The RGV160BL Direct Drive Rotation Stage provides ultra-fast rotation, very high resolution, and outstanding positioning performance. Applications include semiconductor wafer inspection, micro-robotics, and precision metrology. Direct-drive technology eliminates the worm gear of traditional rotation stages providing higher speeds, superior reliability, and enhanced position sensitivity. Speed, resolution, and repeatability are increased by a factor of up to ten times. A high efficiency brushless DC torque motor with rare earth magnets supplies an optimum ratio of torque per inertia for high acceleration, with minimal stage heating. At maximum continuous torque, the temperature of the motor increases by only 30°C. Precision is ensured by a high-resolution glass scale with 28,800 line pairs per revolution that directly measures the position of the rotating platen. The flat encoder is mounted on a precision ground reference surface and is perfectly aligned with the stage’s rotation axis to minimize position errors induced by eccentricity, wobble, or axial runout. The RGV160BL features a proprietary 4-point contact ball bearing. This unique, 2-piece design minimizes the number of parts resulting in a more compact stage with superior stiffness, high reliability and outstanding wobble and eccentricity specifications. A 30 mm diameter through-hole allows convenient routing of cables and vacuum lines through the stage. A once-per revolution index pulse permits precision homing to a unique home position. The RGV160BL does not include limit switches nor hard stop.

RGV160BL Load Characteristics


RGV160BL直接驱动旋转台旋转速度超快，分辨率极高，定位性能优异。应用包括半导体晶圆检验、微机器人和精密计量。直接驱动技术消除了传统的蜗轮蜗杆的旋转阶段提供更高的速度，优越的可靠性，并提高了位置灵敏度。速度、分辨率和重复性提高了10倍。高效无刷直流转矩电机与稀土磁铁提供了一个最佳比例的转矩每惯性高加速度，以最小的阶段加热。在最大持续转矩,电动机的温度增加只有30°C。高精度的玻璃刻度，每转28800对线，直接测量旋转压板的位置。平面编码器安装在一个精确的地面参考面上，并与工作台的旋转轴完全对准，以减少偏心、抖动或轴向跳动所引起的位置误差。RGV160BL具有一个专有的4点接触球轴承。这种独特的两件式设计最大限度地减少了部件的数量，从而形成一个更紧凑的阶段，具有优越的刚度、高可靠性和出色的摆动和偏心规范。直径30毫米的通孔便于电缆和真空线通过舞台。一次旋转指数脉冲允许精确地指向一个独特的家庭位置。RGV160BL不包括限位开关或硬停止。