8°, θy=10°

• 负载

  13 N  

• 最小位移增量

  <30 nm

• 角分辨率

  θx, θy≤0.7 µrad

• 真空兼容性

  10-9 Torr

• 线缆类型

  Kapton® Ribbon Ultrahigh Vacuum Rated

• 接头类型

  DB15 Female

• 工作温度

  10 to 40°C

• 螺纹类型

  M4 and M6

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该8081 XYZTxTy电动五轴倾斜对准器，增加了我们流行的运动学阶段的效用，通过电动每一个轴，现在可以用于超高压环境(10-9 Torr)以及VUV/EUV应用。的Picomotor™驱动器允许每个阶段相同的比< 30 nm远程高分辨率调整各种组合的X, Y, Z, Tx,和泰。最小的反弹,是出色的长期稳定性和高刚度。8081 -特高压测试,测量水平小于5 ppm的挥发性的气体质量在85°C三个小时。质谱图详细说明了确切的排气化合物可根据要求。M4和M6抽头孔。1根8081-UHV-C电缆，2个8725多轴适配器和2个8742控制器/驱动程序一起使用来控制所有5个轴。