Newport’s new ZVR-PP is an integrated Z-vertical and Theta-rotation positioning stage designed to precisely elevate and rotate 200 mm and/or 300 mm diameter wafer chucks. The ZVR-PP offers precise 10 mm vertical and continuous 360 degree angular travel in a very low profile design. The low mass and high natural frequency of the ZVR-PP, provides a platform for rapid step-and-settle applications. With integrated vacuum and electrical lines accessed at a single point, and a three point mounting interface, the ZVR-PP offers convenient, stable, and high performance capability for applications such as wafer positioning. Please refer to the datasheet for full specifications on the ZVR-PP.Please refer to the datasheet for the complete specifications on the rotational and vertical motion capabilities of the ZVR-PP.

• 行程范围

  10 mm

• 角范围

  360°

• 最大速度

  40°/s

• 最大线速度

  10 mm/s  

• 最大扭矩

  1 N·m

• 中心负载

  100 N

• 螺纹类型

  M4

• 最小位移增量

  2 mdeg

• 最小位移增量，线性

  0.05 µm  

• 单向重复精度，典型值

  Rotary: ±1.0 mdeg - Linear: 0.4 µm

• 单向重复精度，保证值

  Rotary: ±1.5 mdeg - Linear: 2.0 µm

• 双向重复精度，典型值

  ±3.0 mdeg

• 双向重复精度，保证值

  ±6.0 mdeg

• Bi-directional Repeatability, Linear

  ±1.2 (typical) ±2.0 (guaranteed) µm

• Accuracy, Typical

  Rotary: ±10 mdeg - Linear: ±0.5 µm

• Accuracy, Guaranteed

  Rotary: ±17 mdeg - Linear: ±2.0 µm

• 摆动（典型值）

  ±22 µrad

• 摆动，保证值

  ±40 µrad

• Eccentricity, Typical

  ±2.2 µm

• 偏心率，保证值

  ±4.0 µm

• 原点

  Optical, centered

• 原点重复精度

  Rotary: ±20 mdeg
  Linear :±2.5 µm

• 限位开关

  Optical ±165°

• Encoder Resolution

  Rotary:0.5mdeg

• 电缆长度

  3 m  

• 孔径

  50 mm

• 接头类型

  DB15 Male (2)

• 重量

  4.2 kg

• MTBF

  20,000 h (25% load, 10% duty cycle)

• RoHS

  Compliant

新港的ZVR-PP是一个集成的Z-vertical和theta -旋转定位平台，设计用于精确提升和旋转200mm和/或300mm直径的薄片夹头。ZVR-PP提供了精确的10毫米垂直和连续360度角旅行在一个非常低的轮廓设计。ZVR-PP的低质量和高固有频率，为快速的步进和稳定应用提供了一个平台。ZVR-PP集成了真空和电源线，单点接入，三点安装接口，为晶圆定位等应用提供了方便、稳定、高性能的性能。关于ZVR-PP的全部规格请参考数据表。有关ZVR-PP旋转和垂直运动能力的完整规范，请参阅数据表。