Newport’s new ZVR-PC is an integrated Z-vertical and DC Servo Theta-rotation positioning stage designed to precisely elevate and rotate 200 mm and/or 300 mm diameter wafer chucks. The ZVR-PC offers precise 10 mm vertical and continuous 360 degree angular travel in a very low profile design. Utilizing a DC Servo motor, and integrated rotary encoder in the theta stage, the ZVR-PC is capable of high speed, high performance positioning. With integrated vacuum and electrical lines accessed at a single point, and a three point mounting interface, the ZVR-PC offers convenient, stable, and high performance capability for applications such as wafer positioning. Please refer to the datasheet for the complete specifications on the rotational and vertical motion capabilities of the ZVR-PC.

• 行程范围

  10 mm

• 角范围

  360°

• 最大速度

  80°/s

• 最大线速度

  10 mm/s  

• 最大扭矩

  1 Nm

• 中心负载

  100 N

• 螺纹类型

  M4

• 最小位移增量

  2 mdeg

• 最小位移增量，线性

  0.05 µm  

• 单向重复精度，典型值

  ±0.50 mdeg - 0.4 µm (linear)

• 单向重复精度，保证值

  ±1.5 mdeg, 2.0 µm (linear)

• 双向重复精度，典型值

  ±1.3 mdeg

• 双向重复精度，保证值

  ±3.0 mdeg

• Bi-directional Repeatability, Linear

  ±1.2 (typical) ±2.0 (guaranteed) µm

• Accuracy, Typical

  Rotary: ±10 mdeg - Linear: ±0.5 µm

• Accuracy, Guaranteed

  Rotary: ±15 mdeg - Linear: ±2.0 µm

• 摆动（典型值）

  ±22 µrad

• 摆动，保证值

  ±40 µrad

• Eccentricity, Typical

  ±2.2 µm

• 偏心率，保证值

  ±4.0 µm

• 原点

  Optical, centered

• 原点重复精度

  Rotary: ±7.5 mdeg
  Linear: ±2.5 µm

• 限位开关

  Optical ±165°

• 电缆长度

  3 m  

• 孔径

  50 mm

• 接头类型

  DB15 M (2)

• 重量

  4.2 kg

• MTBF

  20,000 h (25% load, 10% duty cycle)

• RoHS

  Compliant

新港的新ZVR-PC是一个集成的z -垂直和直流伺服的ta-旋转定位平台，设计用于精确提升和旋转200毫米和/或300毫米直径的晶圆夹头。ZVR-PC提供精确的10毫米垂直和连续360度角旅行在一个非常低的轮廓设计。ZVR-PC采用直流伺服电机，在theta阶段采用集成旋转编码器，具有高速、高性能的定位能力。ZVR-PC集成了真空和电气线路，单点接入，三点安装接口，为晶圆定位等应用提供了方便、稳定、高性能的性能。有关ZVR-PC的旋转和垂直运动能力的完整规格，请参阅数据表。