The NPXYZ100SG Three Axis Nanopositioning Linear Stage is a 100 um travel piezo-based stage providing nanometer resolution motion in XYZ. It is ideally suited for nanopositioning of small components such as mirrors, fibers, laser diodes, micro-optics, sensors, or cellular samples. Applications include optical delay lines, path length changes of interferometers, laser lithography, scanning microscopy, and patch-clamping, among others. NPX stages feature highly reliable, multi-layer, low-voltage piezoelectric transducer (PZT) stacks for high-duty cycle operations. A sophisticated, FEA-optimized, parallelogram solid state flexure guide system ensures perfect parallel motion. Due to the frictionless guide, NPX stages are maintenance-free, are not subject to wear and provide rapid response and fast settling performance making them suitable for use in dynamic processes such as high-frequency error compensation, tracking, fast stepping or continuous scanning. 
The closed-loop version features a high resolution strain-gauge position sensor for highly accurate and repeatable motion, that also compensates for actuator creep. The sensors are built in a full Wheatstone bridge design. It can be operated in either open or closed-loop control. Fastening is easy with tapped and alignment pin holes at the top and bottom plates. For mounting to optical tables or other components with the same hole grid, use adapter plate NPX-BP. Like with all piezo flexure devices, excessive moment loads and side forces acting between the top plate and the housing should be avoided during fastening.
Use with the NPC3SG Nanopositioning Amplifier.


NPXYZ100SG三轴纳米定位线性级是一个基于压电的100 um移动级，提供XYZ中的纳米分辨率运动。它是理想的纳米定位小部件，如镜子，光纤，激光二极管，微光，传感器，或细胞样品。应用领域包括光延迟线、干涉仪的路径长度变化、激光光刻、扫描显微镜、贴片夹紧等。NPX级具有高可靠性，多层，低压压电换能器(PZT)栈为高占空比操作。一个复杂的，有限元优化，平行四边形固体弯曲导向系统，确保完美的平行运动。NPX级由于无摩擦导轨，免维护，不受磨损，具有快速响应和快速沉降性能，适用于高频误差补偿、跟踪、快速步进或连续扫描等动态过程。

闭环版本的特点是高分辨率应变计位置传感器的高精度和可重复的运动，这也补偿了执行机构蠕变。这些传感器是按照惠斯通桥的整体设计建造的。它既可以在开环控制中操作，也可以在闭环控制中操作。紧固容易与螺纹和定位销孔在顶部和底部板。如果要安装到光学表或具有相同孔网格的其他组件上，请使用适配器板NPX-BP。与所有压电弯曲装置一样，在紧固过程中，应避免在顶板和壳体之间施加过大的力矩载荷和侧向力。

与NPC3SG纳米级定位放大器一起使用。