这些多模定位器采用紧凑的挠性机构,能够以最小的后安装式设计实现双轴或五轴定位控制。五轴定位器采用节省空间的微型设计,所有定位器在 XY 中每 5° 转动分辨率为 4.4 μm。


These multi-mode locators use a compact flexible mechanism and can be designed with minimal rear mounting to achieve dual-axis or five-axis positioning control.Five-axis locator USES the miniature design of saving space, all the locator in XY every 5 ° rotation resolution of 4.4 microns.