The 8095-M XYZθxθyθz Motorized Six-Axis Aligner increases the utility of our popular kinematic stages by motorizing each of the axes. The addition of Picomotor™ actuators to each stage allows remote high-resolution (<30 nm) adjustment of various combinations of X, Y, Z, θx, θy, and θz. The Model 8095-M six-axis aligner is ideal for semiconductor-wafer alignment. M6 tapped holes.

• 位移轴

  X, Y, Z, θx, θy, θz

• 机制

  Piezo Motor

• 行程范围

  3 mm  

• 角范围

  4°

• 负载

  13 N  

• 最小位移增量

  <30 nm

• 角分辨率

  θx, θy, θz≤0.2 µrad

• 接头类型

  4-pin Connectors (6)

• 工作温度

  10 to 40°C

• 螺纹类型

  M6

• 
  

8095 - m XYZθxθyθz机动基础上调整器增加我们的流行运动阶段的效用使机动化的每个轴。添加Picomotor™驱动器每个阶段允许远程高分辨率(< 30 nm)调整各种组合的X, Y, Z,θx,θy,和θz。8095-M六轴对准器是半导体-晶圆对准的理想选择。M6了洞。